Abstract: A stator includes a cylindrical stator core having a plurality of slots, and a plurality of coils having segment conductors inserted through the plurality of slots and extending in axial direction, a coolant flow channel through which coolant flows is formed between outer circumferential surface of the segment conductor and inner circumferential surface of the slot, the outer circumferential surface of the segment conductor includes first flat surface facing radial direction, second flat surface facing circumferential direction, and a corner portion curved surface connecting the first flat surface and the second flat surface, the corner portion curved surface includes first curved surface continuous with the first flat surface and second curved surface continuous with the second flat surface, and when seen in cross-sectional view perpendicular to the axial direction, radius of curvature of the first curved surface is greater than radius of curvature of the second curved surface.

Abstract: An exposure apparatus includes a motion control system, the motion control system including a structure, a plurality of actuators to apply forces to the structure, respectively, and a plurality of sensors to sense motion states of the structure, respectively. The apparatus includes a pseudo-random signal generator to generate a plurality of pseudo-random signals and to apply the plurality of pseudo-random signals to the plurality of actuators, the plurality of pseudo-random signals being equal in number to a number of degrees of freedom of the motion control system, a storage unit to store a first plurality of time-series data obtained by the plurality of sensors with a second plurality of time-series data corresponding to the plurality of pseudo-random signals, and a characteristic deriving unit to derive a characteristic of the motion control system based on the first and second plurality of time-series data.

Abstract: In a temperature adjusting system, a first temperature measuring unit measures the temperature at a blowing outlet port supplying a temperature control space with a medium and a first temperature controller provides compensation responsive to the first measured temperature. A second temperature measuring unit measures the temperature of the temperature control space downstream of the blowing outlet port and a second temperature controller provides compensation responsive to second measured temperature. A temperature converting unit controls heat generation on the basis of the first temperature controller output to control the medium at the constant temperature supplied from the blowing outlet port. A set predetermined temperature corresponding to a desired value for the temperature in the temperature control space is input to the second temperature controller and the second temperature controller output is input as a temperature value to the first temperature controller.

Abstract: This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator.

Abstract: Disclosed is a temperature adjusting system and an exposure apparatus having the same, which includes a blowing outlet port for supplying a medium into a subject to be temperature controlled, a first temperature detector for measuring a temperature of the medium at the bowing outlet port, a first temperature controller for performing compensation operation in response to an output of the first temperature detector, a second temperature detector for measuring a temperature of a temperature control space which is downstream of the blowing outlet port, a second temperature controller for performing compensation operation in response to an output of the second temperature detector, and a re-heating heater for controlling heat generation on the basis of an output of the first temperature controller so that a medium controlled at constant temperature is supplied into the temperature control space, wherein a temperature set value corresponding to a desired temperature for the space is inputted to the second temperat

Abstract: A method relying on the time response includes acquiring the time response waveforms of all the acceleration sensors obtained when a table for vibration isolating is excited by a pseudo impulse (step S802), making the frequency analysis for the time response waveforms (step S803), calculating a mode matrix &phgr; (step S804), and implementing the mode matrix &phgr; in a non-interacting control system for each vibration mode (step S805). A method relying on the frequency response includes acquiring the frequency responses to all the acceleration sensors, displaying the acquired frequency responses in a Nyquist diagram, obtaining a parameter (&phgr;) fitted to each Nyquist circle, and implementing the obtained parameter &phgr; in a non-interacting control system for each vibration mode.

Abstract: An exposure apparatus includes a major structure, an active anti-vibration system for supporting the major structure, a pedestal on which the major structure is mounted through the active anti-vibration system, and a vibration sensor embedded in or incorporated in the pedestal. This arrangement accomplishes detection of a signal related to ground vibration without being influenced by any local vibration.

Abstract: A vibration suppressing system includes a structural member with respect to which vibration suppression is to be executed, an actuator, having a pair of a fixed member and a movable member, for moving the movable member relative to the fixed member, and a first vibration sensor for measuring vibration of the structural member. A displacement sensor measures a movement distance of the movable member, a second vibration sensor measures vibration of the movable member, and a controller controls the actuator on the basis of outputs from the first vibration sensor, the displacement sensor and the second vibration sensor.

Abstract: A stage system includes a movable stage, a position measuring device for measuring the position of the stage, a velocity sensor for detecting the velocity of the stage, and a control unit having a position feedback loop based on an output of the position measuring device and a feedback loop for applying a damping to the stage on the basis of an output of the velocity sensor. With the addition of the feedback loop for applying the damping to the stage by using an output of the velocity sensor, a strong braking function is provided, such that the positioning settlement time can be shortened.

Abstract: A hybrid active vibration isolation device has an intermediate plate inserted between a vibration damping subject and a setting surface on which the vibration damping subject is set, and laminated rubber and electromagnetic motors are interposed between the vibration damping subject and intermediate plate. A piezoelectric element is interposed between the intermediate plate and setting surface. In order to detect vibrations of the vibration damping subject, intermediate plate, and setting surface, velocity sensors are provided to them. The active vibration isolation device has a feedback mechanism for controlling the electromagnetic motors on the basis of signals from the velocity sensors provided to the vibration damping subject and setting surface, and controlling the piezoelectric element on the basis of a signal from the velocity sensor set on the intermediate plate.

