Abstract: A package structure is provided. The package structure includes a first die and a second die, a dielectric layer, a bridge, an encapsulant, and a redistribution layer structure. The dielectric layer is disposed on the first die and the second die. The bridge is electrically connected to the first die and the second die, wherein the dielectric layer is spaced apart from the bridge. The encapsulant is disposed on the dielectric layer and laterally encapsulating the bridge. The redistribution layer structure is disposed over the encapsulant and the bridge. A top surface of the bridge is in contact with the RDL structure.

Abstract: An improved method for reworking photoresist is provided for decreasing cycle time of photoresist reworking process. A semiconductor substrate with an underlying layer is provided for patterning. A photoresist pattern is formed on the underlying layer. A photoresist reworking process is performed after an after-development-inspection (ADI) is performed. The photoresist reworking method comprises the following steps. The semiconductor substrate is placed in organic stripper for removing the most portion of the photoresist pattern. Subsequently, the semiconductor substrate is placed in a single-wafer processor and an UV/O3 dry ashing is then performed to remove completely the residual photoresist pattern on the underlying layer. A new photoresist layer is deposited on the underlying layer after the photoresist pattern removed completely.