Patents by Inventor Shota Moriyama

Shota Moriyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE
    Publication number: 20240136206
    Abstract: A substrate processing apparatus that dries a liquid adhering to a substrate by using a processing fluid in a supercritical state, includes: a processing container in which the substrate is accommodated; a plurality of pipes configured to allow the processing fluid to flow to and from the processing container therethrough; a first fluid heating device configured to heat a first pipe that supplies the processing fluid to an interior of the processing container among the plurality of pipes; and a second fluid heating device configured to heat a second pipe that discharges the processing fluid from the interior of the processing container among the plurality of pipes.
    Type: Application
    Filed: October 17, 2023
    Publication date: April 25, 2024
    Inventors: Takahiro HAYASHIDA, Shigeru MORIYAMA, Shota UMEZAKI
  • Holder for holding substrate and system for plating
    Patent number: 11718925
    Abstract: There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact.
    Type: Grant
    Filed: March 8, 2022
    Date of Patent: August 8, 2023
    Assignee: EBARA CORPORATION
    Inventors: Shota Moriyama, Matsutaro Miyamoto
  • HOLDER FOR HOLDING SUBSTRATE AND SYSTEM FOR PLATING
    Publication number: 20220186395
    Abstract: There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact.
    Type: Application
    Filed: March 8, 2022
    Publication date: June 16, 2022
    Inventors: Shota Moriyama, Matsutaro Miyamoto
  • Holder for holding substrate and system for plating
    Patent number: 11299817
    Abstract: There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: April 12, 2022
    Assignee: EBARA CORPORATION
    Inventors: Shota Moriyama, Matsutaro Miyamoto
  • HOLDER FOR HOLDING SUBSTRATE AND SYSTEM FOR PLATING
    Publication number: 20200199770
    Abstract: There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact.
    Type: Application
    Filed: June 12, 2018
    Publication date: June 25, 2020
    Inventors: Shota Moriyama, Matsutaro Miyamoto