Abstract: A substance detecting system (1) includes a plurality of substrates (2). In each of the substrates (2), a plurality of through-holes (3) through which gas (G) flows is arranged. In each of the substrates (2), in at least one of the through-holes (3), a substance sensor (4) to detect a target substance contained in the gas (G) flowing through the through-hole (3) is installed. The substrates (2) are stacked in such a way that through-holes (3) corresponding to each other communicate with each other. Because of this configuration, a plurality of flow paths (5) for the gas (G) extending in the stacking direction of the substrates (2) is formed. In the substance detecting system (1), a plurality of the substance sensors (4) is arranged in at least one flow path (5).

Abstract: A substance detection system (1A) includes a substance sensor (10), a distance sensor (11), and an information processor (20). The substance sensor (10) detects a substance (3) emitted from a generation source (2). The distance sensor (11) detects distance (L) between the generation source (2) and the substance sensor (10). The information processor (20) includes a determiner (21). The determiner (21) determines whether or not the distance (L) detected by the distance sensor (11) falls within a range from (L1) to (L2) where a detection result by the substance sensor (10) is determined to be valid.

Abstract: A substance detection element is described herein. The substance detection element includes a supporting substrate, a plate-shaped beam, a detection electrode, and a substance adsorption film. The plate-shaped beam is provided with a piezoelectric element. The detection electrodes detects information about the vibration frequency of the beam. The substance adsorption films changes the vibration frequency of the beam by adhesion of a substance. The substance adsorption films and the detection electrodes are respectively provided at the same position on the front and the back of the beam.

Abstract: A through-hole (3) is disposed in a supporting substrate (2). Plate-shaped beams (4 (4A, 4B)) each includes a piezoelectric element, extends from an edge of the through-hole (3) toward an opposite edge to close a part of the through-hole (3), supports a substance adsorption film to which a constitutive substance to be detected adheres, and has a vibration frequency that is varied due to adhesion of the constitutive substance to the substance adsorption film. Drive electrodes (16) apply a voltage to the piezoelectric element to vibrate and deform the beams (4). Detection electrodes (17) detect information about the vibration frequencies of the beams (4).

Abstract: An actuator includes an arm starting end having a piezoelectric element, a first end of the arm starting end connected to an inner side of a fixed frame, the arm starting end extending in a straight line, along a Y-axis direction through a gap between the fixed frame and a mirror surface, from the first end to beyond a middle point of an outer side of the mirror surface; an arm terminating end including a first end connected to the middle point of the outer side of the mirror surface, the arm terminating end extending parallel to the arm starting end; and an arm relay that connects a second end of the arm starting end to a second end of the arm terminating end, the arm relay being formed in a zigzag.

Abstract: Diaphragms (4, 5, 6, 7) each include laminated layers including a piezoelectric layer. The diaphragms (4, 5, 6, 7) are each warped to oscillate due to expansion and contraction of the piezoelectric layer or due to an oscillatory force from the outside. The diaphragms have mutually different resonance frequencies. A casing (2) has an internal space (2C) for accommodating the diaphragms (4, 5, 6, 7) and a fixing part (2D) for fixing a portion of each of the diaphragms (4, 5, 6, 7). The casing (2) transmits oscillations between the diaphragms (4, 5, 6, 7) and the outside via the fixing part (2D).

Abstract: A through hole (3) is provided on a supporting substrate (2). A plate-shaped beam (4) extends from an edge of the through hole (3) to a facing edge in such a way as to cover part of the through hole (3) and is provided with a piezoelectric element. A drive electrode (16) vibrates the beam (4) by applying voltage to the piezoelectric element. Detection electrodes (17A, 17B) detect information about the vibration frequency of the beam (4). Substance adsorption films (5A, 5B) change the vibration frequency of the beam (4) by adhesion of a substance. The substance adsorption films (5A, 5B) and the detection electrodes (17A, 17B) are respectively provided at the same position on the front and the back of the beam (4).

Abstract: A through-hole (3) is disposed in a supporting substrate (2). Plate-shaped beams (4 (4A, 4B)) each includes a piezoelectric element, extends from an edge of the through-hole (3) toward an opposite edge to close a part of the through-hole (3), supports a substance adsorption film to which a constitutive substance to be detected adheres, and has a vibration frequency that is varied due to adhesion of the constitutive substance to the substance adsorption film. Drive electrodes (16) apply a voltage to the piezoelectric element to vibrate and deform the beams (4). Detection electrodes (17) detect information about the vibration frequencies of the beams (4).

