Patents by Inventor Shu Fang Fu
Shu Fang Fu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11990474Abstract: A method of fabricating a semiconductor device includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method further includes forming a first source/drain feature between the gate structure and the first edge structure. The method further includes forming a second source/drain feature between the gate structure and the second edge structure, wherein a distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature. The method further includes implanting a buried channel in the semiconductor strip, wherein the buried channel is entirely below a top-most surface of the semiconductor strip, a maximum depth of the buried channel is less than a maximum depth of the first source/drain feature, and a dopant concentration of the buried channel is highest under the gate structure.Type: GrantFiled: January 9, 2023Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Patent number: 11552076Abstract: A method of fabricating a semiconductor device includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method further includes forming a first source/drain feature between the gate structure and the first edge structure. The method further includes forming a second source/drain feature between the gate structure and the second edge structure, wherein a distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature. The method further includes implanting a buried channel in the semiconductor strip, wherein the buried channel is entirely below a top-most surface of the semiconductor strip, a maximum depth of the buried channel is less than a maximum depth of the first source/drain feature, and a dopant concentration of the buried channel is highest under the gate structure.Type: GrantFiled: July 24, 2020Date of Patent: January 10, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Patent number: 11264486Abstract: The present disclosure provides a semiconductor device, including a substrate, a fin over the substrate, wherein the fin extends along a primary direction, a gate over the fin, the gate extends along the secondary direction orthogonal to the primary direction, a first conductive contact over the gate, and a conductive routing layer over the first conductive contact, wherein at least a portion of the fin is free from the coverage of a vertical projection of the conductive routing layer.Type: GrantFiled: January 16, 2020Date of Patent: March 1, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chung-Hao Chu, Chia-Chung Chen, Shu Fang Fu, Chi-Feng Huang, Victor Chiang Liang
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Publication number: 20210226043Abstract: The present disclosure provides a semiconductor device, including a substrate, a fin over the substrate, wherein the fin extends along a primary direction, a gate over the fin, the gate extends along the secondary direction orthogonal to the primary direction, a first conductive contact over the gate, and a conductive routing layer over the first conductive contact, wherein at least a portion of the fin is free from the coverage of a vertical projection of the conductive routing layer.Type: ApplicationFiled: January 16, 2020Publication date: July 22, 2021Inventors: CHUNG-HAO CHU, CHIA-CHUNG CHEN, SHU FANG FU, CHI-FENG HUANG, VICTOR CHIANG LIANG
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Publication number: 20200357799Abstract: A method of fabricating a semiconductor device includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method further includes forming a first source/drain feature between the gate structure and the first edge structure. The method further includes forming a second source/drain feature between the gate structure and the second edge structure, wherein a distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature. The method further includes implanting a buried channel in the semiconductor strip, wherein the buried channel is entirely below a top-most surface of the semiconductor strip, a maximum depth of the buried channel is less than a maximum depth of the first source/drain feature, and a dopant concentration of the buried channel is highest under the gate structure.Type: ApplicationFiled: July 24, 2020Publication date: November 12, 2020Inventors: Shu Fang FU, Chi-Feng HUANG, Chia-Chung CHEN, Victor Chiang LIANG, Fu-Huan TSAI
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Patent number: 10804228Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.Type: GrantFiled: May 1, 2019Date of Patent: October 13, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
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Patent number: 10741553Abstract: A method includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method includes forming a first source/drain feature between the gate structure and the first edge structure; and a second source/drain feature between the gate structure and the second edge structure. A distance between the gate structure and the first source/drain feature is from about 1.5 to about 4.5 times greater than a distance between the gate structure and the second source/drain feature. The method includes implanting a buried channel in the semiconductor strip. A top surface of the buried channel is spaced from a top surface of the semiconductor strip. A bottom surface of the buried channel is closer to the top surface of the semiconductor strip than a bottom surface of the first source/drain feature. A dopant concentration of the buried channel is highest under the gate structure.Type: GrantFiled: September 27, 2019Date of Patent: August 11, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Publication number: 20200027878Abstract: A method includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method includes forming a first source/drain feature between the gate structure and the first edge structure; and a second source/drain feature between the gate structure and the second edge structure. A distance between the gate structure and the first source/drain feature is from about 1.5 to about 4.5 times greater than a distance between the gate structure and the second source/drain feature. The method includes implanting a buried channel in the semiconductor strip. A top surface of the buried channel is spaced from a top surface of the semiconductor strip. A bottom surface of the buried channel is closer to the top surface of the semiconductor strip than a bottom surface of the first source/drain feature. A dopant concentration of the buried channel is highest under the gate structure.Type: ApplicationFiled: September 27, 2019Publication date: January 23, 2020Inventors: Shu Fang FU, Chi-Feng HUANG, Chia-Chung CHEN, Victor Chiang LIANG, Fu-Huan TSAI
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Patent number: 10453809Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.Type: GrantFiled: April 24, 2017Date of Patent: October 22, 2019Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
