Patents by Inventor Shou-Kong Fan
Shou-Kong Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6979868Abstract: The present invention provides a method for reducing-plasma damage to a gate oxide of a metal-oxide semiconductor (MOS) transistor positioned on a substrate of a MOS semiconductor wafer. The method begins with the formation of a dielectric layer covering the MOS transistor on the substrate. An etching process is then performed to form a first contact hole through the dielectric layer to a gate on the surface of the MOS transistor, as well as to form a second contact hole through the dielectric layer to an n-well in the substrate. A bypass circuit, positioned on the dielectric layer and the first and second contact holes, and a fusion area are then formed. The fusion area, electrically connecting with the bypass circuit, also electrically connects with the MOS transistor and the n-well thereafter. Ions produced during the process are thus transferred to the n-well via the conductive wire so as to reduce plasma damage to the gate oxide.Type: GrantFiled: April 18, 2001Date of Patent: December 27, 2005Assignee: United Microelectronics Corp.Inventors: Yi-Fan Chen, Chi-King Pu, Shou-Kong Fan
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Patent number: 6537883Abstract: The present invention provides a method for reducing plasma damage to a gate oxide of a metal-oxide semiconductor (MOS) transistor positioned on a substrate of a MOS semiconductor wafer. The method begins with the formation of a dielectric layer covering the MOS transistor on the substrate. An etching process is then performed to form a first contact hole through the dielectric layer to a gate on the surface of the MOS transistor, as well as to form a second contact hole through the dielectric layer to an n-well in the substrate. A bypass circuit, positioned on the dielectric layer and the first and second contact holes, and a fusion area are then formed. The fusion area, electrically connecting with the bypass circuit, also electrically connects with the MOS transistor and the n-well thereafter. Ions produced during the process are thus transferred to the n-well via the conductive wire so as to reduce plasma damage to the gate oxide.Type: GrantFiled: April 17, 2002Date of Patent: March 25, 2003Assignee: United Microelectronics Corp.Inventors: Yi-Fan Chen, Chi-King Pu, Shou-Kong Fan
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Publication number: 20020153593Abstract: The present invention provides a method for reducing plasma damage to a gate oxide of a metal-oxide semiconductor (MOS) transistor positioned on a substrate of a MOS semiconductor wafer. The method begins with the formation of a dielectric layer covering the MOS transistor on the substrate. An etching process is then performed to form a first contact hole through the dielectric layer to a gate on the surface of the MOS transistor, as well as to form a second contact hole through the dielectric layer to an n-well in the substrate. A bypass circuit, positioned on the dielectric layer and the first and second contact holes, and a fusion area are then formed. The fusion area, electrically connecting with the bypass circuit, also electrically connects with the MOS transistor and the n-well thereafter. Ions produced during the process are thus transferred to the n-well via the conductive wire so as to reduce plasma damage to the gate oxide.Type: ApplicationFiled: April 18, 2001Publication date: October 24, 2002Inventors: Yi-Fan Chen, Chi-King Pu, Shou-Kong Fan
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Publication number: 20020155680Abstract: The present invention provides a method for reducing plasma damage to a gate oxide of a metal-oxide semiconductor (MOS) transistor positioned on a substrate of a MOS semiconductor wafer. The method begins with the formation of a dielectric layer covering the MOS transistor on the substrate. An etching process is then performed to form a first contact hole through the dielectric layer to a gate on the surface of the MOS transistor, as well as to form a second contact hole through the dielectric layer to an n-well in the substrate. A bypass circuit, positioned on the dielectric layer and the first and second contact holes, and a fusion area are then formed. The fusion area, electrically connecting with the bypass circuit, also electrically connects with the MOS transistor and the n-well thereafter. Ions produced during the process are thus transferred to the n-well via the conductive wire so as to reduce plasma damage to the gate oxide.Type: ApplicationFiled: April 17, 2002Publication date: October 24, 2002Inventors: Yi-Fan Chen, Chi-King Pu, Shou-Kong Fan
