Patents by Inventor Shu Shing Lin

Shu Shing Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for preventing contamination in a hot plate oven
    Patent number: 6297480
    Abstract: A method and an apparatus for preventing particle contamination in a hot plate oven for curing a coating layer on a wafer surface are disclosed.
    Type: Grant
    Filed: December 22, 2000
    Date of Patent: October 2, 2001
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
    Inventors: Liang Huang Liu, Shu Shing Lin