Patents by Inventor Shogo ASO

Shogo ASO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TEMPLATE, MANUFACTURING METHOD OF TEMPLATE, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
    Publication number: 20220082934
    Abstract: According to one embodiment, an imprint template includes a substrate having a first surface and a mesa part protruding from the first surface. The mesa part has a second surface with a pattern thereon. The mesa part includes a sloped region. The sloped region is on at least an outer circumferential portion of the second surface. The second surface in the sloped region slopes downward towards the first surface to an outer edge of the mesa part when the substate is in a non-pressurized state.
    Type: Application
    Filed: March 2, 2021
    Publication date: March 17, 2022
    Inventors: Takahiro IWASAKI, Hirokazu MIYOSHI, Shogo ASO, Masayuki HATANO