Abstract: An inertial sensor includes: a base body; a sensor element provided at the base body; and a lid body covering the sensor element. The sensor element includes a anchor fixed to the base body, a movable body swingable about a first axis, which is horizontal to the base body, as a swing axis, a first rotation spring and a second rotation spring coupling the anchor and the movable body, a movable comb electrode group provided at the movable body, a fixed comb electrode group provided at the base body and facing the movable comb electrode group, a first inspection electrode provided at the movable body, and a second inspection electrode provided at the base body or the lid body and overlapping the first inspection electrode in a plan view. In the plan view, the first inspection electrode is provided with a plurality of damping adjustment holes.

Abstract: A physical quantity sensor includes: a substrate; a first anchor; a second anchor; a first support beam; a second support beam; a first movable body; a second movable body; and a shielder. A first fixed electrode and a second fixed electrode are provided on the substrate. The first movable body is provided to be swingable with respect to the substrate about a first rotation axis along a second direction. The second movable body is provided to be swingable with respect to the substrate about a second rotation axis along the second direction. The shielder is provided between the first movable body and the second movable body along a first direction.

Abstract: An inertia sensor detects a physical quantity based on a displacement in a Z axis when three axes orthogonal to one another are defined as an X axis, a Y axis, and the Z axis. The inertial sensor includes: a substrate; and a movable body that is fixed to the substrate, that swings around a swing axis P along the X axis, and that has two flat surfaces facing each other and a side surface connecting the two flat surfaces. The movable body includes a first extension arranged at a predetermined angle with respect to the swing axis P and a second extension arranged facing the side surface of the first extension.

Abstract: A liquid discharge head includes: a first flow path member that discharges a liquid; a second flow path member including a supply flow path for sending the liquid to the first flow path member, and a collecting flow path for collecting the liquid from the first flow path member. The supply flow path includes a supply branch flow path that branches out at a center portion of the second flow path member in the first direction and extends in a first direction and in a third direction opposite thereto. The collecting flow path includes a collecting branch flow path that branches out at the center portion of the second flow path member in the first direction and extends in the first direction and in the third direction. When viewed in plan, the supply branch flow path and the collecting branch flow path overlap each other.

Abstract: A physical quantity sensor includes a substrate, a first sensor element that is positioned on one main surface of the substrate and includes a first fixed portion fixed to the substrate, a second sensor element that is positioned on the one main surface of the substrate and includes a second fixed portion fixed to the substrate, a first recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the first fixed portion in plan view of the substrate, and a second recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the second fixed portion in plan view of the substrate, and in which the first recess portion and the second recess portion are disposed so as to be separated from each other.

Abstract: A liquid discharge head includes: a first flow path member that discharges a liquid; a second flow path member including a supply flow path for sending the liquid to the first flow path member, and a collecting flow path for collecting the liquid from the first flow path member. The supply flow path includes a supply branch flow path that branches out at a center portion of the second flow path member in the first direction and extends in a first direction and in a third direction opposite thereto. The collecting flow path includes a collecting branch flow path that branches out at the center portion of the second flow path member in the first direction and extends in the first direction and in the third direction. When viewed in plan, the supply branch flow path and the collecting branch flow path overlap each other.

Abstract: A physical quantity sensor includes: a base; wiring disposed in the base; a support that includes a first bonded surface bonded to the base and a second bonded surface bonded to the wiring; a suspension beam connected to the support; and an electrode finger supported by the suspension beam. The support is located between the first bonded surface and the suspension beam and includes a first overhang separated from the base.

Abstract: A physical quantity sensor has a first movable electrode section which has a portion facing a first fixed electrode section and a second movable electrode section which has a portion facing a second fixed electrode section, and is provided with a movable mass section which is formed in a shape which encloses a first fixed electrode side fixed section, a second fixed electrode side fixed section, a first movable electrode side fixed section, and a second movable electrode side fixed section in planar view.

Abstract: A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.

Abstract: A physical quantity sensor has a first movable electrode section which has a portion facing a first fixed electrode section and a second movable electrode section which has a portion facing a second fixed electrode section, and is provided with a movable mass section which is formed in a shape which encloses a first fixed electrode side fixed section, a second fixed electrode side fixed section, a first movable electrode side fixed section, and a second movable electrode side fixed section in planar view.

Abstract: A physical quantity sensor has a first movable electrode section which has a portion facing a first fixed electrode section and a second movable electrode section which has a portion facing a second fixed electrode section, and is provided with a movable mass section which is formed in a shape which encloses a first fixed electrode side fixed section, a second fixed electrode side fixed section, a first movable electrode side fixed section, and a second movable electrode side fixed section in planar view.

Abstract: A physical quantity sensor includes a substrate, a first sensor element that is positioned on one main surface of the substrate and includes a first fixed portion fixed to the substrate, a second sensor element that is positioned on the one main surface of the substrate and includes a second fixed portion fixed to the substrate, a first recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the first fixed portion in plan view of the substrate, and a second recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the second fixed portion in plan view of the substrate, and in which the first recess portion and the second recess portion are disposed so as to be separated from each other.

Abstract: A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.

Abstract: A physical quantity sensor includes a base substrate and an element piece bonded to the base substrate. The element piece includes fixed portions fixed to the base substrate, a first fixed electrode finger supported on the fixed portion, a second fixed electrode finger supported on the fixed portion, a fixed portion that is positioned between the fixed portions and is fixed to the base substrate, a movable portion that is displaceable with respect to the fixed portion, an elastic portion that links the fixed portion and the movable portion, a first movable electrode finger that is supported on the movable portion and that is arranged facing the first fixed electrode finger, and a second movable electrode finger that is supported on the movable portion and is arranged facing the second fixed electrode finger.

Abstract: A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.

Abstract: A physical quantity sensor includes: a base; wiring disposed in the base; a support that includes a first bonded surface bonded to the base and a second bonded surface bonded to the wiring; a suspension beam connected to the support; and an electrode finger supported by the suspension beam. The support is located between the first bonded surface and the suspension beam and includes a first overhang separated from the base.

Abstract: A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.

Abstract: An electronic device includes a package; and a functional element, in which a side surface of the functional element is fixed to a side wall of the package on an inner side thereof via an adhesive.

Abstract: A physical quantity sensor according to the invention includes a first movable electrode portion having a portion that is opposed to a first fixed electrode portion, and a second movable electrode portion having a portion that is opposed to a second fixed electrode portion. The physical quantity sensor further includes a movable mass portion that has a shape surrounding a first fixed electrode side fixing portion and a second fixed electrode side fixing portion in a plan view, and a first movable electrode side fixing portion and a second movable electrode side fixing portion that support the movable mass portion via a first elastic portion and a second elastic portion and are disposed at the outside of the movable mass portion in a plan view.

Abstract: A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.