Patents by Inventor Shom Poncth

Shom Poncth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to generate airgaps with a template first scheme and a self aligned blockout mask
    Publication number: 20080122106
    Abstract: A structure and method to produce an airgap on a substrate having a dielectric layer with a pattern transferred onto the dielectric layer and a self aligned block out mask transferred on the dielectric layer around the pattern.
    Type: Application
    Filed: September 11, 2006
    Publication date: May 29, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES
    Inventors: Satyanarayana Venkata Nitta, Sampath Purushothaman, Matthew E. Colburn, Daniel C. Edelstein, Shom Poncth