Abstract: According to one embodiment, a sensor includes a deformable film portion, and a first sensing element provided at the film portion. The first sensing element includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first and second magnetic layers. The first intermediate layer is nonmagnetic. The first magnetic layer includes a first film including Fe and Co, a second film including Fe and Co, a third film, and a fourth film. The third film includes at least one selected from the group consisting of Cu, Au, Ru, Ag, Pt, Pd, Ir, Rh, Re, and Os and is provided between the first and second films. The fourth film includes at least one selected from the group consisting of Mg, Ca, Sc, Ti, Sr, Y, Zr, Nb, Mo, Ba, La, Hf, Ta, and W and is provided between the third and second films.

Abstract: According to one embodiment, a strain sensing element provided on a deformable substrate includes: a first magnetic layer; a second magnetic layer; a spacer layer; and a bias layer. Magnetization of the second magnetic layer changes according to deformation of the substrate. The spacer layer is provided between the first magnetic layer and the second magnetic layer. The second magnetic layer is provided between the spacer layer and the bias layer. The bias layer is configured to apply a bias to the second magnetic layer.

Abstract: The disclosure relates to a strain sensing element provided on a deformable substrate. The strain sensing element includes: a first magnetic layer; a second magnetic layer; and an intermediate layer. The second magnetic layer includes Fe1-yBy (0<y?0.3). Magnetization of the second magnetic layer changes according to deformation of the substrate. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

Abstract: An inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

Abstract: According to one embodiment, a sensor includes a supporter, a first film portion, a first sensing element, and a first magnetic portion. The first film portion is supported by the supporter, is deformable, and includes a first fixed end extending along a first fixed end direction. A first sensing element is fixed to the first film portion, and includes a first magnetic layer, a first opposing magnetic layer provided between the first magnetic layer and the first film portion, and a first intermediate layer provided between the first magnetic layer and the first opposing magnetic layer. A direction from the first opposing magnetic layer toward the first magnetic layer is aligned with a first element direction. The first magnetic portion includes a first end portion extending along a first end portion direction tilted with respect to the first fixed end direction, and overlaps a portion of the supporter.

Abstract: According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

Abstract: The disclosure relates to a strain sensing element provided on a deformable substrate. The strain sensing element includes: a first magnetic layer; a second magnetic layer; and an intermediate layer. The second magnetic layer includes Fe1-yBy (0<y?0.3). Magnetization of the second magnetic layer changes according to deformation of the substrate. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

Abstract: According to one embodiment, a sensor includes a first film, a first sensor portion, and first to fourth terminals. The first film includes first to second electrode layers, and a piezoelectric layer. The first film is deformable. The first sensor portion is fixed to a portion of the first film. A first direction from the portion of the first film toward the first sensor portion is aligned with a direction from the second electrode layer toward the first electrode layer. The first sensor portion includes first to second sensor conductive layers, first to second magnetic layers, and a first intermediate layer. The first terminal is electrically connected to the first electrode layer. The second terminal is electrically connected to the second electrode layer. The third terminal is electrically connected to the first sensor conductive layer. The fourth terminal is electrically connected to the second sensor conductive layer.

Abstract: According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

Abstract: A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.

Abstract: According to one embodiment, the pressure sensor includes a supporting portion, a film portion, and a strain detecting element. The film portion is supported by the supporting portion. The strain detecting element is disposed on a part of the film portion. The strain detecting element includes a first magnetic layer, a second magnetic layer, and an intermediate layer. A magnetization direction of the first magnetic layer is variable according to a deformation of the film portion. The first magnetic layer has a first facing surface. The second magnetic layer has a second facing surface. The second facing surface faces the first facing surface. The intermediate layer is disposed between the first magnetic layer and the second magnetic layer. An area of the first facing surface is larger than an area of the second facing surface.

Abstract: A sensor includes a film portion and a first sensor portion. The film portion is deformable. The first sensor portion is provided at the film portion. The first sensor portion includes a first conductive layer, a second conductive layer, a first magnetic layer, a second magnetic layer, and a first intermediate layer. The second conductive layer is provided between the first conductive layer and the film portion. The first magnetic layer is provided between the first conductive layer and the second conductive layer. The second magnetic layer is provided between the first magnetic layer and the second conductive layer. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. A curvature of the first conductive layer is different from a curvature of at least a portion of the film portion.

Abstract: According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.

Abstract: According to one embodiment, a sensor includes a first film, a first sensor portion, a driving portion, and a processor. The first sensor portion is provided at the first film. The first sensor portion includes a first magnetic layer, a second magnetic layer, and a first intermediate layer. The second magnetic layer is provided between the first film and the first magnetic layer. The first intermediate layer is provided between the first magnetic layer and the second magnetic layer. The driving portion causes the first film to deform at a first frequency. The processor outputs a third signal based on a first signal and a second signal. The first signal relates to the first frequency. The second signal is output from the first sensor portion.

Abstract: A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.

Abstract: According to an embodiment, a magnetic element includes a first layer, a first magnetic layer, a second magnetic layer, a first nonmagnetic layer, a second layer, and a third magnetic layer. The first layer includes ruthenium. The second magnetic layer is provided between the first layer and the first magnetic layer. The first nonmagnetic layer provided between the first magnetic layer and the second magnetic layer. The second layer includes tantalum. The second layer contacts the first layer and is provided between the first layer and the second magnetic layer. A lattice plane spacing of the second layer in a first direction is not less than 0.23 nm and not more than 0.25 nm. The first direction is from the first layer toward the first magnetic layer. The third magnetic layer includes manganese. The third magnetic layer is provided between the second layer and the second magnetic layer.

Abstract: According to one embodiment, a sensor includes a support body, a film portion, a first sensing element, and a structure body. The first sensing element is fixed to the film portion, and includes a first magnetic layer, a first opposing magnetic layer, and a first intermediate layer. The structure body includes a first region overlapping the support body, and a second region being continuous with the first region and overlapping the film portion. The structure body includes a first structure body layer, a first opposing structure body layer, and a first structure body intermediate layer. The first opposing structure body layer is provided between the first structure body layer and the support body and between the first structure body layer and the film portion. The first structure body intermediate layer is provided between the first structure body layer and the first opposing structure body layer.

Abstract: According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.