Abstract: A substrate-holding hand includes a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other; and a support mechanism for supporting the plurality of blades. Each of the plurality of blades is connected to the support mechanism by an eccentric element.

Abstract: A substrate-holding hand includes a plurality of blades, a linkage for supporting the plurality of blades, and a force applier arranged for applying a force to the linkage in a direction that increases a pitch between the blades.

Abstract: A substrate transfer device includes a manipulator, a substrate gripping hand, an actuator configured to rotate the substrate gripping hand about a roll axis, and a controller adapted to operate the manipulator to hold a substrate by a first engaging member and a second engaging member of the substrate gripping hand, then operate the actuator so that a first principal surface of the substrate is located above a base member, and a normal line of the first principal surface is oriented downward from a horizontal plane, and move a movable guiding member toward the tip-end part of the base member so that the second engaging member, a third engaging member, and the movable guiding member grip the substrate.

Abstract: Substrate holding hand including a base plate spreading from base toward tip end sides, part of base plate located at base end side, fixed to hand tip portion, holding position at base plate, engaging claw at part of base plate located at tip end side, engaging claw configured to engage part of edge of substrate in vertical or inclined postures, part of edge located lower than center of substrate, moving portion at base end side of holding position and configured to move toward tip end side, and plurality of rotating bodies at the moving portion, being pressed by movement against edge of substrate located lower than holding position and engaged with claw, and plurality of rotating bodies pushing substrate upward holding position while rotating along edge of substrate.

Abstract: A substrate holding apparatus includes a base and holders attached to the base to hold substrates. The holders is aligned in a predetermined alignment direction, and is attached to the base so as to be detachable in parallel with a reference plane as a plane crossing the alignment direction.

Abstract: A substrate gripping hand which grips a substrate with a disc shape, includes a base plate, and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.

Abstract: In a torsional damper, a damper mass is connected to a hub through a damper rubber. The hub is provided with a boss fixed to a crankshaft and a rim holding the damper rubber. The boss and the rim are coupled by plurality of spokes. The plurality of spokes each has an inclined shape inclined in the axial direction. Reinforcement portion is provided in the spokes in one direction corresponding to a bending vibration to be input among the plurality of spokes.

Abstract: A substrate transfer device includes a manipulator, a substrate gripping hand, an actuator configured to rotate the substrate gripping hand about a roll axis, and a controller adapted to operate the manipulator to hold a substrate by a first engaging member and a second engaging member of the substrate gripping hand, then operate the actuator so that a first principal surface of the substrate is located above a base member, and a normal line of the first principal surface is oriented downward from a horizontal plane, and move a movable guiding member toward the tip-end part of the base member so that the second engaging member, a third engaging member, and the movable guiding member grip the substrate.

Abstract: A substrate conveying apparatus includes: a substrate grasping hand; a first holding member provided at a tip end portion of the substrate grasping hand and including a plurality of first jaw portions; a second holding member provided at a base end portion of the substrate grasping hand and including a plurality of second jaw portions; a first sensor provided at the base end portion of the substrate grasping hand and configured to emit light or ultrasound and detect substrates; and a controller configured to make the first sensor emit the light or the ultrasound toward spaces each between the adjacent substrates and determine whether or not the substrates are normally held.

Abstract: Substrate holding hand attached to hand tip portion of manipulator and configured to hold substrate having circular plate shape and placed in vertical or inclined postures, including: base plate spreading from base toward tip end sides, part of base plate located at base end side, fixed to hand tip portion, holding position at base plate; engaging claw at part of base plate located at tip end side, engaging claw configured to engage part of edge of substrate in vertical or inclined postures, part of edge located lower than center of substrate; moving portion at base end side of holding position and configured to move toward tip end side; and plurality of rotating bodies at the moving portion, being pressed by movement against edge of substrate located lower than holding position and engaged with claw, and plurality of rotating bodies pushing substrate upward holding position while rotating along edge of substrate.

