Abstract: The present invention discloses a control method for a multi-phase winding deflection scanning device, comprising: defining a rectangular coordinate system where deflection scanning tracks are located; sequentially decomposing the deflection scanning tracks into finite point rectangular coordinate data; translating the rectangular coordinate data into corresponding point resultant exciting current data; decomposing the resultant exciting current data into n-phase winding exciting current data; and translating the n-phase winding exciting current data into corresponding n-phase control instruction electrical signals and outputting same to a drive power supply, amplifying the output electrical signals by the drive power supply and providing same for the multi-phase winding deflection scanning device as exciting current.

Abstract: The present invention relates to a deflection scanning device with a multi-phase winding and a deflection scanning system. The deflection scanning device is of an axisymmetric structure, and comprises a ferromagnetic frame and a deflection scanning winding, wherein the inner side of the ferromagnetic frame is longitudinally provided with 2aw wire slots equally distributed along the circumference; and the deflection scanning winding comprises a w-phase winding, wherein the axis of the each phase winding is symmetrically distributed. The deflection scanning system comprises a deflection scanning device, a drive power supply unit and, a central, control unit. The deflection scanning device of the present invention can improve the uniformity of the magnetic induction intensity in the charged particle beam channel, and then reduce the defocusing effect and improve the scanning accuracy.

Abstract: The present invention discloses a control method for a multi-phase winding deflection scanning device, comprising: defining a rectangular coordinate system where deflection scanning tracks are located; sequentially decomposing the deflection scanning tracks into finite point rectangular coordinate data; translating the rectangular coordinate data into corresponding point resultant exciting current data; decomposing the resultant exciting current data into n-phase winding exciting current data; and translating the n-phase winding exciting current data into corresponding n-phase control instruction electrical signals and outputting same to a drive power supply, amplifying the output electrical signals by the drive power supply and providing same for the multi-phase winding deflection scanning device as exciting current.

Abstract: The present invention relates to a deflection scanning device with a multi-phase winding and a deflection scanning system. The deflection scanning device is of an axisymmetric structure, and comprises a ferromagnetic frame and a deflection scanning winding, wherein the inner side of the ferromagnetic frame is longitudinally provided with 2aw wire slots equally distributed along the circumference; and the deflection scanning winding comprises a w-phase winding, wherein the axis of the each phase winding is symmetrically distributed. The deflection scanning system comprises a deflection scanning device, a drive power supply unit and, a central, control unit. The deflection scanning device of the present invention can improve the uniformity of the magnetic induction intensity in the charged particle beam channel, and then reduce the defocusing effect and improve the scanning accuracy.