Abstract: Provided is a film for a wavelength conversion sheet that can suppress a change in color with time when applied to a wavelength conversion sheet. A film for a wavelength conversion sheet, comprising a primer layer and a first base material film in presented order, wherein a refractive index of the primer layer is defined as n1, a thickness of the primer layer is defined as t1, and a refractive index of the first base material film is defined as n2, and the following condition 1 or the following condition 2 is satisfied: Condition 1: n1<n2, and d1 represented by the following expression 1 represents a range of x±0.10 wherein x is an odd integer; Condition 2: n1>n2, and d1 represented by the following expression 1 represents a range of x±0.10 wherein x is an even integer; Expression 1: d1=n1×t1/112.5 nm.

Abstract: A controller applies a predetermined voltage to a fixed part detection excitation electrode to vibrate a movable part in a second direction and simultaneously applies a predetermined voltage to a fixed part drive electrode to vibrate the movable part in a first direction. The controller acquires, of the movable part, a first resonance frequency along the first direction and a second resonance frequency along the second direction. The controller controls a drive spring adjustment part to adjust a spring constant of the drive spring, such that the first resonance frequency is maintained constant, and controls a detection spring adjustment part to adjust a spring constant of the detection spring such that the second resonance frequency is maintained constant. The controller detects the angular velocity based on a result of synchronously detecting signal from the fixed part detection electrode with the first resonance frequency.

Abstract: An electrostatic actuator includes a fixed electrode and a movable electrode arranged to face the fixed electrode. The movable electrode is configured to be displaceable with respect to the fixed electrode and a fixed portion. An attractive force acts between the movable electrode and the fixed portion. In the electrostatic actuator, a non-linear vibration of the movable electrode when a voltage is applied to the fixed electrode and the movable electrode is reduced by the attractive force acting between the movable electrode and the fixed portion.

Abstract: A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.

Abstract: An inertial force sensor may comprise: a base; a first block including an inclined surface that is inclined with respect to a base surface; a second block including an inclined surface that is inclined with respect to the base surface; a third block including an inclined surface that is inclined with respect to the base surface; a fourth block including an inclined surface that is inclined with respect to the base surface; and a connector configured to physically connect the first, second, third, and fourth blocks. In this inertial force sensor, the first and second blocks are aligned along a first direction parallel to the base surface with their inclined surfaces both facing inward or outward, and the third and fourth blocks are aligned along a second direction parallel to the base surface and orthogonal to the first direction with their inclined surfaces both facing inward or outward.

Abstract: In a mounting structure, a micro vibrator has: a curved surface portion having a hemispherical curved surface; a connecting portion extending from the curved surface portion toward a center of a hemispherical shape of the curved surface portion; and a surface electrode covering at least a part of the connecting portion and at least a part of the curved surface portion. A mounting substrate has two or more wirings and a part of the micro vibrator is connected to the mounting substrate. The wirings each have an electrode connection portion connected to a portion of the surface electrode covering the connecting portion at an end. The two or more wirings include a voltage application wiring and a voltage detection wiring. The voltage application wiring is spaced away from the voltage detection wiring on the mounting substrate.

Abstract: A micro vibration body includes a curved surface portion, a recessed portion recessed from the curved surface portion, a bottom surface protruding portion protruding from a bottom surface of the recessed portion, and a through hole in the bottom surface protruding portion. A mounting substrate has a positioning recess, into which the bottom surface protruding portion is inserted, and electrode portions surrounding the inner frame portion. A joining member is in the positioning recess and joins the bottom surface protruding portion with the mounting substrate. The bottom surface is in contact with a region of the mounting substrate around the positioning recess. The bottom surface protruding portion has a tip end surface that is at a distance from the positioning recess. The joining member at least partially enters the through hole and is electrically connected to the conductive layer.

Abstract: A molding device may comprise a mold, a plate, and a ring. The mold may comprise: a lower surface; an upper surface parallel to the lower surface; a hole defined in a part of the upper surface; and a through hole extending from a bottom surface of the hole to the lower surface of the mold. The plate may comprise a surface with a gas outlet defined therein. The ring may be arranged between the lower surface of the mold and the surface of the plate and connecting the mold and the plate. The ring may surround the through hole exposed on the lower surface of the mold and the gas outlet exposed on the surface of the plate. In a region where the ring is not arranged, a space may be defined between the lower surface of the mold and the surface of the plate.

Abstract: An inertial sensor includes a lower substrate and an upper substrate. The upper substrate includes a micro oscillator, electrodes and a pad, which are independent of each other. The micro oscillator includes a curved surface portion, a joint portion recessed inward from an apex of the curved surface portion and joined to a support portion of the lower substrate, a rim at an end of the curved surface portion and a conductive film covering the micro oscillator. The curved surface portion is in an aerial state. The rim is made of the same material as the electrodes, located on a virtual flat plane formed by the electrodes, and apart from and surrounded by the electrodes. A portion of the conductive film that covers the joint portion is electrically bonded to a lower metal film covering the support portion.

Abstract: Before a pedestal is assembled, a sensitivity is inspected for each of sensors disposed in blocks respectively. In an inspection step, the blocks in which the sensors are disposed respectively are prepared. The blocks are fitted into main-axis groove portions of a main-axis tray, and the blocks are brought in contact with main-axis positioning surfaces of the main-axis groove portions to dispose the thickness direction of the main-axis tray and the main-axes of the sensors in parallel. The main-axis tray is arranged on a turntable such that a central axis of rotation of the turntable and the thickness direction of the main-axis tray are in parallel and that the central axis of rotation of the turntable and the main-axes of the sensors are in parallel. The turntable is made pivoting or swinging to inspect the sensitivities, in the main-axes, of the of sensors.

