Abstract: Methods of and systems for reforming films comprising silicon nitride are disclosed. Exemplary methods include providing a substrate within a reaction chamber, forming activated species by irradiating a reforming gas with microwave radiation, and exposing substrate to the activated species. A pressure within the reaction chamber during the step of forming activated species can be less than 50 Pa.

Abstract: At least both sides of the recording medium (10) are sandwiched by means of the drive roller (14) and the pinch roller (34), and the recording medium (10) is carried onto the drafting member (12) by the rotation of the drive roller (14). The recording head (22) reciprocatingly shifts in a direction perpendicular to the carrying direction of the recording medium (10) on the drafting position of the drafting member (12). The suction force is generated by the suction device (36) in a predetermined range of the drafting member and surrounding the drafting member (12), and the recording medium (10) is attracted to the drafting member (12). The unevenness guide unit (19) having the suction holes is formed on the drafting member (12), and the recording medium (10) is adsorbed to the unevenness guide unit (19) by means of the suction force of the suction device (36).

Abstract: An operator separates pressure rollers 14, 16 from the corresponding drive rollers 12 for a predetermined distance prior to his drawing work on the paper and allows the paper 18 to be inserted between the drive rollers 12 and the pressure rollers 14, 16 from the front of the platen 2. An optical sensor 28 detects the paper 18. A controller drives a fan after a lapse of a predetermined time to operate a vacuum power in a vacuum chamber 4. Thereafter, the paper 18 on the platen 2 continues to be held on the platen 2 by the vacuum power. In this condition, the operator sets the paper to a mark 20 drawn on the platen 2 which indicates a set position of the paper to adjust the position of the paper 18. When the operator completes the positioning of the paper 18, he manipulates the lever to lift down the pressure rollers.

Abstract: A spindle head 28 is liftably supported on a transfer member 6 which is capable of moving in an XY axis direction to a table 4, and a spindle 32 is rotatably journalled on the spindle head 28. A pickup 54 is liftably journalled on the spindle head 28, and the pickup 54 is disposed at the lower end of a tool 46 near the tip of the tool 46 which is fixed detachably to the spindle 32. The relative lifting motion of the pickup 54, against the head 28, is detected by a sensor 70. Prior to the processing of the work, a distance D, between the lower end of the pickup 54 and the tip of the tool 46, is measured, and is stored in the controller. The head 28 descends, and when the pickup 54 abuts on the work, this abutting condition is detected by the sensor 70. The height of the tip of the tool 46 against the work 2 is detected by the foregoing detection.