Patents by Inventor Shiro Yazaki
Shiro Yazaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8360558Abstract: A liquid droplet discharging head includes a pressure chamber substrate having a pressure chamber in communication with a nozzle hole. The pressure chamber has compartments adjacent to one another in a first direction. A vibrating plate has a first surface for covering the pressure chamber and a second, opposite, surface. The vibrating plate has a first area surface as a part of the first surface, the first area surface covering the pressure chamber in a view in a second direction that is orthogonal to the first direction and is normal to the first surface. A first conductive layer is formed at a plurality of areas to cover, in a view in the second direction.Type: GrantFiled: November 12, 2010Date of Patent: January 29, 2013Assignee: Seiko Epson CorporationInventors: Eiju Hirai, Shiro Yazaki
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Patent number: 8313177Abstract: An actuator that includes a substrate; first conductive layers provided so as to extend in a first direction and to be disposed adjacent to each other on the substrate; a piezoelectric body layer having a first portion formed so as to cover the first conductive layers and openings between the first conductive layers, a second portion other than the first portions, and a contact to the first conductive layer; a second conductive layer having a third portion which overlap with the first conductive layers in the second direction, a fourth portion connected to the third portion being formed over the second portion of the piezoelectric body layer, and a fifth portion connected to the first conductive layer in the contact; and a wiring having a sixth portion which is formed over the fourth portion of the second conductive layer and a seventh portion connected to the fifth portion.Type: GrantFiled: February 9, 2011Date of Patent: November 20, 2012Assignee: Seiko Epson CorporationInventors: Eiju Hirai, Shiro Yazaki
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Patent number: 8292410Abstract: A liquid ejecting head includes a flow passage substrate having a pressure generation chamber in communication with a nozzle opening. A piezoelectric element includes first and second electrode and a piezoelectric substance layer and is positioned over one surface of the flow passage substrate. The piezoelectric element is deformed to form a convex toward the pressure generation chamber when the piezoelectric element is driven. A protection film formed from an inorganic material covers the piezoelectric element and has an opening through which an upper surface of the second electrode is exposed. An end of the opening in the protection film viewed in a direction of the length of the pressure generation chamber is located closer to the center than is an area at which the center of curvature of a curve of the piezoelectric element that forms near a wall around the pressure generation chamber during deformation operation.Type: GrantFiled: March 15, 2010Date of Patent: October 23, 2012Assignee: Seiko Epson CorporationInventors: Shiro Yazaki, Eiju Hirai
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Publication number: 20120026250Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.Type: ApplicationFiled: October 5, 2011Publication date: February 2, 2012Applicant: SEIKO EPSON CORPORATIONInventors: Shiro Yazaki, Setsuya Iwashita, Eiju Hirai, Tsutomu Nishiwaki
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Publication number: 20110316938Abstract: A lower electrode 60 in a region opposite each of pressure generation chambers 12 is formed to have a width smaller than the width of the corresponding pressure generation chamber 12, and an upper surface and an end surface of the lower electrode 60 in a region corresponding to each of the pressure generation chambers 12 is covered with a piezoelectric material layer 70. An end surface of the piezoelectric material layer 70 forms a slope surface sloping downward toward the outside, an upper surface and an end surface of the piezoelectric material layer 70 in the region opposite each of the pressure generation chambers 12 are covered with an upper electrode 80, and a distance D1 between the upper surface of the lower electrode 60 and the upper surface of the piezoelectric material layer 70 and a distance D2 between the end surface of the lower electrode 60 and the end surface of the piezoelectric material layer 70 satisfy the relationship D2?D1.Type: ApplicationFiled: September 8, 2011Publication date: December 29, 2011Applicant: SEIKO EPSON CORPORATIONInventor: Shiro Yazaki
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Patent number: 8057018Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.Type: GrantFiled: February 24, 2009Date of Patent: November 15, 2011Assignee: Seiko Epson CorporationInventors: Shiro Yazaki, Setsuya Iwashita, Eiju Hirai, Tsutomu Nishiwaki
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Patent number: 8029109Abstract: A lower electrode 60 in a region opposite each of pressure generation chambers 12 is formed to have a width smaller than the width of the corresponding pressure generation chamber 12, and an upper surface and an end surface of the lower electrode 60 in a region corresponding to each of the pressure generation chambers 12 is covered with a piezoelectric material layer 70. An end surface of the piezoelectric material layer 70 forms a slope surface sloping downward toward the outside, an upper surface and an end surface of the piezoelectric material layer 70 in the region opposite each of the pressure generation chambers 12 are covered with an upper electrode 80, and a distance D1 between the upper surface of the lower electrode 60 and the upper surface of the piezoelectric material layer 70 and a distance D2 between the end surface of the lower electrode 60 and the end surface of the piezoelectric material layer 70 satisfy the relationship D2?D1.Type: GrantFiled: January 23, 2009Date of Patent: October 4, 2011Assignee: Seiko Epson CorporationInventor: Shiro Yazaki
