Patents by Inventor Shu-Wen Lin

Shu-Wen Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10297455
    Abstract: A method for forming a gate oxide layer on a substrate is provided, in which a region of the substrate is defined out by a shallow trench isolation (STI) structure. An oxide layer covers over the substrate and a mask layer with an opening to expose oxide layer corresponding to the region with an interface edge of the STI structure. The method includes forming a silicon spacer on a sidewall of the opening. A cleaning process is performed through the opening to expose the substrate at the region. An oxidation process is performed on the substrate at the region to form the gate oxide layer, wherein the silicon spacer is also oxidized to merge to an edge of the gate oxide layer.
    Type: Grant
    Filed: October 13, 2016
    Date of Patent: May 21, 2019
    Assignee: United Microelectronics Corp.
    Inventors: Shih-Yin Hsiao, Shu-Wen Lin, Ke-Feng Lin, Hsin-Liang Liu, Chang-Lin Chen
  • Patent number: 10276652
    Abstract: A schottky diode includes a schottky junction, an ohmic junction, a first isolation structure and a plurality of doped regions. The schottky junction includes a first well in a substrate and a first electrode contacting the first well. The ohmic junction includes a junction region in the first well and a second electrode contacting the junction region. The first isolation structure is disposed in the substrate and separates the schottky junction from the ohmic junction. The doped regions are located in the first well and under the schottky junction, wherein the doped regions separating from each other constitute a top-view profile of concentric circles.
    Type: Grant
    Filed: June 11, 2018
    Date of Patent: April 30, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Cheng-Hua Yang, Ke-Feng Lin, Ming-Tsung Lee, Shih-Teng Huang, Chih-Chung Wang, Chiu-Te Lee, Shu-Wen Lin
  • Publication number: 20180108528
    Abstract: A method for forming a gate oxide layer on a substrate is provided, in which a region of the substrate is defined out by a shallow trench isolation (STI) structure. An oxide layer covers over the substrate and a mask layer with an opening to expose oxide layer corresponding to the region with an interface edge of the STI structure. The method includes forming a silicon spacer on a sidewall of the opening. A cleaning process is performed through the opening to expose the substrate at the region. An oxidation process is performed on the substrate at the region to form the gate oxide layer, wherein the silicon spacer is also oxidized to merge to an edge of the gate oxide layer.
    Type: Application
    Filed: October 13, 2016
    Publication date: April 19, 2018
    Applicant: United Microelectronics Corp.
    Inventors: Shih-Yin Hsiao, Shu-Wen Lin, Ke-Feng Lin, Hsin-Liang Liu, Chang-Lin Chen
  • Patent number: 9852952
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a logic region and high-voltage (HV) region; forming a first gate structure on the logic region and a second gate structure on the HV region; forming an interlayer dielectric (ILD) layer around the first gate structure and the second gate structure; forming a patterned hard mask on the HV region; and transforming the first gate structure into a metal gate.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: December 26, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Chung Wang, Shih-Yin Hsiao, Wen-Fang Lee, Nien-Chung Li, Shu-Wen Lin
  • Publication number: 20170125297
    Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate having a logic region and high-voltage (HV) region; forming a first gate structure on the logic region and a second gate structure on the HV region; forming an interlayer dielectric (ILD) layer around the first gate structure and the second gate structure; forming a patterned hard mask on the HV region; and transforming the first gate structure into a metal gate.
    Type: Application
    Filed: October 28, 2015
    Publication date: May 4, 2017
    Inventors: Chih-Chung Wang, Shih-Yin Hsiao, Wen-Fang Lee, Nien-Chung Li, Shu-Wen Lin
  • Patent number: 9484422
    Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: November 1, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
  • Publication number: 20160043193
    Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
    Type: Application
    Filed: October 14, 2015
    Publication date: February 11, 2016
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
  • Patent number: 9236471
    Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation. The bottom surface of the second portion of the conductive plug is covered by the isolation.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: January 12, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
  • Patent number: 9196695
    Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
    Type: Grant
    Filed: May 8, 2014
    Date of Patent: November 24, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
  • Publication number: 20150287797
    Abstract: The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
    Type: Application
    Filed: May 8, 2014
    Publication date: October 8, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Huang Yu, Shih-Yin Hsiao, Wen-Fang Lee, Shu-Wen Lin, Kuan-Chuan Chen
  • Patent number: 9136375
    Abstract: A semiconductor structure is provided. The semiconductor structure comprises a substrate, a deep well formed in the substrate, a first well and a second well formed in the deep well, a gate electrode formed on the substrate and disposed between the first well and the second well, a first isolation, and a second isolation. The second well is spaced apart from the first well. The first isolation extends down from the surface of the substrate and is disposed between the gate electrode and the second well. The second isolation extends down from the surface of the substrate and is adjacent to the first well. A ratio of a depth of the first isolation to a depth of the second isolation is smaller than 1.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: September 15, 2015
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chiu-Te Lee, Ming-Shun Hsu, Ke-Feng Lin, Chih-Chung Wang, Hsuan-Po Liao, Shih-Teng Huang, Shu-Wen Lin, Su-Hwa Tsai, Shih-Yin Hsiao
  • Publication number: 20150145034
    Abstract: A LDMOS structure including a semiconductor substrate, a drain region, a lightly doped drain (LDD) region, a source region and a gate structure is provided. The substrate has a trench. The drain region is formed in the semiconductor substrate under the trench. A LDD region is formed in the semiconductor substrate at a sidewall of the trench. The source region is formed in the semiconductor substrate. The gate structure is formed on a surface of the semiconductor substrate above the LDD region between the drain region and the source region. A method for manufacturing the LDMOS structure is also provided.
