Patents by Inventor Shu-Wen Lin
Shu-Wen Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10297455Abstract: A method for forming a gate oxide layer on a substrate is provided, in which a region of the substrate is defined out by a shallow trench isolation (STI) structure. An oxide layer covers over the substrate and a mask layer with an opening to expose oxide layer corresponding to the region with an interface edge of the STI structure. The method includes forming a silicon spacer on a sidewall of the opening. A cleaning process is performed through the opening to expose the substrate at the region. An oxidation process is performed on the substrate at the region to form the gate oxide layer, wherein the silicon spacer is also oxidized to merge to an edge of the gate oxide layer.Type: GrantFiled: October 13, 2016Date of Patent: May 21, 2019Assignee: United Microelectronics Corp.Inventors: Shih-Yin Hsiao, Shu-Wen Lin, Ke-Feng Lin, Hsin-Liang Liu, Chang-Lin Chen
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Patent number: 10276652Abstract: A schottky diode includes a schottky junction, an ohmic junction, a first isolation structure and a plurality of doped regions. The schottky junction includes a first well in a substrate and a first electrode contacting the first well. The ohmic junction includes a junction region in the first well and a second electrode contacting the junction region. The first isolation structure is disposed in the substrate and separates the schottky junction from the ohmic junction. The doped regions are located in the first well and under the schottky junction, wherein the doped regions separating from each other constitute a top-view profile of concentric circles.Type: GrantFiled: June 11, 2018Date of Patent: April 30, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Cheng-Hua Yang, Ke-Feng Lin, Ming-Tsung Lee, Shih-Teng Huang, Chih-Chung Wang, Chiu-Te Lee, Shu-Wen Lin
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Publication number: 20180108528Abstract: A method for forming a gate oxide layer on a substrate is provided, in which a region of the substrate is defined out by a shallow trench isolation (STI) structure. An oxide layer covers over the substrate and a mask layer with an opening to expose oxide layer corresponding to the region with an interface edge of the STI structure. The method includes forming a silicon spacer on a sidewall of the opening. A cleaning process is performed through the opening to expose the substrate at the region. An oxidation process is performed on the substrate at the region to form the gate oxide layer, wherein the silicon spacer is also oxidized to merge to an edge of the gate oxide layer.Type: ApplicationFiled: October 13, 2016Publication date: April 19, 2018Applicant: United Microelectronics Corp.Inventors: Shih-Yin Hsiao, Shu-Wen Lin, Ke-Feng Lin, Hsin-Liang Liu, Chang-Lin Chen
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Patent number: 9852952Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a logic region and high-voltage (HV) region; forming a first gate structure on the logic region and a second gate structure on the HV region; forming an interlayer dielectric (ILD) layer around the first gate structure and the second gate structure; forming a patterned hard mask on the HV region; and transforming the first gate structure into a metal gate.Type: GrantFiled: October 28, 2015Date of Patent: December 26, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Chung Wang, Shih-Yin Hsiao, Wen-Fang Lee, Nien-Chung Li, Shu-Wen Lin
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Publication number: 20170125297Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a logic region and high-voltage (HV) region; forming a first gate structure on the logic region and a second gate structure on the HV region; forming an interlayer dielectric (ILD) layer around the first gate structure and the second gate structure; forming a patterned hard mask on the HV region; and transforming the first gate structure into a metal gate.Type: ApplicationFiled: October 28, 2015Publication date: May 4, 2017Inventors: Chih-Chung Wang, Shih-Yin Hsiao, Wen-Fang Lee, Nien-Chung Li, Shu-Wen Lin
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Patent number: 9484422Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.Type: GrantFiled: October 14, 2015Date of Patent: November 1, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
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Publication number: 20160043193Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.Type: ApplicationFiled: October 14, 2015Publication date: February 11, 2016Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
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Patent number: 9236471Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation. The bottom surface of the second portion of the conductive plug is covered by the isolation.Type: GrantFiled: April 15, 2014Date of Patent: January 12, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
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Patent number: 9196695Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.Type: GrantFiled: May 8, 2014Date of Patent: November 24, 2015Assignee: UNITED MICROELECTRONICS CORP.Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
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Publication number: 20150287797Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.Type: ApplicationFiled: May 8, 2014Publication date: October 8, 2015Applicant: UNITED MICROELECTRONICS CORP.Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
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Patent number: 9136375Abstract: A semiconductor structure is provided. The semiconductor structure comprises a substrate, a deep well formed in the substrate, a first well and a second well formed in the deep well, a gate electrode formed on the substrate and disposed between the first well and the second well, a first isolation, and a second isolation. The second well is spaced apart from the first well. The first isolation extends down from the surface of the substrate and is disposed between the gate electrode and the second well. The second isolation extends down from the surface of the substrate and is adjacent to the first well. A ratio of a depth of the first isolation to a depth of the second isolation is smaller than 1.Type: GrantFiled: November 21, 2013Date of Patent: September 15, 2015Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Te Lee, Ming-Shun Hsu, Ke-Feng Lin, Chih-Chung Wang, Hsuan-Po Liao, Shih-Teng Huang, Shu-Wen Lin, Su-Hwa Tsai, Shih-Yin Hsiao