Abstract: A projection exposure apparatus includes projection optics for projecting a pattern, which has been formed on a mask or reticle, onto a wafer placed on a stage; an XYZ stage on which the substrate is placed and which is movable along the direction of the optic axis of the projection optics and in a direction orthogonal to the direction of the optic axis; a surface position measurement unit capable of measuring a predetermined position along the optic axis of the projection optics and the relative position of the surface of the substrate on the state; and a vibration measurement unit capable of measuring vibration of the projection optics. The XYZ stage is driven and controlled based upon results of measurement from the surface position measurement unit and vibration measurement unit, thereby reducing deviation between the wafer surface and imaging plane and improving contrast and resolving power.

Abstract: A projection exposure apparatus includes projection optics for projecting a pattern, which has been formed on a mask or reticle, onto a wafer placed on a stage; an XYZ stage on which the substrate is placed and which is movable along the direction of the optic axis of the projection optics and in a direction orthogonal to the direction of the optic axis; a surface position measurement unit capable of measuring a predetermined position along the optic axis of the projection optics and the relative position of the surface of the substrate on the state; and a vibration measurement unit capable of measuring vibration of the projection optics. The XYZ stage is driven and controlled based upon results of measurement from the surface position measurement unit and vibration measurement unit, thereby reducing deviation between the wafer surface and imaging plane and improving contrast and resolving power.

Abstract: An exposure apparatus for exposing and transferring a reticle pattern to a photosensitive substrate includes a table for holding the reticle or photosensitive substrate, and a parallel link mechanism for positioning the table. An apparatus for positioning first and second objects relative to each other includes a first parallel link mechanism for holding and moving the first object, and a second parallel link mechanism for holding and moving the second object. The first and second parallel link mechanisms are supported by a common base plate. The base plate supports a third object. The first and second objects are positioned with respect to the third object.

Abstract: An anti-vibration apparatus for actively damping vibrations of an object by generating control forces for reducing the vibrations includes a first actuator for generating a first control force, and a second actuator which generates a second control force and is driven on a driving principle different from that for the first actuator. The first actuator generates forces in the vertical and horizontal directions. The second actuator generates a force in at least one of the vertical and horizontal directions.

Abstract: An anti-vibration apparatus for actively damping an object vibrations by generating control forces for reducing the vibrations includes a first actuator for generating a first control force, and a second actuator which generates a second control force and is driven on a driving principle different from that for the first actuator. The first actuator generates forces in the vertical and horizontal directions. The second actuator generates a force in at least one of the vertical and horizontal directions.

Abstract: An active vibration isolator includes a vibration isolation platform on which an object to be isolated from vibration is mounted, an air-spring actuator which supports the vibration isolation platform, the air-spring actuator including a valve, which is subjected to feedback drive, a vibration measurement device which measures vibration of the vibration isolation platform and outputs acceleration and velocity signals, a position measurement device which measures position of the vibration isolation platform and first, second and third feedback loops. The first feedback loop feeds back an output of a force measurement device, which measures a working force applied by the air-spring actuator to the vibration isolation platform, thereby controlling the working force supplied by the air-spring actuator. The second feedback loop has a PI compensator and signals of the vibration measurement device are fed back to an input side of the compensator, for producing damping and spring effects which act upon the platform.

Abstract: This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator.

Abstract: An anti-vibration table having a structure supporting a movable stage is supported by an air spring actuator. The control system of the air spring actuator has a position feedback system for positioning the anti-vibration table at a predetermined equilibrium position on the basis of the position detection signal of the anti-vibration table, an acceleration feedback system for imparting damping characteristics to the anti-vibration table on the basis of the acceleration detection signal of the anti-vibration table, and an applied pressure feedback system for controlling the applied pressure of the air spring actuator. A correction signal for correcting a tilt of the anti-vibration table, which is generated when the stage on the anti-vibration table moves, is generated on the basis of a signal from a laser interferometer for detecting the position of the stage, and feedforward-input to the applied pressure feedback system.

Abstract: An anti-vibration apparatus is equipped with a plurality of active support legs which support an anti-vibration table and which are able to actively operate to control the motion of the anti-vibration table in a horizontal plane. The apparatus is further equipped with a pressure feedback loop for detecting the internal pressure of an air spring provided in each of the plurality of active support legs and for feeding a signal, which is based on the detected internal pressure of the air spring, back to the control system of the anti-vibration apparatus.

Abstract: An anti-vibration apparatus has a feedback loop based on vibration information from an anti-vibration table, and a feedforward loop based on vibration information from a setting foundation. A compensation mechanism in the feedforward loop uses an adaptive filter. The adaptive filter sequentially sets parameters in the compensation mechanism on the basis of the vibration information form the anti-vibration table and setting foundation. The vibration information consists of vibration component information indicating vibrations in units of motion directions, and a determination mechanism and an operation switching mechanism arranged at the input side of the adaptive filter select the vibration component information and supply the selected information to the adaptive filter.