Abstract: A curable composition includes an epoxy monomer component and an aniline-based hardener. The epoxy monomer component is a first component formed from a first epoxy monomer represented by Formula (I), or a second component including the first epoxy monomer represented by Formula (I) and a second epoxy monomer different from the first epoxy monomer represented by Formula (I), wherein each of the substituents in Formula (I) is given the definitions as set forth in the Specification and Claims. Based on 100 wt % of the epoxy monomer component, an amount of the first epoxy monomer represented by Formula (I) is not smaller than 25 wt % and less than 100 wt % and an amount of the second epoxy monomer is greater than 0% and not greater than 75 wt %. A cured product formed from the curable composition, and a method for encapsulating a semiconductor device using the curable composition are also provided.

Abstract: An improved method for reworking photoresist is provided for decreasing cycle time of photoresist reworking process. A semiconductor substrate with an underlying layer is provided for patterning. A photoresist pattern is formed on the underlying layer. A photoresist reworking process is performed after an after-development-inspection (ADI) is performed. The photoresist reworking method comprises the following steps. The semiconductor substrate is placed in organic stripper for removing the most portion of the photoresist pattern. Subsequently, the semiconductor substrate is placed in a single-wafer processor and an UV/O3 dry ashing is then performed to remove completely the residual photoresist pattern on the underlying layer. A new photoresist layer is deposited on the underlying layer after the photoresist pattern removed completely.