Patents by Inventor Shouri Mokuo

Shouri Mokuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing vessel for a wafer washing system
    Patent number: 5327921
    Abstract: A processing vessel suitable for use with a washing system intended to wash a plurality of wafers. The processing vessel includes a washing solution supply source, a circulation pump, a filter, a main vessel portion provided with inlets in the bottom thereof, a boat for holding the plurality of wafers in the center area of the main vessel portion and a flow control assembly arranged between the inlets and the wafers. The flow control assembly includes a scattering plate for scattering washing solution, which is introduced into the main vessel portion through the inlets, in the horizontal direction, and guiding passages through which the washing solution introduced through the inlets is made to have a substantially laminar flow and is guided into the center area of the main vessel portion. The guiding passages are formed by intervals between side plates and the scattering plate and by a plurality of apertures in the scattering plate.
    Type: Grant
    Filed: March 4, 1993
    Date of Patent: July 12, 1994
    Assignees: Tokyo Electron Limited, Tokyo Electron Saga Limited
    Inventors: Shouri Mokuo, Kenji Yokomizo, Osamu Tanaka