Patents by Inventor Shogo Tsukazawa

Shogo Tsukazawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Protective film forming method
    Patent number: 10170300
    Abstract: A protective film forming method is provided. In the method, an oxide film of either an organic metal compound or an organic metalloid compound is deposited on a flat surface region between adjacent recessed shapes formed in a surface of a substrate. Then, a lateral portion of the oxide film deposited on the flat surface region is removed by etching.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: January 1, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Shogo Tsukazawa, Chihhsiang Hsiao, Masafumi Ishida, Yutaka Takahashi, Atsushi Endo