Abstract: The end effector has a first hand and a second hand which can be driven independently from each other. The first hand has a hand body which can be inserted between vertically adjacent substrates stored in a substrate storing portion, holding a substrate immediately above or immediately below the hand body. The second hand has a hand base portion which at least partially advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion and a substrate holding means provided to the hand base portion so as to hold two or more substrates including the lowermost substrate or the uppermost substrate. By the end effector, substrates can be conveyed without any problem even when use of a batch conveying type hand is restricted due to the condition on the substrate storing portion side.

Abstract: A substrate conveying apparatus includes: a substrate grasping hand; a first holding member provided at a tip end portion of the substrate grasping hand and including a plurality of first jaw portions; a second holding member provided at a base end portion of the substrate grasping hand and including a plurality of second jaw portions; a first sensor provided at the base end portion of the substrate grasping hand and configured to emit light or ultrasound and detect substrates; and a controller configured to make the first sensor emit the light or the ultrasound toward spaces each between the adjacent substrates and determine whether or not the substrates are normally held.

Abstract: An end effector has a hand base portion at least a part of which advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion, a substrate holding unit provided to the hand base portion so as to hold the two or more substrates including the lowermost substrate or the uppermost substrate, and a protrusion amount change unit for changing a protrusion amount of the substrate holding unit from a reference surface including the surface of the hand base portion opposed to the lowermost substrate or the uppermost substrate. The protrusion amount change unit has a single drive source applying a drive force to the whole substrate holding unit.

Abstract: A substrate gripping hand which grips a substrate with a disc shape, includes a base plate, and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.

Abstract: In a torsional damper, a damper mass is connected to a hub through a damper rubber. The hub is provided with a boss fixed to a crankshaft and a rim holding the damper rubber. The boss and the rim are coupled by plurality of spokes. The plurality of spokes each has an inclined shape inclined in the axial direction. Reinforcement portion is provided in the spokes in one direction corresponding to a bending vibration to be input among the plurality of spokes.

Abstract: The end effector has a first hand and a second hand which can be driven independently from each other. The first hand has a hand body which can be inserted between vertically adjacent substrates stored in a substrate storing portion, holding a substrate immediately above or immediately below the hand body. The second hand has a hand base portion which at least partially advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion and a substrate holding means provided to the hand base portion so as to hold two or more substrates including the lowermost substrate or the uppermost substrate. By the end effector, substrates can be conveyed without any problem even when use of a batch conveying type hand is restricted due to the condition on the substrate storing portion side.

Abstract: An end effector has a hand base portion at least a part of which advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion, a substrate holding unit provided to the hand base portion so as to hold the two or more substrates including the lowermost substrate or the uppermost substrate, and a protrusion amount change unit for changing a protrusion amount of the substrate holding unit from a reference surface including the surface of the hand base portion opposed to the lowermost substrate or the uppermost substrate. The protrusion amount change unit has a single drive source applying a drive force to the whole substrate holding unit.

Abstract: Communication equipment that is provided with an isolating switch, which is operated by placement of a handset, instead of a conventionally used insulating component. The isolating switch constitutes an electrical insulation between a charging, terminal of a base unit and an external electric circuit. This structure eliminates the necessity of providing an insulating component such as a transformer and the like, so as to achieve a cost reduction of the communication equipment, and also improves sound quality of the communication equipment. In addition, the isolating switch is arranged in Such a manner that a direction of tile force applied by the handset to depress the terminal of the base unit and a direction of the force applied by the handset to depress a switch level are separated from each other. The isolating switch has a construction that enables the switch lever to function with a small loading weight, and to keep a contact point of the switch depressed by an intense force.

Abstract: An apparatus for air-pulverizing high-temperature molten slag by blowing air at high speed through a nozzle into a flow of molten slag that is falling from an inclined container by the intermediary of a turndish. A heat detector is provided for detecting the quantity of heat in the flow of molten slag after being air-pulverized by the high speed air flow, and a feedback control device which is responsive to a detection signal issued from the detector is provided for calculating a desirable inclination angle of the container or the turndish and transmitting a control signal obtained as a result of the calculation to a controller for controlling the inclination of the container or turndish thereby stabilizing the air-pulverizing of the high-temperature molten slag.