Patents by Inventor Shu Tong Chang

Shu Tong Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942546
    Abstract: A method includes forming an interfacial layer over a substrate; forming a quasi-antiferroelectric (QAFE) layer over the interfacial layer, in which forming the QAFE layer comprises performing an atomic layer deposition (ALD) cycle, and the ALD cycle includes performing a first sub-cycle for X time(s), in which the first sub-cycle comprises providing a Zr-containing precursor; performing a second sub-cycle for Y time(s), in which the second sub-cycle comprises providing a Hf-containing precursor; and performing a third sub-cycle for Z time(s), in which the third sub-cycle comprises providing a Zr-containing precursor, and in which X+Z is at least three times Y; and forming a gate electrode over the QAFE layer.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: March 26, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, NATIONAL TAIWAN NORMAL UNIVERSITY
    Inventors: Kuan-Ting Chen, Shu-Tong Chang, Min-Hung Lee
  • Publication number: 20230363170
    Abstract: A method includes forming a semiconductor layer over a substrate; depositing a first ferroelectric layer over a channel region of the semiconductor layer; depositing a first dielectric layer over the first ferroelectric layer; depositing a second ferroelectric layer over the first dielectric layer; depositing a gate metal layer over the second ferroelectric layer; patterning the gate metal layer, the second ferroelectric layer, the first dielectric layer, and the first ferroelectric layer to form a gate structure; and forming source/drain regions in the semiconductor layer and on opposite sides of the gate structure.
    Type: Application
    Filed: May 9, 2022
    Publication date: November 9, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, National Taiwan Normal University
    Inventors: Kuan-Ting CHEN, Chun-Yu LIAO, Kuo-Yu HSIANG, Yun-Fang CHUNG, Min-Hung LEE, Shu-Tong CHANG
  • Publication number: 20220359762
    Abstract: A semiconductor device includes a substrate, a gate structure over the substrate, and source/drain regions in the substrate and on opposite sides of the gate structure. The gate structure includes an interfacial layer, a quasi-antiferroelectric (QAFE) layer over the interfacial layer, and a gate electrode over the QAFE layer. The QAFE layer includes Hf1?xZrxO2, in which x is greater than 0.5 and is lower than 1.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 10, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, National Taiwan Normal University
    Inventors: Kuan-Ting CHEN, Shu-Tong CHANG, Min-Hung LEE
  • Publication number: 20220181494
    Abstract: A method includes forming an interfacial layer over a substrate; forming a quasi-antiferroelectric (QAFE) layer over the interfacial layer, in which forming the QAFE layer comprises performing an atomic layer deposition (ALD) cycle, and the ALD cycle includes performing a first sub-cycle for X time(s), in which the first sub-cycle comprises providing a Zr-containing precursor; performing a second sub-cycle for Y time(s), in which the second sub-cycle comprises providing a Hf-containing precursor; and performing a third sub-cycle for Z time(s), in which the third sub-cycle comprises providing a Zr-containing precursor, and in which X+Z is at least three times Y; and forming a gate electrode over the QAFE layer.
    Type: Application
    Filed: December 3, 2020
    Publication date: June 9, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, National Taiwan Normal University
    Inventors: Kuan-Ting Chen, Shu-Tong Chang, Min-Hung Lee
  • Publication number: 20180190853
    Abstract: A Heterojunction with Intrinsic Thin layer (HIT) solar cell has a crystalline Si substrate, an intrinsic amorphous Si layer, a doped amorphous Si layer, a transparent conductive layer and two electrode layers. The intrinsic amorphous Si layer disposed between the doped amorphous Si layer and the crystalline silicon substrate contacts the doped amorphous Si layer and the crystalline silicon substrate. Each of the intrinsic amorphous Si layer and the doped amorphous Si layer has the thickness less than 50 nm. The intrinsic amorphous Si layer and the doped amorphous Si layer are both made by electron beam evaporation. The transparent conductive layer is formed on the doped amorphous Si layer. The two electrode layers are formed on the transparent conductive layer and the crystalline silicon substrate respectively. The crystalline silicon substrate is disposed between the two electrode layers.
    Type: Application
    Filed: December 19, 2017
    Publication date: July 5, 2018
    Inventors: MIN-HUNG LEE, CHIH-YU CHEN, GING-RUE LIOU, SHU-TONG CHANG
  • Patent number: 7307004
    Abstract: A method with a mechanically strained silicon for enhancing the speeds of integrated circuits or devices is disclosed. The method with a mechanically strained silicon for enhancing the speeds of integrated circuits or devices includes the following steps: (a) providing a substrate, (b) fixing the substrate, (c) applying a stress upon the substrate, and (d) inducing a strain in one of a device and a circuit by stressing the substrate.
