Patents by Inventor SHOTA UEYAMA

SHOTA UEYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240009697
    Abstract: A liquid processing apparatus that applies a coating liquid onto a substrate, includes: a substrate holder that holds and rotates the substrate; a coating liquid supplier that supplies the coating liquid to the substrate; a cup provided to surround the substrate; and a solvent supplier that supplies a solvent for the coating liquid to a coating liquid collector. The cup includes: an outer cup arranged outside the substrate holder; an inner cup arranged on an inner peripheral side of the outer cup below the substrate holder and having a downwardly-extending wall; an exhaust path provided between the outer and inner cups; and the coating liquid collector provided with a plurality of openings through which an exhaust flow passes, the coating liquid collector extending downward below the downwardly-extending wall of the inner cup with a gap between the coating liquid collector and a lower end of the downwardly-extending wall.
    Type: Application
    Filed: July 3, 2023
    Publication date: January 11, 2024
    Inventors: Junghyun KIM, Koshi MUTA, Daiki TAKAHASHI, Kohei KAWAKAMI, Satoshi SHIMMURA, Kenta SHIBASAKI, Shota UEYAMA, Tetsushi MIYAMOTO
  • Publication number: 20240012329
    Abstract: A liquid processing apparatus that applies a coating liquid onto a substrate, includes: a substrate holder that holds and rotates the substrate; a coating liquid supplier that applies the coating liquid to the substrate; a cup provided to surround the substrate; and a solvent supplier that supplies a solvent for the coating liquid to a coating liquid collector. The cup includes: an outer cup arranged outside the substrate holder; an inner cup arranged on an inner peripheral side of the outer cup below the substrate holder and having a downwardly-extending wall; an exhaust path provided between the outer and inner cups; a cylindrical wall portion provided below the inner cup and having an upwardly-opened exhaust port communicating with the exhaust path; and the coating liquid collector arranged below the wall of the inner cup with a gap between the coating liquid collector and a lower end of the wall.
    Type: Application
    Filed: July 3, 2023
    Publication date: January 11, 2024
    Inventors: Junghyun KIM, Koshi MUTA, Daiki TAKAHASHI, Kohei KAWAKAMI, Satoshi SHIMMURA, Kenta SHIBASAKI, Shota UEYAMA, Tetsushi MIYAMOTO
  • Publication number: 20230418166
    Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.
    Type: Application
    Filed: June 23, 2023
    Publication date: December 28, 2023
    Inventors: Yuichiro KUNUGIMOTO, Shota UEYAMA, Akihiro TERAMOTO, Yuta NISHIYAMA, Shinichi HATAKEYAMA
  • Patent number: 11726409
    Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.
    Type: Grant
    Filed: November 9, 2021
    Date of Patent: August 15, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yuichiro Kunugimoto, Shota Ueyama, Akihiro Teramoto, Yuta Nishiyama, Shinichi Hatakeyama
  • Patent number: 11570390
    Abstract: Provided are a solid-state imaging device capable of improving image quality of a captured image even if the pixel size is increased, and an electronic device equipped with the solid-state imaging device. A solid-state imaging device is provided that includes: at least two column areas that perform Analog To Digital (AD) conversion of a pixel signal generated by a pixel; a plurality of vertical signal lines that transfers the pixel signal to the column areas; and a free area in which the plurality of vertical signal lines is not wired, in which two of the vertical signal lines facing each other sandwiching the free area are arranged, and lengths of the two vertical signal lines are substantially equal to each other.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: January 31, 2023
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Shota Ueyama
  • Publication number: 20220171294
    Abstract: A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.
    Type: Application
    Filed: November 9, 2021
    Publication date: June 2, 2022
    Inventors: Yuichiro KUNUGIMOTO, Shota UEYAMA, Akihiro TERAMOTO, Yuta NISHIYAMA, Shinichi HATAKEYAMA
  • Publication number: 20210306588
    Abstract: Provided are a solid-state imaging device capable of improving image quality of a captured image even if the pixel size is increased, and an electronic device equipped with the solid-state imaging device. A solid-state imaging device is provided that includes: at least two column areas that perform Analog To Digital (AD) conversion of a pixel signal generated by a pixel; a plurality of vertical signal lines that transfers the pixel signal to the column areas; and a free area in which the plurality of vertical signal lines is not wired, in which two of the vertical signal lines facing each other sandwiching the free area are arranged, and lengths of the two vertical signal lines are substantially equal to each other.
    Type: Application
    Filed: October 18, 2019
    Publication date: September 30, 2021
    Inventor: SHOTA UEYAMA