Abstract: A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate is provided. The substrate becomes in a first state where an end effector holds the substrate and the substrate is not placed at an installation position, when the end effector positions at a first teaching point above the installation position. The substrate becomes in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector positions at a second teaching point below the installation position. The first and second states can be switched by causing the robot to perform a first operation to move the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point.

Abstract: A control device controls a substrate transfer robot including a hand, a joint, and a joint motor. The control device modifies a target position of the hand when it places substrate at transfer destination, based on positional misalignment information indicating misalignment of substrate. To change a position at which the hand places the substrate to target position after modification, the control device performs first velocity control and second velocity control. In first velocity control, velocity of hand that is approaching target position before modification with the velocity decreasing is made constant by correcting. In second velocity control, velocity of hand decreases by slope equal to the slope of velocity of the hand immediately before first velocity control and hand is stopped at target position after modification. Time during which the first velocity control is performed increases as a magnitude of change in the target position due to the modification increases.

Abstract: A semiconductor production apparatus system includes a substrate-holding hand; an image capturer for capturing an image of at least a component of a semiconductor production apparatus; and a controller for detecting an anomaly of the component of the semiconductor production apparatus based on the captured image captured by the image capturer.

Abstract: A substrate conveying robot includes a controller configured or programmed to acquire a conveyance gap based on an image captured by an imager, and control at least one of carrying a substrate out of a storage or carrying the substrate into the storage based on a size of an acquired conveyance gap.

Abstract: A robot system includes a controller configured or programmed to perform a position identification control without stopping rotation of a mount performed to detect a mark, and perform an alignment control without stopping the rotation of the mount and while maintaining a rotation direction of the mount after a position of the mark is identified.

Abstract: A substrate transport robot system includes a substrate holding hand to hold a plurality of substrates, a robot arm, and a controller. The controller is configured or programmed to acquire an amount of deviation of placement of each of the plurality of substrates with respect to a predetermined reference position based on a detection result of a detector, and control a transport operation of the robot arm operable to transport the plurality of substrates based on an acquired amount of deviation such that each of the plurality of substrates is loaded separately into a mount and/or unloaded separately from the mount.

Abstract: A robot controlling device capable of preventing a rapid change in posture of a robotic arm due to a singular point. The robot controlling device brings a third rotational axis to on a circumference of a circle which is on a first rotational axis with a radius at a difference between a distance from the first rotational axis to a second rotational axis and a distance from the second rotational axis to the third rotational axis while changing posture of a horizontal robot to be holdable of a workpiece in an accommodating device, and moves the third rotational axis across a line connecting the first rotational axis and the second rotational axis, and moves the second rotational axis and the third rotational axis divided at the second straight line, connecting a center point of the workpiece accommodated in the accommodating device and the first rotational axis.

Abstract: A substrate-conveying robot system includes the controller for acquiring positional information on a notch or an orientation flat in a substrate based on an image captured by an image capturer from a lower side with respect to a substrate-handling hand in conveyance of the substrate.

Abstract: A semiconductor production apparatus system includes a substrate-holding hand; an image capturer for capturing an image of at least a component of a semiconductor production apparatus; and a controller for detecting an anomaly of the component of the semiconductor production apparatus based on the captured image captured by the image capturer.

Abstract: A video confirmation computer for confirming video related to robot operation includes a storage unit and a processor. The storage unit stores information on the position of the electric motor that drives a link body of the robot received from the controller of the robot and information on the video obtained by a camera attached to the robot. The processor makes at least one of the video confirmation computer itself and a computer connected to the video confirmation computer display a model area and a video area side by side. In the model area, a two-dimensional or three-dimensional model reproducing the posture of the robot is displayed by computer graphics. In the video area, the video is displayed.

Abstract: A semiconductor production apparatus system includes a substrate-holding hand including a first blade support and a second blade support. The semiconductor production apparatus system includes an image capturer for capturing an image of an inspection target including at least one of substrates, a component of a semiconductor production apparatus and the substrate-holding hand, and a controller for detecting a state of the inspection target based on the captured image captured by the image capturer. The image capturer is arranged in the second blade support.

Abstract: A video confirmation computer for confirming video related to robot operation includes a storage unit and a processor. The storage unit stores information on the position of the electric motor that drives a link body of the robot received from the controller of the robot and information on the video obtained by a camera attached to the robot. The processor makes at least one of the video confirmation computer itself and a computer connected to the video confirmation computer display a model area and a video area side by side. In the model area, a two-dimensional or three-dimensional model reproducing the posture of the robot is displayed by computer graphics. In the video area, the video is displayed.

