Patents by Inventor Shiyu Zhang

Shiyu Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120218545
    Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.
    Type: Application
    Filed: July 26, 2011
    Publication date: August 30, 2012
    Inventors: Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Hyoseok Daniel Yang, Mark S. Wang
  • Patent number: 7947968
    Abstract: Provided are apparatuses for processing a surface of a substrate using direct and recycled radiation reflected from the substrate. The apparatus includes a radiation source positioned to direct a radiation beam toward a beam image forming system that forms a beam image on the substrate surface and a recycling system. The recycling system collects radiation reflected from the substrate surface and redirects it back toward the beam image on the substrate in a +1× manner. As a result, radiation incident on and reflected from the substrate is recycled through multiple cycles. This improves the uniformity of the radiation absorbed by the substrate in instances where the thin film patterns on the substrate would otherwise result in non-uniform absorption and uneven heating. Exemplary recycling systems suitable for use with the invention include Offner and Dyson relay systems as well as variants thereof.
    Type: Grant
    Filed: January 29, 2009
    Date of Patent: May 24, 2011
    Assignee: Ultratech, Inc.
    Inventors: David A. Markle, Shiyu Zhang
  • Patent number: 7751067
    Abstract: Methods and apparatuses are provided for positioning a substrate having a target that may be located on either the front-side or the backside of the substrate. The optical detector that views the target contains a signal-generating material that is substantially identical to the substrate material.
    Type: Grant
    Filed: May 24, 2007
    Date of Patent: July 6, 2010
    Assignee: Ultratech, Inc.
    Inventors: Emily True, Ray Ellis, Shiyu Zhang
  • Patent number: 7253376
    Abstract: Methods and apparatus for truncating an image formed with coherent radiation. The optical relay system is adapted to form a line image at the image plane. The image is truncated by a variable aperture at or near the aperture plane conjugate to the image plane, to block progressively increasing portions of an incident coherent radiation beam used to form the line image. An apodizing pupil filter having a maximum transmission or reflection in the center and a transmission or reflection profile that varies with direction corresponding to long direction of the line image is provided in the pupil plane. The apodization is designed to prevent hot-spots from forming in the truncated image and ensures a relatively smooth, flat intensity profile. Thus, one end or another of a coherent line image scanned over a substrate can be truncated during scanning without substantially changing the image intensity extending into the product area.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: August 7, 2007
    Assignee: Ultratech, Inc.
    Inventors: Shiyu Zhang, Igor Landau, Arnold Lungershausen, David A. Markle, Casey Donaher
  • Publication number: 20070131374
    Abstract: A process for manufacturing a soluble casting core for use in casting complex shaped metal matrix composite components. The soluble casting core is generated by a sequence of steps which provide a molten slurry mixture composed of an alkali metal salt such as sodium carbonate and a plurality of ceramic particulates such as magnesium oxide dispersed therein. After heating and mixing the slurry mixture is solidified in a mold pattern to form a casting core configured to generate a complex shaped component during a casting process. The soluble casting core is used for casting molten metal alloys therein, without failure of the casting surfaces and forming of a complex shaped metal matrix composite component. The soluble casting core is readily dissolved and separated from the soluble casting core by immersing the core mold in heated water and/or exposing to steam, without damage to the metal matrix composite component.
    Type: Application
    Filed: June 14, 2006
    Publication date: June 14, 2007
    Applicant: U.S. GOVERNMENT, REPRESENTED BY SECRETARY OF THE ARMY
    Inventors: Shiyu Zhang, James Cornie, Stephen Cornie
  • Patent number: 7177099
    Abstract: A 1× projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.
    Type: Grant
    Filed: February 7, 2005
    Date of Patent: February 13, 2007
    Assignee: Ultratech, Inc.
    Inventors: Romeo I. Mercado, Shiyu Zhang
  • Publication number: 20060243421
    Abstract: A process for manufacturing a soluble casting core for use in casting complex shaped metal matrix composite components. The soluble casting core is generated by a sequence of steps which provide a molten slurry mixture composed of an alkali metal salt such as sodium carbonate and a plurality of ceramic particulates such as magnesium oxide dispersed therein. After heating and mixing the slurry mixture is solidified in a mold pattern to form a casting core configured to generate a complex shaped component during a casting process. The soluble casting core is used for casting molten metal alloys therein, without failure of the casting surfaces and forming of a complex shaped metal matrix composite component. The soluble casting core is readily dissolved and separated from the soluble casting core by immersing the core mold in heated water and/or exposing to steam, without damage to the metal matrix composite component.
    Type: Application
    Filed: April 29, 2005
    Publication date: November 2, 2006
    Inventors: Shiyu Zhang, James Cornie, Stephen Cornie
  • Publication number: 20060163223
    Abstract: Methods and apparatus for truncating an image formed with coherent radiation. The optical relay system is adapted to form a line image at the image plane. The image is truncated by a variable aperture at or near the aperture plane conjugate to the image plane, to block progressively increasing portions of an incident coherent radiation beam used to form the line image. An apodizing pupil filter having a maximum transmission or reflection in the center and a transmission or reflection profile that varies with direction corresponding to long direction of the line image is provided in the pupil plane. The apodization is designed to prevent hot-spots from forming in the truncated image and ensures a relatively smooth, flat intensity profile. Thus, one end or another of a coherent line image scanned over a substrate can be truncated during scanning without substantially changing the image intensity extending into the product area.
