Abstract: An air pump device includes an electric pump unit including a pump mechanism and a motor configured to drive the pump mechanism, a case housing the electric pump unit, and a vibration-proof member interposed between the electric pump unit and the case. The vibration-proof member is a plate-shaped member made of an elastic resin material and is wound around the electric pump unit to wrap the electric pump unit therein. A part of the vibration-proof member is sandwiched between the electric pump unit and one of facing surfaces that are inner surfaces of the case and face each other inside the case. Another part of the vibration-proof member is sandwiched between the electric pump unit and the other one of the facing surfaces.

Abstract: A semiconductor device comprises a central processing device, a first logical circuit, and a serial memory interface circuit. The first logical circuit has a first scan chain in which a first scan pattern is set, is configured to suppress a leakage current when the first scan pattern for power saving is set in the first scan chain. The serial memory interface circuit is configured to acquire the first scan pattern for power saving from an external storage device. The leakage current of the first logical circuit is suppressed by transferring the first scan pattern for power saving acquired by the serial memory interface circuit to the first logical circuit and setting the first scan pattern for power saving in the first scan chain under control of the central processing device.

Abstract: A semiconductor device comprises a central processing device, a first logical circuit, and a serial memory interface circuit. The first logical circuit has a first scan chain in which a first scan pattern is set, is configured to suppress a leakage current when the first scan pattern for power saving is set in the first scan chain. The serial memory interface circuit is configured to acquire the first scan pattern for power saving from an external storage device. The leakage current of the first logical circuit is suppressed by transferring the first scan pattern for power saving acquired by the serial memory interface circuit to the first logical circuit and setting the first scan pattern for power saving in the first scan chain under control of the central processing device.

Abstract: Disclosed is a method for depositing an insulating film with a high coverage through a low temperature process. The deposition method deposits an insulating film on a substrate using a deposition apparatus which includes a processing container that defines a processing space in which plasma is generated, a gas supply unit configured to supply a gas into the processing space, and a plasma generating unit configured to generate plasma by supplying microwave into the processing container. The deposition method includes depositing an insulating film that includes SiN on the substrate by supplying into a gas formed by adding H2 to trisilylamine into the processing container and generating plasma.

Abstract: Disclosed is a method for depositing an insulating film with a high coverage through a low temperature process. The deposition method deposits an insulating film on a substrate using a deposition apparatus which includes a processing container that defines a processing space in which plasma is generated, a gas supply unit configured to supply a gas into the processing space, and a plasma generating unit configured to generate plasma by supplying microwave into the processing container. The deposition method includes depositing an insulating film that includes SiN on the substrate by supplying into a gas formed by adding H2 to trisilylamine into the processing container and generating plasma.

Abstract: A color-separating and -recombining optical system provided between a light source and a projection lens in a projection display, has at least one prism assembly made up of at least two prisms bonded to each other with a bonding layer formed between the prisms. A white light emitted from the light source is divided into red-, green-, and blue-color light components related to primary colors. The light components are modulated by spatial light modulators in accordance with a video signal. The modulated light components are combined and projected onto a screen via the projection lens. The thickness of the bonding layer is varied as thin and thick for optical paths long and short, respectively, from the spatial light modulators to the bonding layer which each modulated light component emitted from the corresponding spatial light modulator reaches.

Abstract: Disclosed is a color separation and color synthesis optical system provided between a light source portion and a projection optical system in a reflection type projection display apparatus, which color-separates a white color beam emitted from the light source portion into three primary color light beams of R (red), G (green) and B (blue), guides the three primary color light beams to a plurality of spatial light modulators corresponding to R, G and B, and color-synthesizes color light beams optically modulated by the respective spatial light modulators for the colors depending on video signals to emit a color-synthesized light beam, wherein at least one or more wavelength-selective polarization converting plates which rotate a plane of polarization of a specific color light beam by 90 degrees are located, and the wavelength-selective polarization converting plate is adhered to an incidence plane and/or an emission plane of a polarization beam splitter by adhesive with a slight gap.

Abstract: A color-separating and -recombining optical system provided between a light source and a projection lens in a projection display, has at least one prism assembly made up of at least two prisms bonded to each other with a bonding layer formed between the prisms. A white light emitted from the light source is divided into red-, green-, and blue-color light components related to primary colors. The light components are modulated by spatial light modulators in accordance with a video signal. The modulated light components are combined and projected onto a screen via the projection lens. The thickness of the bonding layer is varied as thin and thick for optical paths long and short, respectively, from the spatial light modulators to the bonding layer which each modulated light component emitted from the corresponding spatial light modulator reaches.

Abstract: Disclosed is a color separation and color synthesis optical system provided between a light source portion and a projection optical system in a reflection type projection display apparatus, which color-separates a white color beam emitted from the light source portion into three primary color light beams of R (red), G (green) and B (blue), guides the three primary color light beams to a plurality of spatial light modulators corresponding to R, G and B, and color-synthesizes color light beams optically modulated by the respective spatial light modulators for the colors depending on video signals to emit a color-synthesized light beam, wherein at least one or more wavelength-selective polarization converting plates which rotate a plane of polarization of a specific color light beam by 90 degrees are located, and the wavelength-selective polarization converting plate is adhered to an incidence plane and/or an emission plane of a polarization beam splitter by adhesive with a slight gap.