Patents by Inventor Shinobu Kiriya

Shinobu Kiriya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus and exposing method for elastically deforming a contact mask with control data
    Patent number: 7312853
    Abstract: An exposure apparatus for exposing an object to be exposed by elastically deforming an exposing mask having a micro-opening pattern so as to bring the exposing mask into contact with the object includes a compression/decompression section for elastically deforming the exposing mask with compression/decompression so as to bring the exposing mask into contact with the object or into detachment from the object; and a controlling section for controlling the compression/decompression operation with the compression/decompression section. The controlling section controls the compression/decompression operation with the compression/decompression section based on control data prepared in advance.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: December 25, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Shinobu Kiriya
  • Exposure apparatus and exposing method
    Publication number: 20060033896
    Abstract: An exposure apparatus for exposing an object to be exposed by elastically deforming an exposing mask having a micro-opening pattern so as to bring the exposing mask into contact with the object includes a compression/decompression section for elastically deforming the exposing mask with compression/decompression so as to bring the exposing mask into contact with the object or into detachment from the object; and a controlling section for controlling the compression/decompression operation with the compression/decompression section. The controlling section controls the compression/decompression operation with the compression/decompression section based on control data prepared in advance.
    Type: Application
    Filed: June 28, 2005
    Publication date: February 16, 2006
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Shinobu Kiriya