    Type: Grant
    Filed: November 5, 2004
    Date of Patent: December 11, 2007
    Assignee: National Taiwan University
    Inventors: Cheng-Ya Yu, Sun-Rong Jan, Shu-Tong Chang, Chee-Wee Liu
  • Patent number: 7091522
    Abstract: A MOSFET structure utilizing strained silicon carbon alloy and fabrication method thereof. The MOSFET structure includes a substrate, a graded SiGe layer, a relaxed buffer layer, a strained silicon carbon alloy channel layer, a gate dielectric layer, a polysilicon gate electrode (or metal gate electrode) and a source/drain region.
    Type: Grant
    Filed: March 4, 2004
    Date of Patent: August 15, 2006
    Assignee: Industrial Research Technology Institute
    Inventors: Min-Hung Lee, Shu Tong Chang, Shing Chii Lu, Chee-Wee Liu
  • Publication number: 20060099772
    Abstract: A method with a mechanically strained silicon for enhancing the speeds of integrated circuits or devices is disclosed. The method with a mechanically strained silicon for enhancing the speeds of integrated circuits or devices includes the following steps: (a) providing a substrate, (b) fixing the substrate, (c) applying a stress upon the substrate, and (d) inducing a strain in one of a device and a circuit by stressing the substrate.
    Type: Application
    Filed: November 5, 2004
    Publication date: May 11, 2006
    Applicant: National Taiwan University
    Inventors: Cheng-Ya Yu, Sun-Rong Jan, Shu-Tong Chang, Chee-Wee Liu
  • Patent number: 6812729
    Abstract: A method for characterizing the quality of the interface between a silicon and a gate insulator in a MOS device includes the steps of: applying at least one current to the MOS device through the gate; detecting at least one electroluminescent signal corresponding to the silicon bandgap energy after the current flows through the MOS device; and outputting the electroluminescent waveform in the time domain. The quality of the interface between a silicon and a gate insulator in the MOS device is determined by analyzing the minority carrier lifetime in silicon. The invention also discloses a characterization system for implementing the method.
    Type: Grant
    Filed: June 19, 2002
    Date of Patent: November 2, 2004
    Assignee: National Taiwan University
    Inventors: Miin-Jang Chen, Ching-Fuh Lin, Chee-Wee Liu, Min-Hung Lee, Shu-Tong Chang
  • Publication number: 20040201009
    Abstract: An infrared photodetector formed of a MOS tunneling diode is disclosed. The infrared photodetector comprises a conducting layer, a semiconductor layer comprising at least one layer of quantum structure for confining a carrier in a barrier, an insulating layer formed between the conducting layer and the semiconductor layer, and a voltage source connected to the conducting layer and the semiconductor layer for providing a bias voltage to generate a quantum tunneling effect, such that the carrier penetrates through the insulating layer to form a current, wherein when irradiated by an infrared, the carrier in the barrier absorbs the energy of the infrared to jump out of the barrier and is collected by an electrode to form a photocurrent.
    Type: Application
    Filed: April 1, 2004
    Publication date: October 14, 2004
    Applicant: National Taiwan University
    Inventors: Buo-Chin Hsu, Shu-Tong Chang, Shi-Hao Huang, Chee-Wee Liu
  • Publication number: 20040195624
    Abstract: Strained Si surrounding the SiGe embedded body on a SOI (silicon on insulator) substrate forms a novel FinFET. The mobility in the channel is enhanced due to strain of the Si channel. The strained Si FinFET includes a SOI substrate, an SiGe embedded body, a strained Si channel surrounding layer, an oxide layer, a poly Si gate electrode (or metal gate electrode), a source and a drain.
    Type: Application
    Filed: February 24, 2004
    Publication date: October 7, 2004
    Applicant: National Taiwan University
    Inventors: Chee-Wee Liu, Shu-Tong Chang, Shi-Hao Hwang
  • Publication number: 20030116793
    Abstract: A method for characterizing the quality of the interface between a silicon and a gate insulator in a MOS device includes the steps of: applying at least one current to the MOS device through the gate; detecting at least one electroluminescent signal corresponding to the silicon bandgap energy after the current flows through the MOS device; and outputting the electroluminescent waveform in the time domain. The quality of the interface between a silicon and a gate insulator in the MOS device is determined by analyzing the minority carrier lifetime in silicon. The invention also discloses a characterization system for implementing the method.
    Type: Application
    Filed: June 19, 2002
    Publication date: June 26, 2003
    Inventors: Miin-Jang Chen, Ching-Fuh Lin, Chee-Wee Liu, Min-Hung Lee, Shu-Tong Chang