Patents by Inventor Shinpei Takeshita

Shinpei Takeshita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for inspecting and/or processing a sample
    Patent number: 6509969
    Abstract: A system for inspecting and/or processing a sample on a stage with a probe or imaging apparatus, the probe or imaging apparatus is defined by an optical column having beam generating means and means to deflect the beam, the position of the stage relatively to the probe or imaging apparatus being controlled by position control means. The position control means comprises gyroscopic means fixed to the stage and/or the probe or imaging apparatus and is operatively connected with the deflection means in order to compensate unintentional movements of the stage relatively to the column.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: January 21, 2003
    Assignee: Advantest Corp.
    Inventors: Shinpei Takeshita, Jurgen Frosien