Abstract: A according to one embodiment, a semiconductor growth apparatus growing a semiconductor layer on a substrate includes a susceptor, a heater element, a gas feed unit and an auxiliary susceptor. The susceptor includes a first major surface, a second major surface and a substrate holder provided in the first major surface. The heater element heats the susceptor from the second major surface side. The gas feed unit feeds source gases of the semiconductor layer flowing along the first major surface. The auxiliary susceptor is disposed on a portion adjacent to the substrate holder on an upstream side in the source gas flow in the first major surface.

Abstract: In an aspect of the present invention, a vapor phase growth apparatus may include a chamber, a gas supply provided in the chamber, configured to supply a raw material gas from a central region outwardly, a susceptor provided above the gas supply in the chamber, being capable of revolve around the axis, and configured to mount a substrate facing downward, the substrate being inclined toward the axis, and a heater provided above the holder in the chamber.

Abstract: An MOCVD apparatus includes a raw material supply section configured to supply a process raw material into a process chamber. The raw material supply section includes a bubbling unit that stores an organic metal raw material in a liquid state. A carrier gas line is configured to supply, into the bubbling unit, a carrier gas that causes the organic metal raw material in a liquid state to bubble up. A flow rate control portion is provided on the carrier gas line to control the carrier gas flow rate. The flow rate control portion includes a plurality of mass flow controllers, which are disposed in parallel with each other and have full-scales different from each other for flow rate control. The mass flow controllers are switched for use, in accordance with the carrier gas flow rate.

Abstract: An MOCVD apparatus includes a raw material supply section configured to supply a process raw material into a process chamber. The raw material supply section includes a bubbling unit that stores an organic metal raw material in a liquid state. A carrier gas line is configured to supply, into the bubbling unit, a carrier gas that causes the organic metal raw material in a liquid state to bubble up. A flow rate control portion is provided on the carrier gas line to control the carrier gas flow rate. The flow rate control portion includes a plurality of mass flow controllers, which are disposed in parallel with each other and have full-scales different from each other for flow rate control. The mass flow controllers are switched for use, in accordance with the carrier gas flow rate.

Abstract: An interface device for an automobile telephone-set with a data transmission device-includes a switch for selectively connecting voice lines of a radio-transmitter/receiver to one of the telephone-set and the data transmission device, a distinguishing device for distinguishing dial data transmitted from the telephone-set and a control unit for energizing the switch and for connecting the voice lines of the radio transmitter/receiver to the data transmission device upon receiving a redial request from the data transmission device. When the user operates the telephone-set, an off-hook signal is transmitted from the telephone-set to the remote terminal through the radio transmitter/receiver. At this moment, the distinguishing device distinguishes the dial data which is transmitted from the telephone-set. The dial data is memorized in the data transmission device in case of a busy or not answerable situation at the remote terminal.

Abstract: An apparatus for the transmission and reception of data that has signal lines that provide a connection between the movable car telephone and the handset, a mechanism to acknowledge "off hook" signals and "on hook" signals, and a recovery mechanism that resets the operation based upon signals transmitted along the aforesaid signal lines after the aforesaid "off hook" signals and the aforesaid "on hook" signals in an apparatus for the tramsission and reception of data that performs different operations depending upon what the mechanism for acknowledgement of "off hook" signals and "on hook" signals has detected.