Abstract: According to the present invention, a desired one of multiple beams can be aligned with a small-diameter aperture quickly. A multi-electron beam inspection apparatus includes a beam selection aperture substrate including a first passage hole that passes all the multiple electron beams, a second passage hole through which one of the multiple electron beams is able to pass, a first slit, and a second slit not parallel to the first slit, an aperture moving unit moving the beam selection aperture substrate, a first detector detecting a current of a beam having passed through the first slit and a current of a beam having passed through the second slit, of the multiple electron beams, and a second detector detecting multiple secondary electron beams including reflected electrons, discharged from a substrate, due to application of the multiple electron beams, having passed through the first passage hole, to the substrate. The substrate is inspected based on an output signal from the second detector.

Abstract: A cover member fastening method and fastening structure are provided which can surly fasten and fix an abutting portion needing firm abutment and fixing and suppress a deformation of the cover member while suppressing a transmission of vibration to the cover member by further reducing the contact area with an engine body. In a fastening structure for a head cover (2) fastened to a cylinder head (1) by a fastening member (7) so as to cover the upper face of the cylinder head (1), an abutting portion (27) that abuts the upper face of the cylinder head (1) is formed on the internal face of the head cover (2). The lower face of a head-cover-side fastening boss (26) protrudes beyond the lower face of a head-cover-side attaching flange (22).