Abstract: Two transport units are provided with a partition device. The partition device includes a partition body, a partition body guide mechanism, and a movement assist mechanism. The movement assist mechanism includes a cable body and a cable body guide mechanism. A coupling portion is coupled to an upper portion of the partition body. A grip portion is provided on the cable body spaced apart from the coupling portion. The cable body guide mechanism includes a guide body. The cable body extends along a curved extending direction along the guide body. A portion of the cable body on the coupling portion side relative to the guide body extends along a width direction on a protruding side in the width direction relative to the guide body, and a portion of the cable body on the grip portion side relative to the guide body extends along an up-down direction below the guide body.

Abstract: A transport space Si is formed in front of an article storage rack 1, and a plurality of up-down partition bodies that partition storage sections 1a adjacent to each other in an up-down direction are provided in the article storage rack 1. A flow path space S2 extending in the up-down direction is formed between a wall portion 43 and the plurality of storage sections 1a, and each of the plurality of storage sections 1a is located between the flow path space S2 and the transport space S1, and is in communication with the flow path space S2 and the transport space S1. A gas supply portion 51 includes a flow inlet 53 into which a gas from the outside flows, and is in communication with an upper end portion of the transport space S1 and an upper end portion of the flow path space S2.

Abstract: An article storage facility includes a first rail extending along a rail extending direction, a first storage rack configured to store a plurality of articles, a first transport device configured to move along the first rail and to transfer an article to and from the first storage rack, a second rail extending along the rail extending direction; and a second storage rack configured to store a plurality of articles, and a second transport device configured to move along the second rail and to transfer an article to and from the second storage rack. The first rail and the second rail are spaced apart by a set distance from each other along the rail extending direction. A third rail extends along the rail extending direction between the first rail and the second rail, and has a length less than the set distance. The third rail includes a fixed base and a movable rail portion.

Abstract: A gas supplying device has a plurality of connectors each of which is configured to be connected to a container stored in the corresponding one of supplying storage sections, supply lines configured to divide and supply gas to the plurality of connectors, and a mass flow controller configured to control a flow rate of gas that flows through one of the supply lines. The supply lines include first supply lines each of which is installed to a corresponding supplying storage sections, a second supply line installed upstream of the first supply lines, and a branching supply line for dividing gas supplied from the second supply line into the first supply lines. The mass flow controller is installed in the second supply line and in an installation area.

Abstract: An article storage facility includes a first rail extending along a rail extending direction, a first storage rack configured to store a plurality of articles, a first transport device configured to move along the first rail and to transfer an article to and from the first storage rack, a second rail extending along the rail extending direction; and a second storage rack configured to store a plurality of articles, and a second transport device configured to move along the second rail and to transfer an article to and from the second storage rack. The first rail and the second rail are spaced apart by a set distance from each other along the rail extending direction. A third rail extends along the rail extending direction between the first rail and the second rail, and has a length less than the set distance. The third rail includes a fixed base and a movable rail portion.

Abstract: A flow rate measurement system measures, by using a flow rate measurement device, a flow rate of cleaning gas in a container storage facility including: a storage rack including supporting portions; a transport device that transports a container to the supporting portions; and a gas supply device that supplies the cleaning gas to the container supported by the supporting portions. The transport device and the flow rate measurement device are connected via a power line communicatively by wire or wireless. The flow rate measurement device measures the flow rate of the cleaning gas in a state in which the transport device has transported the flow rate measurement device and the flow rate measurement device is placed on a target supporting portion.

Abstract: A storage facility includes a storage rack including a plurality of storage sections and a gas supply portion that supplies an inactive gas to containers stored in the storage sections. Struts are installed at left and right ends of the storage rack and between adjacent ones of the storage sections, and placement portions are fixed to mutually adjacent ones of the struts. Each vertical pipe included in the gas supply portion is fixed to one of the struts to which the placement portion to which the inactive gas is supplied by the vertical pipe is fixed.

Abstract: A storage facility is achieved that is capable of suppressing, with a simple configuration, the inactive gas concentration in the gas discharged to the outside of a storage space. The storage facility includes a storage device including a plurality of storage sections in an inside of a storage space formed so as to be partitioned from the outside, and an inactive gas supply portion that supplies inactive gas to an inside of a container stored in the storage section. The storage device includes a gas discharge portion that discharges, to the outside of the storage space, gas within the storage space that contains the gas discharged from the container. The gas discharge portion includes a restricting orifice portion serving as a restricting portion that restricts a flow rate of gas, and the restricting orifice portion is formed below a region where the storage sections are disposed.

Abstract: A flow rate measurement system measures, by using a flow rate measurement device, a flow rate of cleaning gas in a container storage facility including a storage rack including supporting portions; a transport device that transports a container to the supporting portions; and a gas supply device that supplies the cleaning gas to the container supported by the supporting portions. The transport device and the flow rate measurement device are connected via a power line communicatively by wire or wireless. The flow rate measurement device measures the flow rate of the cleaning gas in a state in which the transport device has transported the flow rate measurement device and the flow rate measurement device is placed on a target supporting portion.

Abstract: A transport space Si is formed in front of an article storage rack 1, and a plurality of up-down partition bodies that partition storage sections 1a adjacent to each other in an up-down direction are provided in the article storage rack 1. A flow path space S2 extending in the up-down direction is formed between a wall portion 43 and the plurality of storage sections 1a, and each of the plurality of storage sections 1a is located between the flow path space S2 and the transport space S1, and is in communication with the flow path space S2 and the transport space S1. A gas supply portion 51 includes a flow inlet 53 into which a gas from the outside flows, and is in communication with an upper end portion of the transport space S1 and an upper end portion of the flow path space S2.

