Abstract: A multi-stage supercharging apparatus including a first supercharger and a second supercharger. The first supercharger is provided with a first turbine accommodating section, a first exhaust inlet, and a first exhaust outlet which extends in an axial direction of the first turbine from the first turbine accommodating section and is bent upward. The second supercharger is provided with a second turbine, a second turbine accommodating section, and a second exhaust inlet which is directly connected to the first exhaust outlet to allow the first exhaust outlet to be communicated with the second turbine accommodating section, and the second supercharger is supported by the first supercharger by placing an opening of the second exhaust inlet on an opening of the first exhaust outlet.

Abstract: A multi-stage supercharging apparatus including a first supercharger and a second supercharger. The first supercharger is provided with a first turbine accommodating section, a first exhaust inlet, and a first exhaust outlet which extends in an axial direction of the first turbine from the first turbine accommodating section and is bent upward. The second supercharger is provided with a second turbine, a second turbine accommodating section, and a second exhaust inlet which is directly connected to the first exhaust outlet to allow the first exhaust outlet to be communicated with the second turbine accommodating section, and the second supercharger is supported by the first supercharger by placing an opening of the second exhaust inlet on an opening of the first exhaust outlet.

Abstract: There is disclosed a charged-particle beam system equipped with a higher-order aberration corrector capable of correcting fifth-order spherical aberration and third-order chromatic aberration such that the primary trajectory of an electron beam is not affected by the strength of a transfer lens. The corrector is so adjusted that the image point of the corrector is located at a position shifted a distance of L0 from the principal plane of an objective lens toward the electron source. The transfer lens is so disposed that the position of the principal plane is coincident with the image point of the corrector. Therefore, the primary trajectory of the electron beam passes through the center of the transfer lens. Consequently, the primary trajectory is not affected by the strength of the transfer lens.

Abstract: There is disclosed a method and apparatus for automatically correcting a charged-particle beam with an aberration corrector without the operator performing manual operations. The apparatus has an extraction portion for extracting the profile of the beam from images of a surface of a sample, a calculation unit for calculating the amount of axial deviation of the apparatus from the position of the extracted profile of the beam, and a feedback unit for automatically applying feedback to the aberration corrector or to the objective lens according to the calculated amount of axial deviation.

Abstract: There is disclosed a charged-particle beam system equipped with a higher-order aberration corrector capable of correcting fifth-order spherical aberration and third-order chromatic aberration such that the primary trajectory of an electron beam is not affected by the strength of a transfer lens. The corrector is so adjusted that the image point of the corrector is located at a position shifted a distance of L0 from the principal plane of an objective lens toward the electron source. The transfer lens is so disposed that the position of the principal plane is coincident with the image point of the corrector. Therefore, the primary trajectory of the electron beam passes through the center of the transfer lens. Consequently, the primary trajectory is not affected by the strength of the transfer lens.

Abstract: Method and system for correcting chromatic aberrations in a charged-particle beam for automated correction of chromatic aberrations. The system directs a part of the charged-particle beam as a probe at a specimen. The system includes an extraction unit for extracting probe profiles from scanned images created by the beam, a chromatic aberration calculator for calculating chromatic aberrations in the system from the extracted probe profiles, and a correction unit for operating a chromatic aberration corrector based on the calculated chromatic aberrations.

Abstract: The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus has a memory for storing image data obtained by scanning a specimen with the beam. A four-sided region-blurring device reads the image data from the memory and blurs regions close to the four sides of an image represented by the image data. A probe profile extractor extracts the probe profile from the image that has been blurred as mentioned above. A correction amount-calculating unit performs extraction of amounts of features, calculations of aberrations. A correcting unit corrects the aberration corrector.

Abstract: The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus extracts line profiles from the probe profile of the charged-particle beam. Features indicative of the line profile, i.e., ?, ?, and ? indicating left-and-right asymmetry, width, and unevenness around the center, respectively, are extracted. An aberration amount calculator calculates amounts of aberrations corresponding to aberrations, respectively, in the charged-particle beam from the amounts of features ?, ?, and ?. An aberration corrector corrects the aberrations in the beam.

Abstract: There is disclosed a method and apparatus for automatically correcting a charged-particle beam with an aberration corrector without the operator performing manual operations. The apparatus has an extraction portion for extracting the profile of the beam from images of a surface of a sample, a calculation unit for calculating the amount of axial deviation of the apparatus from the position of the extracted profile of the beam, and a feedback unit for automatically applying feedback to the aberration corrector or to the objective lens according to the calculated amount of axial deviation.

Abstract: Method and system for correcting chromatic aberrations in a charged-particle beam for automated correction of chromatic aberrations. The system directs a part of the charged-particle beam as a probe at a specimen. The system includes an extraction unit for extracting probe profiles from scanned images created by the beam, a chromatic aberration calculator for calculating chromatic aberrations in the system from the extracted probe profiles, and a correction unit for operating a chromatic aberration corrector based on the calculated chromatic aberrations.

Abstract: The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus extracts line profiles from the probe profile of the charged-particle beam. Features indicative of the line profile, i.e., ?, ?, and ? indicating left-and-right asymmetry, width, and unevenness around the center, respectively, are extracted. An aberration amount calculator calculates amounts of aberrations corresponding to aberrations, respectively, in the charged-particle beam from the amounts of features ?, ?, and ?. An aberration corrector corrects the aberrations in the beam.

Abstract: An aberration correction method and charged-particle beam instrument with four stages of multipole units. The two central stages of multipole units function as two stages of magnetic quadrupole components for superimposing a magnetic potential distribution analogous with an applied electric potential distribution on this electric potential distribution. The instrument further includes an objective lens, an objective aperture mounted in the optical path for a beam of charged particles, an operation portion for varying the accelerating voltage or the working distance between the objective lens and a specimen, and a control portion for controlling the multipole units according to an operation of the operation portion.

Abstract: The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus has a memory for storing image data obtained by scanning a specimen with the beam. A four-sided region-blurring device reads the image data from the memory and blurs regions close to the four sides of an image represented by the image data. A probe profile extractor extracts the probe profile from the image that has been blurred as mentioned above. A correction amount-calculating unit performs extraction of amounts of features, calculations of aberrations. A correcting unit corrects the aberration corrector.

Abstract: An aberration correction method and charged-particle beam instrument with four stages of multipole units. The two central stages of multipole units function as two stages of magnetic quadrupole components for superimposing a magnetic potential distribution analogous with an applied electric potential distribution on this electric potential distribution. The instrument further includes an objective lens, an objective aperture mounted in the optical path for a beam of charged particles, an operation portion for varying the accelerating voltage or the working distance between the objective lens and a specimen, and a control portion for controlling the multipole units according to an operation of the operation portion.

Abstract: An arrangement for supporting an electronic control unit (1) on an internal combustion engine. The electronic control unit is provided to bridge a part (7) of an engine main body assembly (6) and a part (9) of an air intake assembly (11). The part of the air intake assembly (11) is preferably an intake air pipe (9). The part of the engine main body assembly (6) is preferably a head cover (7). Therefore, the weight of the electronic control unit (1) is partly supported by the head cover (7) of which rigidity is high. The electronic control unit (1) is inclined towards the head cover (7) so that a larger ratio of the weight of the electronic control unit is supported by the head cover.