Abstract: An image processing apparatus includes an image acquisition part that acquires a plurality of different measured images, a modeling part that identifies, for each pixel, a modeled parameter approximating an approximation function of a data sequence where pixel values of pixels corresponding to the respective measured images are placed in an order of capturing, a reconstructed image generation part that generates reconstructed images which are images corresponding to the respective measured images and reconstructed with an approximation value of each pixel identified based on the modeled parameter of each pixel, and an image changing part that changes the pixel values of the measured images based on statistics of the pixel values of the measured images and that of the corresponding reconstructed images.

Abstract: An image processing apparatus includes an image acquisition part that acquires a plurality of measured images by capturing an object to be measured; a modeling part that identifies a modeled parameter based on the measured images; an intermediate image generation part that generates an intermediate image for generating a geometry image indicating a geometry of the object to be measured based on the modeled parameter; a noise threshold image generation part that generates a noise threshold image by identifying a noise threshold value of each pixel in the intermediate image using statistics indicating an error between the pixel values of pixels included in the data sequence and approximation values of pixels identified based on the modeled parameter for each pixel; and a noise removing part that performs thresholding on the intermediate image using the noise threshold image.

Abstract: An image processing apparatus includes an image acquisition part that acquires a plurality of different measured images, a modeling part that identifies, for each pixel, a modeled parameter approximating an approximation function of a data sequence where pixel values of pixels corresponding to the respective measured images are placed in an order of capturing, a reconstructed image generation part that generates reconstructed images which are images corresponding to the respective measured images and reconstructed with an approximation value of each pixel identified based on the modeled parameter of each pixel, and an image changing part that changes the pixel values of the measured images based on statistics of the pixel values of the measured images and that of the corresponding reconstructed images.

Abstract: An image processing apparatus includes an image acquisition part that acquires a plurality of measured images by capturing an object to be measured; a modeling part that identifies a modeled parameter based on the measured images; an intermediate image generation part that generates an intermediate image for generating a geometry image indicating a geometry of the object to be measured based on the modeled parameter; a noise threshold image generation part that generates a noise threshold image by identifying a noise threshold value of each pixel in the intermediate image using statistics indicating an error between the pixel values of pixels included in the data sequence and approximation values of pixels identified based on the modeled parameter for each pixel; and a noise removing part that performs thresholding on the intermediate image using the noise threshold image.

Abstract: An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.

Abstract: An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.