Abstract: Disclosed is fluorocarbon-based dry etching gas which is free of global environmental problems and a dry etching method using a plasma gas obtained therefrom. The dry etching gas includes a fluorinated ether of carbon, fluorine, hydrogen and oxygen and having 2-6 carbon atoms.

Abstract: The present invention relates to a simple method for producing 3,3-dichloro-1,1,1,2,2-pentafluoropropane (R225ca) and 1,3-dichloro-1,1,2,2,3-pentafluoropropane (R225cb) in good yield and at high selectivity by reacting tetrafluoroethylene (C2F4) and dichlorofluoromethane (R21) in the presence of a certain specific catalyst. The specific catalyst in the present invention is (1) a catalyst comprising halogenated oxide containing at least one element of Group 4, Group 5 and Group 13 such as Ti, Zr, Hf, V, B and Ga, or (2) a catalyst comprising halogenated oxide containing at least one element selected from Group 4, Group 5 and Group 13 such as Ti, Zr, Hf, V, B, Al and Ga and at least one element selected from Group 2, Group 6, Group 12 and Group 14 such as Ba, W, Zn, Si, Bi and P.

Abstract: A process for producing 1,1-dichloro-1,2,2,2-tetrafluoroethane, which comprises isomerizing 1,1,2-trichloro-1,2,2-trifluoroethane to form 1,1,1-trichloro-2,2,2-trifluoroethane, followed by fluorination with hydrofluoric acid.

Abstract: A method for producing a polyfluoropropionyl halide, which is characterized by oxidizing at least one dichloropentafluoropropane selected from 3,3-dichloro-1,1,1,2,2-pentafluoropropane and 1,3-dichloro-1,1,2,2,3-pentafluoropropane by oxygen under irradiation with light and in the presence of chlorine.The polyfluoropropionyl halide can be obtained from the dichloropentafluoropropane industrially advantageously in good yield. Further, in a gas phase reaction, the polyfluoropropionyl halide can be obtained in a very high reaction yield without decomposition of the desired product and without corrosion of the material for the reactor or the glass for the light source portion even in a reaction for a long period of time.

Abstract: A process for preparing 1,1,1,3,3-pentafluoropropane, which comprises reacting 1,1-difluoroethylene with dichlorofluoromethane in the presence of a Lewis acid catalyst to form 1,2,2-trihydrodichlorotrifluoropropane and fluorinating the 1,2,2-trihydrodichlorotrifluoropropane with hydrogen fluoride.

Abstract: A process for producing a hydrogen-containing 2,2-difluoropropane of the following formula (2), which comprises subjecting a 2,2-difluoropropane of the following formula (1) to hydrogen reduction:C.sub.3 H.sub.a Cl.sub.b F.sub.c (1)C.sub.3 H.sub.a+x Cl.sub.b-y F.sub.c-z (2)wherein a, b, c, x, y and z are integers satisfying the following conditions:a.gtoreq.0, b.gtoreq.1, c.gtoreq.2, x.gtoreq.1, y.gtoreq.0, z.gtoreq.0, a+b+c=8, x=y+z b-y.gtoreq.0, and c-z.gtoreq.2.

Abstract: A process for producing 1,1,1,2-tetrafluoroethane, which comprises reacting 2,2-dichloro-1,1,1,2-tetrafluoroethane, 2-chloro-1,1,1,2-tetrafluoroethane or a mixture thereof with hydrogen in the presence of a hydrogenation catalyst consisting essentially of a Group VIII element as the main component and at least one element selected from the group consisting of Group IB elements, lanthanum and lanthanide elements, as an additional component.

Abstract: A process for producing chlorofluorobenzenes, which comprises reacting fluorine-containing nitrobenzenes of the following formula (1) with chlorine gas to obtain chlorofluorobenzenes of the following formula (2): ##STR1## wherein n and m are integers satisfying 1.ltoreq.n.ltoreq.3, 0.ltoreq.m.ltoreq.2 and 1.ltoreq.n+m.ltoreq.3.