    Type: Application
    Filed: January 21, 2005
    Publication date: July 27, 2006
    Inventors: Shiyu Zhang, Igor Landau, Arnold Lungershausen, David Markle, Casey Donaher
  • Publication number: 20060086434
    Abstract: A spray deposition apparatus comprises a source of aqueous fiber slurry that includes a mixture of milled graphite fibers in suspension. A slurry input of the spray deposition apparatus is coupled to the source of aqueous fiber slurry. The slurry input receives the mixture of aqueous fiber slurry. A gas pressure input receives pressurized gas. A nozzle aspirates the mixture of aqueous fiber slurry with the pressurized gas to produce a stream of fiber cluster droplets.
    Type: Application
    Filed: October 20, 2005
    Publication date: April 27, 2006
    Applicant: METAL MATRIX CAST COMPOSITES, LLC
    Inventors: James Cornie, Stephen Cornie, Shiyu Zhang
  • Publication number: 20050146690
    Abstract: A 1× projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.
    Type: Application
    Filed: February 7, 2005
    Publication date: July 7, 2005
    Inventors: Romeo Mercado, Shiyu Zhang
  • Patent number: 6863403
    Abstract: A 1X projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.
    Type: Grant
    Filed: May 27, 2003
    Date of Patent: March 8, 2005
    Assignee: Ultratech, Inc.
    Inventors: Romeo I. Mercado, Shiyu Zhang
  • Publication number: 20040239893
    Abstract: A 1× projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.
    Type: Application
    Filed: May 27, 2003
    Publication date: December 2, 2004
    Inventors: Romeo I. Mercado, Shiyu Zhang
  • Patent number: 6776219
    Abstract: Methods and materials for preparing investment molds useful in pressure infiltration casting of near net-shape metal or metal matrix composite (MMC) components. One embodiment of the invention includes disposing a slurry of an appropriately sized refractory material and a vehicle around a preform or fugitive pattern, removing the bulk of the vehicle, then curing/drying the refractory material to create an investment mold of the invention. Subsequently, pressure infiltration casting with a molten infiltrant using the investment mold permits infiltration of the mold cavity and/or preform without infiltration of the investment mold. As a result, the investment mold readily is removed to provide the near net-shape metal or MMC component. In other embodiments of the invention, a non-fugitive pattern is used, typically with a modified refractory cement of the invention.
    Type: Grant
    Filed: September 20, 1999
    Date of Patent: August 17, 2004
    Assignee: Metal Matrix Cast Composites, Inc.
    Inventors: James A. Cornie, Maxim L. Seleznev, Brett M. Schulz, Shiyu Zhang
  • Publication number: 20030174045
    Abstract: An automatic garage door status signaling apparatus comprises a push button, a garage door opening and closing circuitry, a signal indicating circuitry, and a delay timer control circuitry is provided. An indicating signal is generated if the push button is not pressed within a predetermined time period after the delay timer control circuitry is activated. An automatic garage door status indicating apparatus comprises a push button, a garage door opening and closing circuitry and a garage door status indicating circuitry is also provided. In one embodiment, the garage door status indicating circuitry comprises a time log. In another embodiment, the garage door status indicating circuitry comprises a timer, which can be a clock.
    Type: Application
    Filed: March 14, 2002
    Publication date: September 18, 2003
    Inventor: Shiyu Zhang
  • Patent number: 6422701
    Abstract: One embodiment of the present invention is a visual field tester that includes: (a) a high intensity light source; (b) an optical fiber; (c) scanning optics, wherein light output from the light source is directed by the optical fiber to impinge upon the scanning optics, and the scanning optics directs the light to form a stimulus at various field positions; and (d) a video display system to output one or more light patterns. Another embodiment of the present invention is a visual field tester that includes: (a) a video display system to output one or more types of light patterns; (b) a background illumination display system; and (c) viewing optics to magnify the field of view of the video display system and the background illumination display system.
    Type: Grant
    Filed: August 10, 2001
    Date of Patent: July 23, 2002
    Assignee: Carl Zeiss, Inc.
    Inventors: Jay Wei, Zheng-wu Li, Shiyu Zhang
  • Publication number: 20020018180
    Abstract: One embodiment of the present invention is a visual field tester that includes: (a) a high intensity light source; (b) an optical fiber; (c) scanning optics, wherein light output from the light source is directed by the optical fiber to impinge upon the scanning optics, and the scanning optics directs the light to form a stimulus at various field positions; and (d) a video display system to output one or more light patterns. Another embodiment of the present invention is a visual field tester that includes: (a) a video display system to output one or more types of light patterns; (b) a background illumination display system; and (c) viewing optics to magnify the field of view of the video display system and the background illumination display system.
    Type: Application
    Filed: August 10, 2001
    Publication date: February 14, 2002
    Inventors: Jay Wei, Zheng-Wu Li, Shiyu Zhang
  • Patent number: 5940224
    Abstract: Lens systems for wide band infrared camera having a bandwidth of 1-5 .mu.m with a low f-number and 100% cold stop efficiency.
    Type: Grant
    Filed: March 16, 1998
    Date of Patent: August 17, 1999
    Assignee: Nikon Corporation
    Inventor: Shiyu Zhang