Abstract: Diaphragms (4, 5, 6, 7) each include laminated layers including a piezoelectric layer. The diaphragms (4, 5, 6, 7) are each warped to oscillate due to expansion and contraction of the piezoelectric layer or due to an oscillatory force from the outside. The diaphragms have mutually different resonance frequencies. A casing (2) has an internal space (2C) for accommodating the diaphragms (4, 5, 6, 7) and a fixing part (2D) for fixing a portion of each of the diaphragms (4, 5, 6, 7). The casing (2) transmits oscillations between the diaphragms (4, 5, 6, 7) and the outside via the fixing part (2D).

Abstract: A fixed frame (2) is fixed to an external member. An ultrasonic oscillator (3) is disposed inside the fixed frame (2) and includes a flexible first substrate and a first piezoelectric element deposited on the first substrate in the form of a thin film. The ultrasonic oscillator (3) is warped in response to expansion or contraction of the first piezoelectric element and generates ultrasonic waves. Actuator units (4) include a flexible second substrate coupling the first substrate to the fixed frame (2) and a second piezoelectric element deposited on the second substrate in the form of a thin film. The actuator units (4) are warped in response to expansion or contraction of the second piezoelectric element and cause the ultrasonic oscillator (3) to swing relative to the fixed frame (2). The fixed frame (2), the first substrate, and the second substrate are composed of the same substrate.

Abstract: An oscillator (4) for warping to oscillate due to expansion and contraction of a piezoelectric layer, having a tabular shape and including a substrate and the piezoelectric layer layered on the substrate. A casing (2) has an internal space (2C) accommodating the oscillator (4) and a fixing section (2D) fixing the circumferential edge of the oscillator (4). The casing (2) is conductive of oscillations transmitted from the oscillator (4) via the fixing section (2D) to the outside. A signal input unit (3) receives an audio voltage signal input from a smartphone and applies the signal to the piezoelectric layer. The oscillator (4) has a main surface (4A) having an entire width W1 longer than the entire width of the fixing section (2D) in a direction orthogonal to a direction from the fixing section (2D) to the center of the oscillator (4).

Abstract: A fixed frame (2) is fixed to an external member. An ultrasonic oscillator (3) is disposed inside the fixed frame (2) and includes a flexible first substrate and a first piezoelectric element deposited on the first substrate in the form of a thin film. The ultrasonic oscillator (3) is warped in response to expansion or contraction of the first piezoelectric element and generates ultrasonic waves. Actuator units (4) include a flexible second substrate coupling the first substrate to the fixed frame (2) and a second piezoelectric element deposited on the second substrate in the form of a thin film. The actuator units (4) are warped in response to expansion or contraction of the second piezoelectric element and cause the ultrasonic oscillator (3) to swing relative to the fixed frame (2). The fixed frame (2), the first substrate, and the second substrate are composed of the same substrate.

Abstract: A piezoelectric driver (10) includes n piezoelectric layers (3A to 3D) (where n is an integer equal to or greater than 2) that are stacked, with electrode layers (4B to 4D) each interposed between any adjacent piezoelectric layers, and with electrode layers (4A and 4E) further formed underneath the lowermost piezoelectric layer (3A) and on top of the uppermost piezoelectric layer (3D), and the piezoelectric driver (10) is bent and displaced in the direction in which the piezoelectric layers are stacked. A signal converter (11) converts an n-bit digital signal (IS) into n bits of a bit string data signal (BS) comprising of bit data indicating whether a drive voltage to be applied to each of the piezoelectric layers (3A to 3D) via the electrode layers (4A to 4B) is on or off.

Abstract: An actuator includes an arm starting end having a piezoelectric element, a first end of the arm starting end connected to an inner side of a fixed frame the arm starting end extending in a straight line, along a Y-axis direction through a gap between the fixed frame and a mirror surface, from the first end to beyond a middle point of an outer side of the mirror surface; an arm terminating end including a first end connected to the middle point of the outer side of the mirror surface, the arm terminating end extending parallel to the arm starting end; and an arm relay that connects a second end of the arm starting end to a second end of the arm terminating end, the arm relay being formed in a zigzag.

