Abstract: A film forming apparatus for forming a film on an object includes: a processing container; gas supply means, having gas jet ports, respectively; a holding means for holding the object; a drive mechanism for moving the holding means relative to the gas jet ports; and a control means which, when repeating P times a cycle, consisting of a supply period for supplying a gas and a supply stop period during which the supply of the gas is stopped, performs control so that as viewed from the center of the object, a gas supply starting position is sequentially shifted in the circumferential direction of the object for every cycle in such a manner that the entire circumference of the object to be processed is divided into K segments (K=P), K being an arbitrary division number, and the gas supply starting position is shifted by one segment for every cycle.

Abstract: A film forming apparatus for forming a film on an object includes: a processing container; gas supply means, having gas jet ports, respectively; a holding means for holding the object; a drive mechanism for moving the holding means relative to the gas jet ports; and a control means which, when repeating P times a cycle, consisting of a supply period for supplying a gas and a supply stop period during which the supply of the gas is stopped, performs control so that as viewed from the center of the object, a gas supply starting position is sequentially shifted in the circumferential direction of the object for every cycle in such a manner that the entire circumference of the object to be processed is divided into K segments (K=P), K being an arbitrary division number, and the gas supply starting position is shifted by one segment for every cycle.

Abstract: A wafer transferring method for transferring wafers between a cassette and a boat having grooves to hold the wafers, comprises the steps of providing an identification mechanism for positional alignment on the boat in advance, detecting the identification mechanism, and aligning the boat to a predetermined position based on a detection result and transferring the wafers from the cassette to the boat. A wafer transferring apparatus comprises a loading device for extracting wafers from a cassette and transferring the wafers onto a boat, a detection device for detecting an identification section provided on the boat in order to identify a wafer transferring position on the boat, and a control device for acquiring the wafer transferring position on the boat based on a detection result attained from the detection device and controlling a mutual position between the boat and the cassette to come to a predetermined position.

Abstract: For saving the heat energy required for alcohol production, processes are provided for subjecting rootstocks (Rhizomes) to enzymatic hydrolysis without conventional cooking with steam in order to obtain a high concentration saccharified material which is then subjected to alcohol fermentation.The first process comprises dipping raw rootstocks in a dilute acid for the purpose of sterilization, then crushing the sterilized rootstocks, macerating the crushed rootstocks, dextrinizing the macerated material by the action of bacterial .alpha.-amylase and adding to the dextrinized material glucoamylase and yeast for alcohol fermentation to effect saccharification thereof and subsequent alcohol fermentation.The second process comprises sterilizing rootstocks with a dilute acid and then crushing it, followed by adding blended maceration enzymes to effect maceration amd saccharification with subsequent alcohol fermentation by yeast.

Abstract: An apparatus for treating raw material comprises a mixing chamber having fuel and air inlets for admitting therein fuel and air which are mixed to produce a combustible mixture. A combustion chamber receives the combustible mixture and burns the same to evolve hot products of combustion which are fed directly into an adjoining conditioning chamber. Additional gas is supplied to the conditioning chamber and mixed with the products of combustion to form a conditioned treating gas having a prescribed temperature and composition. To promote rapid and uniform mixing of the gases and hence form a uniform treating gas, the conditioning chamber is connected directly to and has a volume one and one-half to six times greater than that of the combustion chamber. A treating chamber disposed downstream from the conditioning chamber receives both the preconditioned treating gas and the raw material to be treated and the raw material is acted thereon by the treating gas while temporarily stored in the treating chamber.

Abstract: A method for treating raw material comprises mixing fuel and air in a mixing chamber to produce a combustible mixture, ejecting the combustible mixture into a combustion chamber and burning it therein to evolve hot products of combustion which are fed directly into an adjoining conditioning chamber. Additional gas is supplied to the conditioning chamber and mixed with the products of combustion to form a conditioned treating gas having a prescribed temperature and composition. To promote rapid and uniform mixing of the gases and hence form a uniform treating gas, the conditioning chamber is connected directly to and has a volume 11/2 to 6 times greater than that of the combustion chamber. A treating chamber disposed downstream from the conditioning chamber receives both the preconditioned treating gas and the raw material to be treated and the raw material is acted thereon by the treating gas while temporarily stored in the treating chamber.

Abstract: Coal is continuously converted into a saturated hydrocarbon gas containing substantially no unsaturated hydrocarbon and having a high calorific value and a uniform composition by the operations of: providing a first treating gas having a predetermined temperature, pressure and composition, by mixing, in a first conditioning chamber, a first substantially inert burnt gas which has been prepared by burning a mixture of a fuel and air, containing therein 2% by volume or less of free oxygen, with steam and, if necessary, hydrogen gas; thermally cracking, in a first treating chamber, the coal particles with the first treating gas while fluidizing said coal particles; separately providing a second treating gas having a predetermined temperature, pressure and composition by mixing, in a second conditioning chamber, a second substantially inert burnt gas which has been prepared by burning a fuel, and contains therein 2% by volume or less of free hydrogen gas, with hydrogen gas and, if necessary, an additional gas; hy

Abstract: A nitrogenous ingredient is eliminated from solid fuel, for example, coal, by treating in a treating chamber, the coal with a treating gas having a predetermined temperature and composition at a temperature of 650.degree. to 1200.degree.C, the treating gas being prepared by uniformly mixing, in a conditioning chamber located upstream from the treating chamber, a predetermined amount of steam or water and hydrogen gas or a mixture gas containing at least 30% by volume of hydrogen gas together with an inert burnt gas containing at most 2% by volume of oxygen gas.