Patents by Inventor Shu Ming Yeh

Shu Ming Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11114331
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a trench in a substrate; forming a pad layer adjacent to two sides of trench; forming a dielectric layer to fill the trench; and performing a dry etching process to remove the pad layer and part of the dielectric layer to form a shallow trench isolation (STI). Preferably, the dry etching process comprises a non-plasma etching process.
    Type: Grant
    Filed: June 4, 2019
    Date of Patent: September 7, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hao-Hsuan Chang, Hung-Chun Lee, Shu-Ming Yeh, Ting-An Chien, Bin-Siang Tsai
  • Publication number: 20200350199
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a trench in a substrate; forming a pad layer adjacent to two sides of trench; forming a dielectric layer to fill the trench; and performing a dry etching process to remove the pad layer and part of the dielectric layer to form a shallow trench isolation (STI). Preferably, the dry etching process comprises a non-plasma etching process.
    Type: Application
    Filed: June 4, 2019
    Publication date: November 5, 2020
    Inventors: Hao-Hsuan Chang, Hung-Chun Lee, Shu-Ming Yeh, Ting-An Chien, Bin-Siang Tsai
  • Patent number: 9793174
    Abstract: A fin field effect transistor (FinFET) on a silicon-on-insulator and method of forming the same are provided in the present invention. The FinFET includes first fin structure, second fin structure and an insulating layer. The first fin structure and the second fin structure are disposed on a substrate. The insulating layer covers the first fin structure and the second fin structure and exposes a first portion of the first fin structure and a second portion of the second fin structure. The first fin structure has a first height and the second fin structure has a second height different from the first height, and a top surface of the first fin structure and a top surface of the second fin structure are at different levels.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: October 17, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ping-Wei Huang, Yu-Ren Wang, Keng-Jen Lin, Shu-Ming Yeh
  • Patent number: 9418853
    Abstract: The present invention provides a method for forming a stacked layer structure, including: first, a recess is provided, next, an oxide layer is formed in the recess, where the oxide layer has a thickness T1, a high-k layer is formed on the oxide layer, a barrier layer is formed on the high-k layer, a silicon layer is then formed on the barrier layer, afterwards, an annealing process is performed on the silicon layer, so as to form an oxygen-containing layer between the silicon layer and the barrier layer, where the oxide layer has a thickness T2 after the annealing process is performed, and satisfies the relationship: (T2?T1)/T1?0.05, and the silicon layer and the oxygen-containing layer are removed.
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: August 16, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shao-Wei Wang, Keng-Jen Lin, Yu-Tung Hsiao, Shu-Ming Yeh
  • Publication number: 20160225872
    Abstract: A semiconductor structure with a multilayer gate oxide is provided. The structure includes a substrate. A multilayer gate oxide is disposed on the substrate, wherein the multilayer gate oxide includes a first gate oxide and a second gate oxide. The first gate oxide contacts the substrate and the second gate oxide is disposed on and contacts the first gate oxide. The second gate oxide is hydrophilic. The first gate oxide is formed by a thermal oxidation process. The second gate oxide is formed by a chemical treatment.
    Type: Application
    Filed: January 30, 2015
    Publication date: August 4, 2016
    Inventors: Shao-Wei Wang, Shu-Ming Yeh, Yu-Tung Hsiao
  • Patent number: 9406772
    Abstract: A semiconductor structure with a multilayer gate oxide is provided. The structure includes a substrate. A multilayer gate oxide is disposed on the substrate, wherein the multilayer gate oxide includes a first gate oxide and a second gate oxide. The first gate oxide contacts the substrate and the second gate oxide is disposed on and contacts the first gate oxide. The second gate oxide is hydrophilic. The first gate oxide is formed by a thermal oxidation process. The second gate oxide is formed by a chemical treatment.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: August 2, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shao-Wei Wang, Shu-Ming Yeh, Yu-Tung Hsiao
  • Publication number: 20110224481
    Abstract: A spheno-temporal bone conduction communication equipment and/or hearing aid includes a system device, a bone skin conduction oscillator and a carrier device for supporting said abovementioned devices. The carrier device has a structural body, and the structural body allows the supported bone skin conduction oscillator in close contact with the spheno-temporal bone. The bone skin conduction oscillator contains a transducer, and the transducer converts an electrical signal into an acoustic oscillating wave and transmits the acoustic oscillating wave into the inner ear via spheno-temporal bone, or receives an acoustic oscillating wave produced by vibration of the skull when speaking and converts it into an electrical signal.
    Type: Application
    Filed: October 10, 2009
    Publication date: September 15, 2011
    Applicant: NEOVICTORY TECHNOLOGY CO., LTD.
    Inventors: Shio-Shiin Lee, Shu-Ming Yeh
  • Publication number: 20090216445
    Abstract: An integrated satellite navigation system is disclosed. The system comprises a navigation satellite device and a head up display. The navigation satellite device generates navigation information. The head up display retrieves the navigation information from the navigation satellite device and projects a navigation interface using a projection device thereof to display the navigation information.
    Type: Application
    Filed: December 30, 2008
    Publication date: August 27, 2009
    Applicant: ASUSTek Computer Inc.
    Inventors: Shu Ming Yeh, Kuang-Ting Cheng