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Publication number: 20110234710Abstract: There is provided a liquid ejecting head in which a surface layer of a vibration plate at the side of a flow path formation substrate is formed by an insulating film made of zirconium oxide and a protection film made of a material which is resistant to liquid is provided on a surface of the flow path formation substrate so as to cover wall surfaces of liquid flow paths.Type: ApplicationFiled: March 24, 2011Publication date: September 29, 2011Applicant: SEIKO EPSON CORPORATIONInventors: Seiichi Fujita, Shiro Yazaki
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Publication number: 20110193916Abstract: An actuator that includes a substrate; first conductive layers provided so as to extend in a first direction and to be disposed adjacent to each other on the substrate; a piezoelectric body layer having a first portion formed so as to cover the first conductive layers and openings between the first conductive layers, a second portion other than the first portions, and a contact to the first conductive layer; a second conductive layer having a third portion which overlap with the first conductive layers in the second direction, a fourth portion connected to the third portion being formed over the second portion of the piezoelectric body layer, and a fifth portion connected to the first conductive layer in the contact ; and a wiring having a sixth portion which is formed over the fourth portion of the second conductive layer and a seventh portion connected to the fifth portion.Type: ApplicationFiled: February 9, 2011Publication date: August 11, 2011Applicant: SEIKO EPSON CORPORATIONInventors: Eiju HIRAI, Shiro YAZAKI
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Publication number: 20110115855Abstract: A liquid droplet discharging head includes a pressure chamber substrate having a pressure chamber in communication with a nozzle hole. The pressure chamber has compartments adjacent to one another in a first direction. A vibrating plate has a first surface for covering the pressure chamber and a second, opposite, surface. The vibrating plate has a first area surface as a part of the first surface, the first area surface covering the pressure chamber in a view in a second direction that is orthogonal to the first direction and is normal to the first surface. A first conductive layer is formed at a plurality of areas to cover, in a view in the second direction.Type: ApplicationFiled: November 12, 2010Publication date: May 19, 2011Applicant: SEIKO EPSON CORPORATIONInventors: Eiju HIRAI, Shiro YAZAKI
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Patent number: 7891785Abstract: An upper surface of a piezoelectric layer in an area opposed to a pressure generating chamber and a side surface of the piezoelectric layer in an arrangement direction of the piezoelectric elements are covered with an upper electrode. In addition, on one end in a longitudinal direction of the piezoelectric element, the piezoelectric layer extends up to an adhesive area of a flow passage forming substrate to which a circumferential portion of a piezoelectric element preserver of a joining substrate is adhered, and the lower electrode extends up to the outside of an end portion of the piezoelectric layer to form a terminal section in an end portion of the lower electrode.Type: GrantFiled: March 2, 2009Date of Patent: February 22, 2011Assignee: Seiko Epson CorporationInventor: Shiro Yazaki
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Publication number: 20100245491Abstract: A liquid ejecting head includes a flow passage substrate having a pressure generation chamber in communication with a nozzle opening. A piezoelectric element includes first and second electrode and a piezoelectric substance layer and is positioned over one surface of the flow passage substrate. The piezoelectric element is deformed to form a convex toward the pressure generation chamber when the piezoelectric element is driven. A protection film formed from an inorganic material covers the piezoelectric element and has an opening through which an upper surface of the second electrode is exposed. An end of the opening in the protection film viewed in a direction of the length of the pressure generation chamber is located closer to the center than is an area at which the center of curvature of a curve of the piezoelectric element that forms near a wall around the pressure generation chamber during deformation operation.Type: ApplicationFiled: March 15, 2010Publication date: September 30, 2010Applicant: SEIKO EPSON CORPORATIONInventors: Shiro YAZAKI, Eiju HIRAI
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Publication number: 20100149284Abstract: A liquid ejecting head includes: a piezoelectric element having a first electrode provided above a flow path forming substrate in which pressure generation chambers are formed, a piezoelectric body layer provided so as to correspond to each pressure generation chamber, and a second electrode provided above the piezoelectric body layer, wherein the first electrode, which is formed in the region facing the region where the piezoelectric body layer is formed, includes a first electrically-conductive layer, and a second electrically-conductive layer, which is made of a material having a smaller Young's modulus than that of the first electrically-conductive layer and is formed closer to the flow path forming substrate than the first electrically-conductive layer; and the first electrode, which is formed in the region facing the region where the piezoelectric body layer is not formed, has a surface constituted of the second electrically-conductive layer.Type: ApplicationFiled: November 19, 2009Publication date: June 17, 2010Applicant: SEIKO EPSON CORPORATIONInventor: Shiro YAZAKI
