Abstract: Apparatus for cleaning a workpiece to remove foreign matter sticking to the workpiece includes a chuck table having a holding surface for holding the workpiece and a cleaning unit provided so as to face the workpiece for spraying a cleaning fluid to clean the workpiece. The cleaning unit includes a cleaning nozzle having a nozzle hole for spraying the cleaning fluid toward the workpiece, and a water film forming nozzle having an annular slit formed so as to surround the nozzle hole of the cleaning nozzle. The annular slit sprays the cleaning fluid in the form of a film having a conical shape, and extends from the annular slit to the workpiece held on the chuck table. The cleaning fluid sprayed from the nozzle hole of the cleaning nozzle has a columnar shape surrounded by the cleaning fluid sprayed from the annular slit of the water film forming nozzle.

Abstract: A conveying apparatus includes a holding plate having a holding surface destined to face a surface of a wafer to be held; a restriction member on one end side of the holding surface adapted to contact the periphery of the wafer so as to restrict movement of the wafer; and a moving unit adapted to move the holding plate. At the holding surface, a non-contact type suction holding part is adapted to jet a fluid obliquely to the surface of the wafer to be held so as to move the wafer toward the restriction member and generate a negative pressure between the holding surface and the surface to be held, thereby holding the wafer by suction. The fluid is jetted from the suction holding part so as to abut the wafer against the restriction member, thereby positioning the wafer at a predetermined position on the holding plate.

Abstract: A conveying apparatus includes a holding plate having a holding surface destined to face a surface of a wafer to be held; a restriction member on one end side of the holding surface adapted to contact the periphery of the wafer so as to restrict movement of the wafer; and a moving unit adapted to move the holding plate. At the holding surface, a non-contact type suction holding part is adapted to jet a fluid obliquely to the surface of the wafer to be held so as to move the wafer toward the restriction member and generate a negative pressure between the holding surface and the surface to be held, thereby holding the wafer by suction. The fluid is jetted from the suction holding part so as to abut the wafer against the restriction member, thereby positioning the wafer at a predetermined position on the holding plate.

Abstract: Apparatus for cleaning a workpiece to remove foreign matter sticking to the workpiece includes a chuck table having a holding surface for holding the workpiece and a cleaning unit provided so as to face the workpiece for spraying a cleaning fluid to clean the workpiece. The cleaning unit includes a cleaning nozzle having a nozzle hole for spraying the cleaning fluid toward the workpiece, and a water film forming nozzle having an annular slit formed so as to surround the nozzle hole of the cleaning nozzle. The annular slit sprays the cleaning fluid in the form of a film having a conical shape, and extends from the annular slit to the workpiece held on the chuck table. The cleaning fluid sprayed from the nozzle hole of the cleaning nozzle has a columnar shape surrounded by the cleaning fluid sprayed from the annular slit of the water film forming nozzle.

Abstract: The position of a ship moored by at least three anchor ropes extending between the ship and independent remote anchor points is corrected by a control system comprising a rope orientation angle detector, a device for designating the angle and amount of movement of the ship which are necessary to correct the position of the ship, a position correction parameter designating device which determines whether parallel movement or swinging movement is to be made to correct the position of the ship and sends the result of determination to the rope orientation angle detector, a deviation operator which compares the angle of movement with the rope orientation angle for producing an output corresponding to the differential angle, a rope extension and contraction control device responsive to the outputs from the deviation operator and the rope orientation angle detector for producing an output for commanding paying out or taking up of respective anchor ropes, and winches mounted on the ship for operating respective ancho