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Patent number: 6384639Abstract: A method for reducing static power dissipation in a semiconductor device is provided. The method is characterized in that utilizing a simple control device connecting with a MOS device, serving for a drain voltage controller, instead of the conventional voltage supply directly connected with the drain. The control device comprises two input terminals and an output terminal. One of the two input terminals is connected with a voltage supply, the other of the two input terminals is connected with a control signal. The output terminal of the control device is connected to the drain of the MOS device. When the control signal is activated, the output terminal of the control device is grounded and thus the drain is grounded. Thereby, all of the possible leakage paths induced by the drain voltage are inhibited. While the control signal is un-activated, the output terminal of the control device provides a supply voltage to the drain.Type: GrantFiled: November 17, 2000Date of Patent: May 7, 2002Assignee: United Microelectronics Corp.Inventors: Yi-Fan Chen, Shou-Kong Fan
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Patent number: 6159816Abstract: A bipolar transistor includes a passivating layer of material 40 in the base structure 42 that serves to cover the extrinsic base region of the transistor. The passivating layer 40 is formed of a material having a wider bandgap than the base layer 44, and is heavily doped with the same doping type (n or p) as the base layer. The invention is advantageous in that the base contacts 48 of the device are made directly to the passivating layer 40 and are not in direct contact with the base layer 44. This eliminates the need for alloyed contacts and the concomitant reliability problems associated with spiking contacts. In addition, the invention is completely compatible with self-aligned production techniques.Type: GrantFiled: June 7, 1995Date of Patent: December 12, 2000Assignee: TriQuint Semiconductor Texas, Inc.Inventors: Darrell G. Hill, Timothy S. Henderson, William U. Liu, Shou-Kong Fan, Hin-Fai Chau, Damian Costa, Ali Khatibzadeh
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Patent number: 5783966Abstract: This is a method of fabricating a bipolar transistor on a wafer. The method can comprise: forming a doped emitter contact layer 31 on a substrate 30; forming a doped emitter layer 32 on top of the emitter contact layer, the emitter layer doped same conductivity type as the emitter contact layer; forming a doped base epilayer 34 on top of the emitter layer, the base epilayer doped conductivity type opposite of the emitter layer; forming a doped collector epilayer 36, the collector epilayer doped conductivity type opposite of the base layer to form the bipolar transistor; forming an collector contact 38 on top of the collector layer; forming a base contact 40 on top of the base layer; forming a emitter contact 44 on top of the emitter contact layer; and selective etching the emitter layer to produce an undercut 45 beneath the base layer.Type: GrantFiled: January 16, 1997Date of Patent: July 21, 1998Assignee: Texas Instruments IncorporatedInventors: Darrell Hill, Shou-Kong Fan, Ali Khatibzadeh
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Patent number: 5700701Abstract: This is a method of fabricating a bipolar transistor on a wafer. The method can comprise: forming a doped emitter contact layer 31 on a substrate 30; forming a doped emitter layer 32 on top of the emitter contact layer, the emitter layer doped same conductivity type as the emitter contact layer; forming a doped base epilayer 34 on top of the emitter layer, the base epilayer doped conductivity type opposite of the emitter layer; forming a doped collector epilayer 36, the collector epilayer doped conductivity type opposite of the base layer to form the bipolar transistor; forming an collector contact 38 on top of the collector layer; forming a base contact 40 on top of the base layer; forming a emitter contact 44 on top of the emitter contact layer; and selective etching the emitter layer to produce an undercut 45 beneath the base layer.Type: GrantFiled: June 7, 1995Date of Patent: December 23, 1997Assignee: Texas Instruments IncorporatedInventors: Darrell Hill, Shou-Kong Fan, Ali Khatibzadeh
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Patent number: 5552617Abstract: A bipolar transistor includes a passivating layer of material 40 in the base structure 42 that serves to cover the extrinsic base region of the transistor. The passivating layer 40 is formed of a material having a wider bandgap than the base layer 44, and is heavily doped with the same doping type (n or p) as the base layer. The invention is advantageous in that the base contacts 48 of the device are made directly to the passivating layer 40 and are not in direct contact with the base layer 44. This eliminates the need for alloyed contacts and the concomitant reliability problems associated with spiking contacts. In addition, the invention is completely compatible with self-aligned production techniques.Type: GrantFiled: August 16, 1995Date of Patent: September 3, 1996Assignee: Texas Instruments IncorporatedInventors: Darrell G. Hill, Timothy S. Henderson, William U. Liu, Shou-Kong Fan, Hin-Fai Chau, Damian Costa, Ali Khatibzadeh