Abstract: The present invention relates to a method for producing a hydrogen-containing chloromethane such as chloroform at high selectivity in good yield by reducing a polychloromethane such as carbon tetrachloride in the presence of a reduction catalyst.In the present invention, it is important to conduct the reduction reaction in a liquid phase, whereby formation of impurities such as polymers which deactivate the catalyst, can effectively be suppressed, and the high selectivity and high activity of the reduction catalyst can adequately be obtained.As the reduction catalyst, at least one member selected from elements of Groups 8, 9 and 10, such as ruthenium, rhodium, palladium and platinum, may suitably be employed. Also a catalyst comprising, as the main component, such an element and having at least one member of Group 11 elements such as copper, silver and gold added thereto, may also suitably be employed.

Abstract: A hydrochlorofluoropropane azeotropic or azeotropic-like composition comprising at least two members selected from the group consisting of hydrochlorofluoropropanes of the formula I:CH.sub.a Cl.sub.b F.sub.c CF.sub.2 CH.sub.x Cl.sub.y F.sub.z (I)wherein a+b+c=3, x+y+z=3, a+x.gtoreq.1, b+y.gtoreq.1, and 0.ltoreq.a,b,c,x,y,z.ltoreq.3.

Abstract: A method for producing methyl chloride, which comprises reacting methanol and hydrogen chloride in a gas phase in the presence of a catalyst, wherein a zirconium oxide catalyst or a composite catalyst comprising at least two oxides of metals selected from the group consisting of Zr, Ti and Al, is used as the catalyst.

Abstract: A process for producing a 2,2-difluoropropane of the following formula (2), which comprises fluorinating a chlorine-containing 2,2-halogenopropane of the following formula (1) by hydrogen fluoride or a fluorinating agent:C.sub.3 H.sub.a Cl.sub.b F.sub.c (1)C.sub.3 H.sub.a Cl.sub.b-x F.sub.c+x (2)wherein a, b, c and x are integers satisfying the following conditions:a.gtoreq.0, b.gtoreq.1, c.gtoreq.0, x.gtoreq.1, a+b+c=8.

Abstract: A process for producing chlorofluorobenzenes, which comprises reacting fluorine-containing nitrobenzenes of the following formula (1) with chlorine gas to obtain chlorofluorobenzenes of the following formula (2): ##STR1## wherein n and m are integers satisfying 1.ltoreq.n.ltoreq.3, 0.ltoreq.m.ltoreq.2 and 1.ltoreq.n+m.ltoreq.3.

Abstract: SF.sub.6 is produced by a pyrolysis of SF.sub.5 Cl obtained by a reaction of sulfur or sulfur chloride with chlorine and an amine/hydrogen fluoride complex or a reaction of sulfur tetrafluoride with chlorine and an amine/hydrogen fluoride complex.

Abstract: A process for producing sulfur tetrafluoride comprises reacting in the absence or presence of a solvent an amine/hydrogen fluoride complex having the formula:Am . (HF).sub.nwherein Am represents an amine selected from the group consisting of nitrogen-containing heterocyclic aromatic amines and derivatives thereof, and n represents 2-4, with sulfur dichloride, sulfur monochloride or a combination of chlorine and sulfur at a temperature of 0.degree. to 60.degree. C., the molar ratio of said amine/hydrogen fluoride complex to said sulfur dichloride, sulfur monochloride or sulfur being represented by the formula: ##EQU1## wherein n is as defined above, A represents moles of sulfur in said sulfur dichloride, sulfur monochloride or sulfur, and B represents moles of said amine/hydrogen complex.

Abstract: A process for a separation of hexafluoropropylene oxide from hexafluoropropylene by an extractive distillation in the presence of a normally liquid inert compound such as 1,2-dichloroethane, monochlorobenzene, di-isopropyl ether and 1,1,2-trichloroethane.