Abstract: An imprint apparatus forms a resin pattern on a substrate by curing resin in a state where the resin on the substrate is in contact with a patterned portion of a mold. It includes: a gas supply unit which supplies gas to a space between the mold and the substrate; a measuring unit which is configured so that measuring light transits the space or a space that communicates with the space, and which measures a prescribed distance between two objects using the measuring light; and a controller which obtains information concerning the prescribed distance, and which outputs a signal representing a state of concentration of the gas in the space based on the information and a measurement result of the measuring unit in a state where the gas is supplied from the gas supply unit.

Abstract: An imprint apparatus forms a resin pattern on a substrate by curing resin in a state where the resin on the substrate is in contact with a patterned portion of a mold. It includes: a gas supply unit which supplies gas to a space between the mold and the substrate; a measuring unit which is configured so that measuring light transits the space or a space that communicates with the space, and which measures a prescribed distance between two objects using the measuring light; and a controller which obtains information concerning the prescribed distance, and which outputs a signal representing a state of concentration of the gas in the space based on the information and a measurement result of the measuring unit in a state where the gas is supplied from the gas supply unit.

Abstract: Provided is an imprinting method for transferring a pattern formed on a mold to a substrate, the imprinting method including applying a resin to a predetermined shot area on the substrate; moving the shot area from an application position to an imprinting position; supplying gas to the shot area; and imprinting the mold into the shot area, wherein, in the gas supply step, gas is supplied only from a gas supplying unit located above a moving path extending from the application position to the imprinting position, and the supply of the gas is started before the shot area passes beneath the gas supplying unit to thereby supply the gas to the shot area while moving it.