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Patent number: 5552667Abstract: A method and apparatus for producing photoluminescence emissions (68) from thin CaF.sub.2 films grown on either silicon or silicon/aluminum substrate shows narrow emission linewidth and high emission intensities for CaF.sub.2 with thickness as low as 0,2 .mu.m, The preferred embodiment is doped with a rare-earth such as Nd.Type: GrantFiled: April 17, 1995Date of Patent: September 3, 1996Assignee: Texas Instrument IncorporatedInventors: Chin-Chen Cho, Tsen H. Lin, Shou-Kong Fan, Walter M. Duncan
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Patent number: 5455440Abstract: Generally, and in one form of the invention, a method is disclosed for reducing base-to-emitter leakage in a bipolar transistor having an active region 22 bounded by an isolation implant boundary 24, said method comprising arranging an emitter contact 26 and a base contact 36 such that at a crossing of the contacts over the implant boundary, a leakage current between the contacts along the boundary is limited by a necessity to transit the thickness of a layer of material, and whereby said transistor exhibits improved gain, noise performance, and reliability.Type: GrantFiled: May 17, 1994Date of Patent: October 3, 1995Assignee: Texas Instruments IncorporatedInventors: Timothy S. Henderson, Shou-kong Fan, William U. Liu
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Patent number: 5434091Abstract: This is a method of fabricating a bipolar transistor on a wafer. The method can comprise: forming a doped emitter contact layer 31 on a substrate 30; forming a doped emitter layer 32 on top of the emitter contact layer, the emitter layer doped same conductivity type as the emitter contact layer; forming a doped base epilayer 34 on top of the emitter layer, the base epilayer doped conductivity type opposite of the emitter layer; forming a doped collector epilayer 36, the collector epilayer doped conductivity type opposite of the base layer to form the bipolar transistor; forming an collector contact 38 on top of the collector layer; forming a base contact 40 on top of the base layer; forming a emitter contact 44 on top of the emitter contact layer; and selective etching the emitter layer to produce an undercut 45 beneath the base layer.Type: GrantFiled: October 7, 1994Date of Patent: July 18, 1995Assignee: Texas Instruments IncorporatedInventors: Darrell Hill, Shou-Kong Fan, Ali Khatibzadeh
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Patent number: 5330932Abstract: In one form of the invention, a method is disclosed for removing portions of successive layers of GaAs 34 and GaInP 32 comprising the steps of: performing an anisotropic reactive ion etch on the GaAs layer; and performing an isotropic wet etch on the GaInP layer, whereby a mesa formed as a result of the reactive ion etch and the wet etch has substantially vertical sidewalls, and further whereby GaInP/GaAs structures having dimensions of less than approximately 3.0 .mu.m may be fabricated.Type: GrantFiled: December 31, 1992Date of Patent: July 19, 1994Assignee: Texas Instruments IncorporatedInventors: William U. Liu, Shou-Kong Fan, Timothy S. Henderson, Darrell G. Hill
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Patent number: 5306385Abstract: A method and apparatus for producing photoluminescence emissions (68) from thin CaF.sub.2 films grown on either silicon or silicon/aluminum substrate shows narrow emission linewidth and high emission intensities for CaF.sub.2 with thickness as low as 0.2 .mu.m. The preferred embodiment is doped with a rare-earth such as Nd.Type: GrantFiled: September 30, 1992Date of Patent: April 26, 1994Assignee: Texas Instruments IncorporatedInventors: Chih-Chen Cho, Tsen H. Lin, Shou-Kong Fan, Walter M. Duncan
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Patent number: 5298439Abstract: A method of making a transistor comprising the steps of providing a structure having a collector layer 3, a base layer 5, and an emitter layer 7, one atop the other, forming a contact 9 on the emitter layer, removing a portion of the emitter layer to leave a relatively thick mesa region 13 with the contact thereon, a surrounding relatively thin ledge region 11 and an exposed portion of the base layer 5 and forming a contact on the exposed portion of the base layer 5. The emitter layer 7 is preferably GaInP, and preferably Ga.sub.x In.sub.1-x P, wherein x is in the range of approximately 0.50 to 0.52, and the base 5 is preferably GaAs. The ledge portion 11 has a thickness of about 700 Angstroms.Type: GrantFiled: December 31, 1992Date of Patent: March 29, 1994Assignee: Texas Instruments IncorporatedInventors: William U.-C. Liu, Shou-Kong Fan