Abstract: Actuators (140), which are a pair of members, are disposed one on either side of a movable frame (120) in the X-axis direction, and oscillate the movable frame (120) about the X axis in relation to a fixed frame (110) by deformation caused by stretching and contracting of piezoelectric elements. Actuators (150), which are a pair of members, are disposed one on either side of a mirror (130) in the Y-axis direction, and oscillate the mirror (130) about the Y axis in relation to the movable frame (120) by deformation caused by stretching and contracting of the piezoelectric elements. The length of each actuator (140) extending in the Y-axis direction is longer than a distance between an inner side of the fixed frame (110) to which the actuator (140) is connected and the middle point of an outer side of the movable frame (120) in the Y-axis direction.

Abstract: An array speaker device (1A) includes a vibrator (20) arranged on one face of a substrate having a uniform thickness, the vibrator being formed of a base material layer (11), a first electrode layer (12), a piezoelectric element layer (13), and a second electrode layer (14), each of which has a uniform thickness, and which are layered in the order mentioned on the substrate. A hole through which a sound wave is outputted in the thickness direction of the substrate is provided on the substrate at a position corresponding to the vibrator (20), the sound wave being generated by vibration of the vibrator (20) to which a voltage signal is applied via the first electrode layer (12) and the second electrode layer (14). Scallops (S) made of an indentation and a projection alternating in the thickness direction of the substrate are formed on the inner circumferential wall of the hole.

Abstract: A mirror with a reflective layer formed thereon is supported within a frame-shaped support by two U-shaped arms. A plate-like arm connects fixation points (Q1, Q2), and a plate-like arm connects fixation points (Q3, Q4). A pair of piezoelectric elements (E11, E12) disposed along a longitudinal axis (L1) on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E20) disposed along the longitudinal axis (L2) on the upper surface of an inside bridge. Similarly, a pair of piezoelectric elements (E31, E32) disposed on an upper surface of an outside bridge of the arm, and a single piezoelectric element (E40) disposed on the upper surface of an inside bridge. When a positive drive signal is applied to the piezoelectric elements (E11, E20, E31, E40) and a negative drive signal is applied to the piezoelectric elements (E12, E32), the mirror is displaced efficiently.

Abstract: An oscillator (4) for warping to oscillate due to expansion and contraction of a piezoelectric layer, having a tabular shape and including a substrate and the piezoelectric layer layered on the substrate. A casing (2) has an internal space (2C) accommodating the oscillator (4) and a fixing section (2D) fixing the circumferential edge of the oscillator (4). The casing (2) is conductive of oscillations transmitted from the oscillator (4) via the fixing section (2D) to the outside. A signal input unit (3) receives an audio voltage signal input from a smartphone and applies the signal to the piezoelectric layer. The oscillator (4) has a main surface (4A) having an entire width W1 longer than the entire width of the fixing section (2D) in a direction orthogonal to a direction from the fixing section (2D) to the center of the oscillator (4).

Abstract: An array speaker device (1A) includes a vibrator (20) arranged on one face of a substrate having a uniform thickness, the vibrator being formed of a base material layer (11), a first electrode layer (12), a piezoelectric element layer (13), and a second electrode layer (14), each of which has a uniform thickness, and which are layered in the order mentioned on the substrate. A hole through which a sound wave is outputted in the thickness direction of the substrate is provided on the substrate at a position corresponding to the vibrator (20), the sound wave being generated by vibration of the vibrator (20) to which a voltage signal is applied via the first electrode layer (12) and the second electrode layer (14). Scallops (S) made of an indentation and a projection alternating in the thickness direction of the substrate are formed on the inner circumferential wall of the hole.

Abstract: A piezoelectric driver (10) includes n piezoelectric layers (3A to 3D) (where n is an integer equal to or greater than 2) that are stacked, with electrode layers (4B to 4D) each interposed between any adjacent piezoelectric layers, and with electrode layers (4A and 4E) further formed underneath the lowermost piezoelectric layer (3A) and on top of the uppermost piezoelectric layer (3D), and the piezoelectric driver (10) is bent and displaced in the direction in which the piezoelectric layers are stacked. A signal converter (11) converts an n-bit digital signal (IS) into n bits of a bit string data signal (BS) comprising of bit data indicating whether a drive voltage to be applied to each of the piezoelectric layers (3A to 3D) via the electrode layers (4A to 4B) is on or off.