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Patent number: 7651201Abstract: To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.Type: GrantFiled: May 10, 2006Date of Patent: January 26, 2010Assignee: Seiko Epson CorporationInventors: Masato Shimada, Shinri Sakai, Shiro Yazaki
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Patent number: 7637600Abstract: A liquid ejecting head includes nozzle openings through which a liquid is ejected and a channel-containing substrate having pressure-generating chambers each communicating with the corresponding nozzle openings. Piezoelectric elements are disposed on a side of the channel-containing substrate, and each has a piezoelectric active portion. Each piezoelectric element has a lower electrode, a piezoelectric layer and an upper electrode. A protective film composed of an inorganic insulating material covers the piezoelectric elements. The protective film has exposed portions, each exposing a surface of the upper electrode of the corresponding piezoelectric element. The piezoelectric active portions substantially function as operating portions of the piezoelectric elements.Type: GrantFiled: October 23, 2006Date of Patent: December 29, 2009Assignee: Seiko Epson CorporationInventor: Shiro Yazaki
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Publication number: 20090284568Abstract: A lower electrode 60 in a region opposite each of pressure generation chambers 12 is formed to have a width smaller than the width of the corresponding pressure generation chamber 12, and an upper surface and an end surface of the lower electrode 60 in a region corresponding to each of the pressure generation chambers 12 is covered with a piezoelectric material layer 70. An end surface of the piezoelectric material layer 70 forms a slope surface sloping downward toward the outside, an upper surface and an end surface of the piezoelectric material layer 70 in the region opposite each of the pressure generation chambers 12 are covered with an upper electrode 80, and a distance D1 between the upper surface of the lower electrode 60 and the upper surface of the piezoelectric material layer 70 and a distance D2 between the end surface of the lower electrode and the end surface of the piezoelectric material layer 70 satisfy the relationship D2?D1.Type: ApplicationFiled: January 23, 2009Publication date: November 19, 2009Applicant: SEIKO EPSON CORPORATIONInventor: Shiro Yazaki
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Patent number: 7618130Abstract: Provided are a liquid jet head capable of preventing occurrence of crosstalk and obtaining a stable liquid ejecting property and a liquid jet apparatus. Partitions 11 at both sides in a width direction of a pressure generating chamber 12 are provided so as to extend to the vicinity of an end of a reservoir portion 32 at the pressure generating chamber 12 side. Liquid supply paths 14 and communicating paths 100 are provided by being divided for each of the pressure generating chambers 12 by the partitions 11 (wall portions 11a). Specifically, each of the liquid supply paths 14 communicates with the pressure generating chamber 12 and is formed to have a width smaller than that of the pressure generating chamber 12, and each of the communicating paths 100 allows the liquid supply path 14 and a communicating portion 13 to communicate with each other and is formed to have a width larger than that of the liquid supply path 14.Type: GrantFiled: April 30, 2004Date of Patent: November 17, 2009Assignee: Seiko Epson CorporationInventor: Shiro Yazaki
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Publication number: 20090231396Abstract: An upper surface of a piezoelectric layer in an area opposed to a pressure generating chamber and a side surface of the piezoelectric layer in an arrangement direction of the piezoelectric elements are covered with an upper electrode. In addition, on one end in a longitudinal direction of the piezoelectric element, the piezoelectric layer extends up to an adhesive area of a flow passage forming substrate to which a circumferential portion of a piezoelectric element preserver of a joining substrate is adhered, and the lower electrode extends up to the outside of an end portion of the piezoelectric layer to form a terminal section in an end portion of the lower electrode.Type: ApplicationFiled: March 2, 2009Publication date: September 17, 2009Applicant: SEIKO EPSON CORPORATIONInventor: Shiro Yazaki
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Publication number: 20090225113Abstract: Disclosed is a driving method. When the main piezoelectric element is driven so as to jet liquid droplets from a predetermined nozzle, a driving signal which is in opposite phase to a driving signal to be applied to the main piezoelectric element is applied to a sub piezoelectric element corresponding to a sub pressure chamber communicating with a nozzle, which does not jet liquid droplets.Type: ApplicationFiled: February 27, 2009Publication date: September 10, 2009Applicant: SEIKO EPSON CORPORATIONInventor: Shiro Yazaki
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Publication number: 20090219345Abstract: A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.Type: ApplicationFiled: February 24, 2009Publication date: September 3, 2009Applicant: SEIKO EPSON CORPORATIONInventors: Shiro Yazaki, Setsuya Iwashita, Eiju Hirai, Tsutomu Nishiwaki