Abstract: A control device controls a substrate transfer robot including a hand, a joint, and a joint motor. The hand can hold a substrate. An axis of the joint is oriented in a vertical direction. The joint motor drives the joint. The control device controls the joint motor so that the hand transfers the substrate to make the substrate pass through a first sensor and a second sensor. The control is performed so that an orientation of the hand in a plan view when the substrate passes the two sensors is inclined from a direction perpendicular to a straight line connecting the two sensors. The control device generates positional misalignment information indicating positional misalignment of the substrate with respect to the hand, based on positions of the hand on at least three times that any of a plurality of sensors, including the two sensors, detected an outer edge of the substrate.

Abstract: A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate. The robot includes a robotic arm having at least one joint axis, and an end effector provided to a tip end of the robotic arm and configured to hold the substrate. A position and a posture of the end effector are defined by values of N variables. A value of at least one of the N variables that define a holding position and a holding posture of the end effector for holding the substrate placed on the installation position by the end effector is independent from a value of the corresponding variable among the N variables that define a withdrawn position and a withdrawn posture of the end effector after retreating the end effector in the holding position and the holding posture from the installation position.

Abstract: A method of calibrating a substrate transfer apparatus according to one or more embodiments may include: fixing a substrate transfer apparatus; measuring the operation of the fixed substrate transfer apparatus; generating eigendata relating to an operation of the fixed substrate transfer apparatus; and storing the eigendata in the substrate transfer apparatus.

Abstract: A teaching device is a teaching device for a robot including a base, an arm having a plurality of links coupled to each other and coupled to the base, and a hand coupled to the arm. The teaching device includes a setter that sets a predetermined condition including start and end points of the hand in predetermined movement of the arm; a deriver that derives a movement trajectory of the hand from the start point to the end point and a movement trajectory of the arm according to the movement trajectory of the hand based on the predetermined condition; a display that displays at least one of the movement trajectory of the arm or the movement trajectory of the hand, the movement trajectories being derived by the deriver; and a corrector that corrects the movement trajectory displayed on the display according to user's input operation.

Abstract: A teaching device is a teaching device for a robot including a base, an arm having a plurality of links coupled to each other and coupled to the base, and a hand coupled to the arm. The teaching device includes a setter that sets a predetermined condition including start and end points of the hand in predetermined movement of the arm, and a deriver that derives a movement trajectory of the hand from the start point to the end point and a movement trajectory of the arm according to the movement trajectory of the hand based on the predetermined condition while changing the position of the base.

Abstract: A robot control device configured to control operation of a robot configured to transfer a substrate while holding the substrate is provided. The substrate becomes in a first state where an end effector holds the substrate and the substrate is not placed at an installation position, when the end effector positions at a first teaching point above the installation position. The substrate becomes in a second state where the end effector does not hold the substrate and the substrate is placed at the installation position, when the end effector positions at a second teaching point below the installation position. The first and second states can be switched by causing the robot to perform a first operation to move the end effector from either one of the first teaching point and the second teaching point to the other one of the first teaching point and the second teaching point.

Abstract: A control device controls a substrate transfer robot including a hand, a joint, and a joint motor. The control device modifies a target position of the hand when it places substrate at transfer destination, based on positional misalignment information indicating misalignment of substrate. To change a position at which the hand places the substrate to target position after modification, the control device performs first velocity control and second velocity control. In first velocity control, velocity of hand that is approaching target position before modification with the velocity decreasing is made constant by correcting. In second velocity control, velocity of hand decreases by slope equal to the slope of velocity of the hand immediately before first velocity control and hand is stopped at target position after modification. Time during which the first velocity control is performed increases as a magnitude of change in the target position due to the modification increases.

Abstract: A substrate mapping device 4 maps a plurality of substrates 10 inside a container where the substrates 10 are accommodated so as to be arrayed in a given arrayed direction. The substrate mapping device 4 includes a sensor 16 configured to detect a state of the substrate 10, a manipulator 14 configured to move the sensor 16, and a control device 18 configured to control the manipulator 14 to move the sensor 16 along a mapping course. The control device 18 sets a first mapping position and a second mapping position different in the position in the arrayed direction of the substrates 10 from the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.