Patents by Inventor Shota KONUMA

Shota KONUMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SUPPORT SUBSTRATE, AND METHOD FOR PEELING SUBSTRATE
    Publication number: 20240297146
    Abstract: According to one embodiment, a method for manufacturing a semiconductor device includes forming, on a substrate, an active layer in which a dopant is implanted; forming a porous layer by making the active layer porous by an anodization treatment; forming a device layer including at least a part of a configuration of the semiconductor device above the porous layer; and cleaving the porous layer to remove the substrate.
    Type: Application
    Filed: February 27, 2024
    Publication date: September 5, 2024
    Applicant: Kioxia Corporation
    Inventors: Shota KONUMA, Hiroshi FUJITA, Hisashi KATO, Naomi YANAI