Patents by Inventor Shoichiro Minomo

Shoichiro Minomo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity
    Patent number: 6726803
    Abstract: A discharge tube is assembled from three sections formed of metal. A first discharge tube element and a second discharge tube element are connected with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both discharge tube elements along with an O-ring. The first discharge tube element and a third discharge tube element and a third discharge tube element are connected in a similar manner, and a discharge gap is formed between adjacent discharge tube elements. A high-frequency power supply is connected to each discharge tube element. Respective discharge tube elements are provided with cooling medium flow paths separately each other.
    Type: Grant
    Filed: July 10, 2001
    Date of Patent: April 27, 2004
    Assignee: Daihen Corporation
    Inventors: Kazuki Kondo, Michio Taniguchi, Shoichiro Minomo, Shigeki Amadatsu
  • Microwave plasma generator
    Patent number: 6401653
    Abstract: A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking the openings with an insulator to thereby vacuum seal the interior of the coaxial tube against the rectangular waveguide, and an insulator arranged in the coaxial tube as linked to the vacuum sealing window, thus facilitating microwave matching.
    Type: Grant
    Filed: April 9, 2001
    Date of Patent: June 11, 2002
    Assignee: Daihen Corporation
    Inventors: Michio Taniguchi, Shoichiro Minomo, Shigeki Amadatsu, Kazuki Kondo
  • Plasma generator
    Publication number: 20020043342
    Abstract: A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking the openings with an insulator to thereby vacuum seal the interior of the coaxial tube against the rectangular waveguide, and an insulator arranged in the coaxial tube as linked to the vacuum sealing window, thus facilitating microwave matching.
    Type: Application
    Filed: April 9, 2001
    Publication date: April 18, 2002
    Applicant: Daihen Corporation
    Inventors: Michio Taniguchi, Shoichiro Minomo, Shigeki Amadatsu, Kazuki Kondo
  • Plasma generating apparatus
    Publication number: 20020023589
    Abstract: One discharge tube assembled from divided three sections is constructed by connecting between a first discharge tube element of metal material and a second discharge tube element of metal material with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both discharge tube elements in a state of sealing hermetically with an O-ring and also by connecting between a first discharge tube element of metal material and a third discharge tube element of metal material in a similar manner, and a discharge gap is formed between adjacent discharge tube elements. A high-frequency power supply is connected to each discharge tube element. Respective discharge tube elements are provided with cooling medium flow paths separately each other.
    Type: Application
    Filed: July 10, 2001
    Publication date: February 28, 2002
    Inventors: Kazuki Kondo, Michio Taniguchi, Shoichiro Minomo, Shigeki Amadatsu