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Patent number: 10431582Abstract: A semiconductor device includes a fin extending from a substrate, a first source/drain feature, a second source/drain feature, and a gate structure on the fin. A distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature.Type: GrantFiled: September 2, 2016Date of Patent: October 1, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Publication number: 20190259715Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.Type: ApplicationFiled: May 1, 2019Publication date: August 22, 2019Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
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Patent number: 10304945Abstract: A method for forming a semiconductor device is provided. The method includes forming a gate structure over a fin structure. The method includes forming a hard mask layer over the gate structure. The hard mask layer has a first opening spaced apart from a first side of the gate structure by a first distance and a second opening spaced apart from a second side of the gate structure by a second distance that is different from the first distance. The method also includes removing the fin structure not covered by the hard mask layer. The method further includes forming a first source/drain feature in the fin structure and filling the first opening of the hard mask layer. The method further includes forming a second source/drain feature in the fin structure and filling the second opening of the hard mask layer.Type: GrantFiled: March 24, 2017Date of Patent: May 28, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Victor Chiang Liang, Chia-Chung Chen, Chi-Feng Huang, Shu-Fang Fu
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Publication number: 20180277662Abstract: A method for forming a semiconductor device is provided. The method includes forming a gate structure over a fin structure. The method includes forming a hard mask layer over the gate structure. The hard mask layer has a first opening spaced apart from a first side of the gate structure by a first distance and a second opening spaced apart from a second side of the gate structure by a second distance that is different from the first distance. The method also includes removing the fin structure not covered by the hard mask layer. The method further includes forming a first source/drain feature in the fin structure and filling the first opening of the hard mask layer. The method further includes forming a second source/drain feature in the fin structure and filling the second opening of the hard mask layer.Type: ApplicationFiled: March 24, 2017Publication date: September 27, 2018Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Victor Chiang LIANG, Chia-Chung CHEN, Chi-Feng HUANG, Shu-Fang FU
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Publication number: 20170345821Abstract: A semiconductor device includes a fin extending from a substrate, a first source/drain feature, a second source/drain feature, and a gate structure on the fin. A distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature.Type: ApplicationFiled: September 2, 2016Publication date: November 30, 2017Inventors: Shu Fang FU, Chi-Feng HUANG, Chia-Chung CHEN, Victor Chiang LIANG, Fu-Huan TSAI
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High voltage metal-oxide-metal (HV-MOM) device, HV-MOM layout and method of making the HV-MOM device
Patent number: 9825118Abstract: A high voltage metal-oxide-metal (HV-MOM) layout includes a first conductive element. The first element includes a first leg extending in a first direction, a second leg connected to the first leg, the second leg extending in a second direction different from the first direction, and a third leg connected to the second leg, the third leg extending in a first direction. The HV-MOM layout further includes a second conductive element separated from the first conductive element by a space. The second conductive element includes a serpentine structure, wherein the serpentine structure is enclosed on at least three sides by the first conductive element. The HV-MOM layout further includes a dielectric material filling the space between the first conductive element and the second conductive element.Type: GrantFiled: March 16, 2016Date of Patent: November 21, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chia-Chung Chen, Shu Fang Fu, Chang-Sheng Liao -
Patent number: 9780089Abstract: A bipolar junction transistor includes an emitter, a base contact, a collector and a shallow trench isolation. The base contact has two base fingers that form a corner to receive the emitter. The collector has two collector fingers extending along the base fingers of the base contact. The shallow trench isolation is disposed in between the emitter and the base contact and in between the base contact and the collector.Type: GrantFiled: October 31, 2016Date of Patent: October 3, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Han-Min Tsai, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Hsiao-Chun Lee, Shou-Chun Chou, Shu-Fang Fu
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Publication number: 20170229406Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.Type: ApplicationFiled: April 24, 2017Publication date: August 10, 2017Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
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Patent number: 9633956Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.Type: GrantFiled: September 21, 2015Date of Patent: April 25, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
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Publication number: 20170047323Abstract: A bipolar junction transistor includes an emitter, a base contact, a collector and a shallow trench isolation. The base contact has two base fingers that form a corner to receive the emitter. The collector has two collector fingers extending along the base fingers of the base contact. The shallow trench isolation is disposed in between the emitter and the base contact and in between the base contact and the collector.Type: ApplicationFiled: October 31, 2016Publication date: February 16, 2017Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Han-Min TSAI, Chi-Feng HUANG, Chia-Chung CHEN, Victor Chiang LIANG, Hsiao-Chun LEE, Shou-Chun CHOU, Shu-Fang FU
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Patent number: 9484408Abstract: A bipolar junction transistor includes an emitter, a base contact, a collector and a shallow trench isolation. The base contact has two base fingers that form a corner to receive the emitter. The collector has two collector fingers extending along the base fingers of the base contact. The shallow trench isolation is disposed in between the emitter and the base contact and in between the base contact and the collector.Type: GrantFiled: July 30, 2015Date of Patent: November 1, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Han-Min Tsai, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Hsiao-Chun Lee, Shou-Chun Chou, Shu-Fang Fu