Patents by Inventor Shoshi Katayama

Shoshi Katayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Position detection apparatus and exposure apparatus
    Patent number: 7170603
    Abstract: An exposure apparatus includes an image sensing section and image sensing control section for measuring the average position of a mark formed on a wafer during a predetermined observation period before a stage completely stops, an interferometer for measuring any deviation of the stage during the observation period, a stage deviation storage section for storing the measurement result by the interferometer in a memory and calculating the average deviation of the stage on the basis of the measurement result, and a shift amount calculation section for calculating the actual position of the mark, while the stage is at rest, on the basis of the average position of the mark and the average deviation of the stage.
    Type: Grant
    Filed: June 30, 1999
    Date of Patent: January 30, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Shoshi Katayama
  • POSITION DETECTION APPARATUS AND EXPOSURE APPARATUS
    Publication number: 20030142313
    Abstract: An exposure apparatus includes an image sensing section and image sensing control section for measuring the average position of a mark formed on a wafer during a predetermined observation period before a stage completely stops, an interferometer for measuring any deviation of the stage during the observation period, a stage deviation storage section for storing the measurement result by the interferometer in a memory and calculating the average deviation of the stage on the basis of the measurement result, and a shift amount calculation section for calculating the actual position of the mark, while the stage is at rest, on the basis of the average position of the mark and the average deviation of the stage.
    Type: Application
    Filed: June 30, 1999
    Publication date: July 31, 2003
    Inventor: SHOSHI KATAYAMA