Abstract: A multi-axis inertial force sensor includes a mounting material, blocks, and sensors. Each block has a positioning portion that determines its position relative to a contact partner. A pedestal is formed by an assembly of the blocks where the positions are determined relative to each other based on the positioning portion and where inclined surfaces are oriented in different directions. The sensors are respectively arranged on the inclined surfaces of the pedestal so that the main axes are oriented in different directions to detect vector components of inertial force corresponding to the main axes.

Abstract: In a method for manufacturing a micro vibration body having a three-dimensional curved surface, a mold defining a recess part is prepared, and a plate-shaped reflow material is arranged on the mold so as to cover the recess part. Pressure of a space defined by the recess part covered with the reflow material is reduced, and the reflow material is deformed by heating from an upper surface side opposite to a lower surface facing the recess part and by means of the pressure reduced. When the reflow material is deformed, a part of the mold is heated and / or cooled. As another example, when the reflow material is deformed, a mold having a different heat capacity portion is used to generate a temperature gradient in the mold.

Abstract: An inertial sensor includes a lower substrate and an upper substrate. The upper substrate includes a micro oscillator, electrodes and a pad, which are independent of each other. The micro oscillator includes a curved surface portion, a joint portion recessed inward from an apex of the curved surface portion and joined to a support portion of the lower substrate, a rim at an end of the curved surface portion and a conductive film covering the micro oscillator. The curved surface portion is in an aerial state. The rim is made of the same material as the electrodes, located on a virtual flat plane formed by the electrodes, and apart from and surrounded by the electrodes. A portion of the conductive film that covers the joint portion is electrically bonded to a lower metal film covering the support portion.

Abstract: A micro vibration body includes a curved surface portion, a recessed portion recessed from the curved surface portion, a bottom surface protruding portion protruding from a bottom surface of the recessed portion, and a through hole in the bottom surface protruding portion. A mounting substrate has a positioning recess, into which the bottom surface protruding portion is inserted, and electrode portions surrounding the inner frame portion. A joining member is in the positioning recess and joins the bottom surface protruding portion with the mounting substrate. The bottom surface is in contact with a region of the mounting substrate around the positioning recess. The bottom surface protruding portion has a tip end surface that is at a distance from the positioning recess. The joining member at least partially enters the through hole and is electrically connected to the conductive layer.

Abstract: A micro vibration body includes a curved surface portion, which has an annular curved surface, and a recessed portion, which is recessed from the curved surface portion. A mounting substrate includes an inner frame portion and electrode portions, which surround an inner frame portion. A joining member is provided in an inner region of the mounting substrate surrounded by the inner frame portion. The recessed portion of the micro vibration body has a bottom surface defining a mounted surface located in the inner region and joined to the mounting substrate via the joining member. The curved surface portion has a rim that includes an end portion of the curved surface portion on an opposite side to the recessed portion. The rim has a rim lower surface located on a same plane as the mounted surface or a tip end portion of the mounted surface.

Abstract: A controller applies a predetermined voltage to a fixed part detection excitation electrode to vibrate a movable part in a second direction and simultaneously applies a predetermined voltage to a fixed part drive electrode to vibrate the movable part in a first direction. The controller acquires, of the movable part, a first resonance frequency along the first direction and a second resonance frequency along the second direction. The controller controls a drive spring adjustment part to adjust a spring constant of the drive spring, such that the first resonance frequency is maintained constant, and controls a detection spring adjustment part to adjust a spring constant of the detection spring such that the second resonance frequency is maintained constant. The controller detects the angular velocity based on a result of synchronously detecting signal from the fixed part detection electrode with the first resonance frequency.

Abstract: An electrostatic actuator includes a fixed electrode and a movable electrode arranged to face the fixed electrode. The movable electrode is configured to be displaceable with respect to the fixed electrode and a fixed portion. An attractive force acts between the movable electrode and the fixed portion. In the electrostatic actuator, a non-linear vibration of the movable electrode when a voltage is applied to the fixed electrode and the movable electrode is reduced by the attractive force acting between the movable electrode and the fixed portion.

Abstract: A combustible gas supply unit is for supplying compressed combustible gas to a dispenser. The combustible gas supply unit includes a high pressure gas facility for handling compressed combustible gas, a base plate having the high pressure gas facility installed thereon and a barrier supported by the base plate to surround at least a part of an outer periphery of the high pressure gas facility. A barrier is shaped to surround at least a part of an outer periphery of the high pressure gas facility and includes a part to be supported by a base plate having the high pressure gas facility installed thereon.

Abstract: Plasma which is supplied from a supply passage (1) is accelerated with a Hall electric field (E) which is generated through interaction of electrons (e?) emitted from a cathode (3), a radial direction magnetic field (Bd), and an electric field (Ex).

Abstract: Electrodeless plasma is supplied to a space between a cathode and an anode such that a resistivity in the space is reduced. The electrodeless plasma is accelerated with Lorentz force induced by a radial direction magnetic field component and an axial direction magnetic field component that are generated in the space, and current in the space.