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Publication number: 20150145034Abstract: A LDMOS structure including a semiconductor substrate, a drain region, a lightly doped drain (LDD) region, a source region and a gate structure is provided. The substrate has a trench. The drain region is formed in the semiconductor substrate under the trench. A LDD region is formed in the semiconductor substrate at a sidewall of the trench. The source region is formed in the semiconductor substrate. The gate structure is formed on a surface of the semiconductor substrate above the LDD region between the drain region and the source region. A method for manufacturing the LDMOS structure is also provided.Type: ApplicationFiled: November 24, 2013Publication date: May 28, 2015Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Chiu-Te Lee, Kuan-Yu Chen, Ming-Shun Hsu, Chih-Chung Wang, Ke-Feng Lin, Shu-Wen Lin, Shih-Teng Huang, Kun-Huang Yu
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Publication number: 20150137228Abstract: A semiconductor structure is provided. The semiconductor structure comprises a substrate, a deep well formed in the substrate, a first well and a second well formed in the deep well, a gate electrode formed on the substrate and disposed between the first well and the second well, a first isolation, and a second isolation. The second well is spaced apart from the first well. The first isolation extends down from the surface of the substrate and is disposed between the gate electrode and the second well. The second isolation extends down from the surface of the substrate and is adjacent to the first well. A ratio of a depth of the first isolation to a depth of the second isolation is smaller than 1.Type: ApplicationFiled: November 21, 2013Publication date: May 21, 2015Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Te Lee, Ming-Shun Hsu, Ke-Feng Lin, Chih-Chung Wang, Hsuan-Po Liao, Shih-Teng Huang, Shu-Wen Lin, Su-Hwa Tsai, Shih-Yin Hsiao
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Publication number: 20140225192Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation. The bottom surface of the second portion of the conductive plug is covered by the isolation.Type: ApplicationFiled: April 15, 2014Publication date: August 14, 2014Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
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Patent number: 8766358Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate and extending down from a surface of the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and extending down from the surface of the substrate, and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation.Type: GrantFiled: April 24, 2012Date of Patent: July 1, 2014Assignee: United Microelectronics Corp.Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
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Publication number: 20130277742Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate and extending down from a surface of the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and extending down from the surface of the substrate, and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation.Type: ApplicationFiled: April 24, 2012Publication date: October 24, 2013Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
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Publication number: 20090324326Abstract: An anti-loosing quick-release socket adapter, being easy to produce, having enhanced durability, providing improved stability when combined with a close-end wrench, comprises a hexagonal connecting portion whereon an annular groove is formed with a positioning hole so that a flexible metal wire is fittingly received and positioned in the groove. The metal wire is preformed into a predetermined curved shape and includes two bent segments jutting out a periphery of the hexagonal connecting portion.Type: ApplicationFiled: June 30, 2008Publication date: December 31, 2009Inventor: Shu-Wen Lin
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Publication number: 20080047402Abstract: A socket adapter for a ratchet wrench or a torque wrench that has plural ribs and rib spaces comprises: a hexahedral engaging portion, having a plurality of vertices and edges, further comprising an aperture positioned on the surface of an annular groove; a socket attached to the bottom of the hexahedral engaging portion; a metal elastic wire accommodated along the groove of said hexahedral engaging portion and encircling said interior wall and the metal elastic wire having an open end and a hook portion at the other end to grapple said aperture and further having at least a portion projecting from the surface of the hexahedral engaging portion.Type: ApplicationFiled: August 28, 2006Publication date: February 28, 2008Inventor: Shu-Wen Lin
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Publication number: 20030155933Abstract: A dielectric test structure formed over a dielectric layer. The test structure includes a first structure and a second structure. The first structure comprises a first liner pad, a second liner pad and a first conductive layer for connecting the first and the second liner pad. The second structure comprises a first section and a second section positioned symmetrically on each side of the first conductive layer but detached from the first conductive layer. The first section includes a second conductive layer parallel to the first conductive layer, a third liner pad and a third conductive layer for connecting the second conductive layer and the third liner pad. The second section includes a fourth conductive layer parallel to the first conductive layer, a fourth liner pad and a fifth conductive layer for connecting the fourth conductive layer and the fourth liner pad.Type: ApplicationFiled: February 15, 2002Publication date: August 21, 2003Inventors: Mu-Chun Wang, Shu-Wen Lin
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Patent number: D570659Type: GrantFiled: December 20, 2007Date of Patent: June 10, 2008Assignee: Forging Adapter Co., Ltd.Inventor: Shu-Wen Lin