Patents by Inventor Shota HISHIKAWA

Shota HISHIKAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etchant, replenishment solution and method for forming copper wiring
    Patent number: 10174428
    Abstract: An etchant for copper includes an acid and one or more compounds selected from the group consisting of an aliphatic noncyclic compound, an aliphatic heterocyclic compound and a heteroaromatic compound. The aliphatic noncyclic compound is a saturated aliphatic noncyclic compound (A) including only two or more nitrogen atoms as heteroatoms, and 2 to 10 carbon atoms. The aliphatic heterocyclic compound is a compound (B) including a five-, six-, or seven-membered ring having one or more nitrogen atoms as one or more heteroatoms constituting the ring. The heteroaromatic compound is a compound (C) including a six-membered heteroaromatic ring having one or more nitrogen atoms as one or more heteroatoms constituting the ring.
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: January 8, 2019
    Assignee: MEC Company Ltd.
    Inventors: Hirofumi Kodera, Ikuyo Katayama, Shota Hishikawa
  • ETCHANT, REPLENISHMENT SOLUTION AND METHOD FOR FORMING COPPER WIRING
    Publication number: 20170260632
    Abstract: An etchant for copper includes an acid and one or more compounds selected from the group consisting of an aliphatic noncyclic compound, an aliphatic heterocyclic compound and a heteroaromatic compound. The aliphatic noncyclic compound is a saturated aliphatic noncyclic compound (A) including only two or more nitrogen atoms as heteroatoms, and 2 to 10 carbon atoms. The aliphatic heterocyclic compound is a compound (B) including a five-, six-, or seven-membered ring having one or more nitrogen atoms as one or more heteroatoms constituting the ring. The heteroaromatic compound is a compound (C) including a six-membered heteroaromatic ring having one or more nitrogen atoms as one or more heteroatoms constituting the ring.
    Type: Application
    Filed: May 31, 2016
    Publication date: September 14, 2017
    Inventors: Hirofumi KODERA, Ikuyo KATAYAMA, Shota HISHIKAWA