Abstract: A plurality of records are registered in a database. Each record includes emission information and a peak energy sequence. A fitting unit fits, for each peak energy sequence, a calculated spectrum which is based on the peak energy sequence with respect to an actual spectrum which is acquired from a sample. An analyzer analyzes the sample based on the emission information correlated to the calculated spectrum satisfying a fitting condition.

Abstract: A soft X-ray measurement device detects a characteristic X-ray emitted from a sample including a primary element and a secondary element. An X-ray spectrum generated by a spectrum generator includes a waveform of interest which is an intrinsic waveform of the primary element, caused by transition of electrons from a valence band to an inner shell in the primary element. A secondary element analyzer calculates quantitative information of the secondary element through analysis of the waveform of interest.