Abstract: A semiconductor light-emitting element includes: an n-type clad layer of an n-type AlGaN-based semiconductor material; an active layer including a planarizing layer of an AlGaN-based semiconductor material provided on the n-type clad layer, a barrier layer of an AlGaN-based semiconductor material provided on the planarizing layer, and a well layer of an AlGaN-based semiconductor material provided on the barrier layer; and a p-type semiconductor layer provided on the active layer. The active layer emits deep ultraviolet light having a wavelength of 360 nm or shorter, and a ground level of a conduction band of the planarizing layer is lower than a ground level of a conduction band of the barrier layer and higher than a ground level of a conduction band of the well layer.

Abstract: A semiconductor light-emitting element includes: an n-type clad layer of an n-type AlGaN-based semiconductor material; an active layer including a planarizing layer of an AlGaN-based semiconductor material provided on the n-type clad layer, a barrier layer of an AlGaN-based semiconductor material provided on the planarizing layer, and a well layer of an AlGaN-based semiconductor material provided on the barrier layer; and a p-type semiconductor layer provided on the active layer. The active layer emits deep ultraviolet light having a wavelength of 360 nm or shorter, and a ground level of a conduction band of the planarizing layer is lower than a ground level of a conduction band of the barrier layer and higher than a ground level of a conduction band of the well layer.

Abstract: A semiconductor light-emitting element includes: an n-type clad layer of an n-type AlGaN-based semiconductor material; an active layer including a planarizing layer of an AlGaN-based semiconductor material provided on the n-type clad layer, a barrier layer of an AlGaN-based semiconductor material provided on the planarizing layer, and a well layer of an AlGaN-based semiconductor material provided on the barrier layer; and a p-type semiconductor layer provided on the active layer. The active layer emits deep ultraviolet light having a wavelength of 360 nm or shorter, and a ground level of a conduction band of the planarizing layer is lower than a ground level of a conduction band of the barrier layer and higher than a ground level of a conduction band of the well layer.

Abstract: A semiconductor light-emitting element includes: an n-type clad layer; an active layer; a p-type clad layer; a first p-type contact layer; a second p-type contact layer; and a p-side electrode. The AlN ratio of the p-type clad layer is 50% or higher. The first p-type contact layer has an AlN ratio of 5% or lower, has a p-type dopant concentration equal to or higher than 8×1018/cm3 and equal to or lower than 5×1019/cm3, and has a thickness larger than 500 nm. The second p-type contact layer has an AlN ratio of 5% or lower, has a p-type dopant concentration equal to or higher than 8×1019/cm3 and equal to or lower than 4×1020/cm3, and has a thickness equal to or larger than 8 nm and equal to or smaller than 28 nm. The contact resistance of the p-side electrode is 1×10?2 ?·cm2 or smaller.

Abstract: A semiconductor light-emitting element includes: an n-type clad layer made of an n-type AlGaN-based semiconductor material; an active layer made of an AlGaN-based semiconductor material; a p-type clad layer made of a p-type AlGaN-based semiconductor material having an AlN ratio of 50% or higher or a p-type AlN-based semiconductor material; a p-type contact layer made of a p-type AlGaN-based semiconductor material having an AlN ratio of 20% or lower or a p-type GaN-based semiconductor material; and a p-side electrode. A difference between the AlN ratio of the p-type clad layer and the AlN ratio of the p-type contact layer is 50% or higher, a thickness of the p-type contact layer is larger than 500 nm, and a contact resistance of the p-side electrode relative to the p-type contact layer is 1×10?2 ?·cm2 or smaller.

Abstract: A semiconductor light-emitting element includes: an n-type clad layer of an n-type AlGaN-based semiconductor material; an active layer including a planarizing layer of an AlGaN-based semiconductor material provided on the n-type clad layer, a barrier layer of an AlGaN-based semiconductor material provided on the planarizing layer, and a well layer of an AlGaN-based semiconductor material provided on the barrier layer; and a p-type semiconductor layer provided on the active layer. The active layer emits deep ultraviolet light having a wavelength of 360 nm or shorter, and a ground level of a conduction band of the planarizing layer is lower than a ground level of a conduction band of the barrier layer and higher than a ground level of a conduction band of the well layer.