Patents by Inventor Shinn Yu

Shinn Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Seal ring arrangements for immersion lithography systems
    Publication number: 20070008508
    Abstract: Various seal ring arrangements for an immersion lithography system are disclosed. With the seal ring arrangements, the immersion lithography system can provide better sealing effect for processing the wafers on a wafer chuck.
    Type: Application
    Filed: September 18, 2006
    Publication date: January 11, 2007
    Inventors: Burn Lin, Tsai-Sheng Gau, Chun-Kuang Chen, Ru-Gun Liu, Shinn Yu, Jen Shih