Abstract: A control apparatus according to this invention includes an ordinary information processing device, a control computer for controlling the information processing device, and an interface device interposed between the information processing device and the control computer in place of a human interface. A control unit of the control computer controls the information processing device on the basis of an unmanned control program and information from the information processing device. As an example, the control computer outputs a power supply ON/OFF-control data to ON/OFF-control the power source of the information processing device, or the control computer outputs key data to start a test program in the information processing device.

Abstract: Test apparatus heats or cools a small chamber according to a given thermal profile based on data from a thermal sensor; and the change of a component put in the chamber is measured in real time by a measuring sensor and the relationship between temperature and change in shape is displayed as its measurement results.

Abstract: A chip tester comprises a stage which is attached to an end of an arm and on which a chip is disposed, a reversing mechanism which rotates the arm from a first position to a second position and reverses a surface of the stage so as to look from upward to downward and vice versa, a vertical drive mechanism which moves the reversing mechanism vertically, and a probe head having pin-electrodes arranged under the second position of said arm as to face pad-electrodes of the chip looking downward. The chip tester further comprises an auxiliary system for assisting alignment of the chip with the probe head, the auxiliary system comprising an image pickup device arranged above the stage at the first position for picking up an image of the chip surface, and a monitor and a controller, these being operatively coupled with each other.