Abstract: A storage portion includes a first support portion and a second support portion that support a container. The storage portion is configured to change between a first state and a second state due to the second support portion being raised or lowered. An inert gas supply apparatus includes a connection portion at a height at which the connection portion is connected to the container in the first state and the connection portion is located away from and below the container in the second state. A transport moving body includes a third support portion supporting the container and a protrusion/retraction driving portion that causes the third support portion to protrude and retract. The third support portion is inserted into a transfer space when moved so as to protrude or retract by the protrusion/retraction driving portion. Movement path of the third support portion overlaps with the connection portion in a vertical direction view.

Abstract: A gas supplying device has a plurality of connectors each of which is configured to be connected to a container stored in the corresponding one of supplying storage sections, supply lines configured to divide and supply gas to the plurality of connectors, and a mass flow controller configured to control a flow rate of gas that flows through one of the supply lines. The supply lines include first supply lines each of which is installed to a corresponding supplying storage sections, a second supply line installed upstream of the first supply lines, and a branching supply line for dividing gas supplied from the second supply line into the first supply lines. The mass flow controller is installed in the second supply line and in an installation area.

Abstract: A storage portion includes a first support portion and a second support portion that support a container. The storage portion is configured to change between a first state and a second state due to the second support portion being raised or lowered. An inert gas supply apparatus includes a connection portion at a height at which the connection portion is connected to the container in the first state and the connection portion is located away from and below the container in the second state. A transport moving body includes a third support portion supporting the container and a protrusion/retraction driving portion that causes the third support portion to protrude and retract. The third support portion is inserted into a transfer space when moved so as to protrude or retract by the protrusion/retraction driving portion. Movement path of the third support portion overlaps with the connection portion in a vertical direction view.

Abstract: An article storage facility is provided which is relatively simple in structure and in which it is easier to perform maintenance work of apparatus provided to each zone. A first switching valve is provided in each of a plurality of zone gas supply portions whereas a second switching valve is provided in each of a plurality of storage section gas supply portions. A plurality of relief passages is provided with each relief passage connected to the inactive gas supply passage on a downstream side, with respect to a gas supplying direction, of the position in which the first switching valve is provided and on an upstream side, with respect to the gas supplying direction, of the position in which the second switching valve is provided in the inactive gas supply passage. A zone relief switching valve is provided to each of the plurality of relief passages.

Abstract: A storage facility includes a storage rack including a plurality of storage sections and a gas supply portion that supplies an inactive gas to containers stored in the storage sections. Struts are installed at left and right ends of the storage rack and between adjacent ones of the storage sections, and placement portions are fixed to mutually adjacent ones of the struts. Each vertical pipe included in the gas supply portion is fixed to one of the struts to which the placement portion to which the inactive gas is supplied by the vertical pipe is fixed.

Abstract: An inspection apparatus used for an article storage facility includes an inactive gas supply portion provided with a supply nozzle provided in a placement support portion. A transport container having a supply port for an inactive gas is formed at a bottom portion thereof for accommodating substrates in a sealed state. The nozzle is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container. An inspection supply port is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion, and is configured such that a gravity center position is supported on the placement support portion and coincides with a gravity center position of the transport container, the supply port inspects a state of supply of the inactive gas in the state of being supported on the placement support portion.

Abstract: A processing facility is disclosed in which a container side contact surface and a support side contact surface are in contact with each other and a supply hole or a discharge hole, and a communicating hole are allowed to communicate with each other when a container is supported by a container support, and in which the container side contact surface is formed to be flat at least in a periphery of the communicating hole, and the support side contact surface is formed to have a shape that is gradually lower as a distance increases from the supply hole or the discharge hole.

Abstract: A ladder includes a pair of protruding portions protruding outwardly on opposite sides in the direction of alignment of the longitudinal bars at the upper end of the longitudinal bars. Structures are provided with a pair of placement support portions spaced apart by a set distance that is longer than the distance between the outer side surfaces of upper end portions of the longitudinal bars in a direction of alignment thereof. The amount of protrusion of the protruding portions is such that the protruding portions overlap in plan view with the placement support portions located at the respective corresponding positions when the ladder is oriented such that a direction of alignment of the upper end portions of the longitudinal bars coincides with the direction of alignment of the placement support portions.

Abstract: A traveling body of a stacker crane is separable into a lower traveling portion and an upper traveling portion by separating a post into a lower post portion and an upper post portion, in which the lower traveling portion in a separated state separated from the upper traveling portion and supporting a lift body is moved in a width direction with its traveling posture being maintained to be taken in or out between a moving space and a take-in/out space.

Abstract: A storage facility is achieved that is capable of suppressing, with a simple configuration, the inactive gas concentration in the gas discharged to the outside of a storage space. The storage facility includes a storage device including a plurality of storage sections in an inside of a storage space formed so as to be partitioned from the outside, and an inactive gas supply portion that supplies inactive gas to an inside of a container stored in the storage section. The storage device includes a gas discharge portion that discharges, to the outside of the storage space, gas within the storage space that contains the gas discharged from the container. The gas discharge portion includes a restricting orifice portion serving as a restricting portion that restricts a flow rate of gas, and the restricting orifice portion is formed below a region where the storage sections are disposed.