Patents by Inventor Shiqenori Ozaki

Shiqenori Ozaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming underlying insulation film
    Publication number: 20050255711
    Abstract: The surface of an insulating film disposed on an electronic device substrate is irradiated with plasma based on a process gas comprising at least an oxygen atom-containing gas, to thereby form an underlying film at the interface between the insulating film and the electronic device substrate. A good underlying film is provided at the interface between the insulating film and the electronic device substrate, so that the thus formed underlying film can improve the property of the insulating film.
    Type: Application
    Filed: March 31, 2003
    Publication date: November 17, 2005
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shiqenori Ozaki, Toshio Nakanishi, Masaru Sasaki, Seiji Matsuyama, Kazuhide Hasebe, Shigeru Nakajima, Tomonori Fujiwara