Abstract: An information processing device includes: a reference information acquisition part that acquires, as reference information, a reference processing quantity and reference device information in a reference device corresponding to a substrate processing apparatus serving as a reference; a comparison information acquisition part that acquires, as comparison information, a comparison processing quantity and comparison device information in a comparison device corresponding to the substrate processing apparatus serving as a comparison target of the reference device; and a diagnostic processing part that generates diagnostic information including at least one of a cause of a time when a difference occurs between the reference processing quantity and the comparison processing quantity and a countermeasure for eliminating the difference, based on the reference information and the comparison information.

Abstract: An information processing device generates a substrate processing schedule for sequentially performing respective processes on a predetermined number of substrates in a substrate processing device.

Abstract: A substrate processing apparatus is provided. The substrate processing apparatus for processing substrates includes a plurality of processing modules that perform predetermined processes on the substrates, and an information display that displays information about an error that occurred in the predetermined processes. The information display displays, in the same screen, a substrate on which a predetermined process in which the error occurred, a processing module which was performing the predetermined process in which the error occurred, the timing at which the error occurred, and a main cause of the error.