    Type: Application
    Filed: November 24, 2013
    Publication date: May 28, 2015
    Applicant: UNITED MICROELECTRONICS CORPORATION
    Inventors: Chiu-Te Lee, Kuan-Yu Chen, Ming-Shun Hsu, Chih-Chung Wang, Ke-Feng Lin, Shu-Wen Lin, Shih-Teng Huang, Kun-Huang Yu
  • Publication number: 20150137228
    Abstract: A semiconductor structure is provided. The semiconductor structure comprises a substrate, a deep well formed in the substrate, a first well and a second well formed in the deep well, a gate electrode formed on the substrate and disposed between the first well and the second well, a first isolation, and a second isolation. The second well is spaced apart from the first well. The first isolation extends down from the surface of the substrate and is disposed between the gate electrode and the second well. The second isolation extends down from the surface of the substrate and is adjacent to the first well. A ratio of a depth of the first isolation to a depth of the second isolation is smaller than 1.
    Type: Application
    Filed: November 21, 2013
    Publication date: May 21, 2015
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chiu-Te Lee, Ming-Shun Hsu, Ke-Feng Lin, Chih-Chung Wang, Hsuan-Po Liao, Shih-Teng Huang, Shu-Wen Lin, Su-Hwa Tsai, Shih-Yin Hsiao
  • Publication number: 20140225192
    Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation. The bottom surface of the second portion of the conductive plug is covered by the isolation.
    Type: Application
    Filed: April 15, 2014
    Publication date: August 14, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
  • Patent number: 8766358
    Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate and extending down from a surface of the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and extending down from the surface of the substrate, and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation.
    Type: Grant
    Filed: April 24, 2012
    Date of Patent: July 1, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
  • Publication number: 20130277742
    Abstract: A semiconductor structure comprises a substrate having a first conductive type; a deep well having a second conductive type formed in the substrate and extending down from a surface of the substrate; a first well having the first conductive type and a second well having the second conductive type both formed in the deep well and extending down from the surface of the substrate, and the second well spaced apart from the first well; a gate electrode formed on the substrate and disposed between the first and second wells; an isolation extending down from the surface of the substrate and disposed between the gate electrode and the second well; a conductive plug including a first portion and a second portion electrically connected to each other, and the first portion electrically connected to the gate electrode, and the second portion penetrating into the isolation.
    Type: Application
    Filed: April 24, 2012
    Publication date: October 24, 2013
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chiu-Te Lee, Ke-Feng Lin, Shu-Wen Lin, Kun-Huang Yu, Chih-Chung Wang, Te-Yuan Wu
  • Publication number: 20090324326
    Abstract: An anti-loosing quick-release socket adapter, being easy to produce, having enhanced durability, providing improved stability when combined with a close-end wrench, comprises a hexagonal connecting portion whereon an annular groove is formed with a positioning hole so that a flexible metal wire is fittingly received and positioned in the groove. The metal wire is preformed into a predetermined curved shape and includes two bent segments jutting out a periphery of the hexagonal connecting portion.
    Type: Application
    Filed: June 30, 2008
    Publication date: December 31, 2009
    Inventor: Shu-Wen Lin
  • Publication number: 20080047402
    Abstract: A socket adapter for a ratchet wrench or a torque wrench that has plural ribs and rib spaces comprises: a hexahedral engaging portion, having a plurality of vertices and edges, further comprising an aperture positioned on the surface of an annular groove; a socket attached to the bottom of the hexahedral engaging portion; a metal elastic wire accommodated along the groove of said hexahedral engaging portion and encircling said interior wall and the metal elastic wire having an open end and a hook portion at the other end to grapple said aperture and further having at least a portion projecting from the surface of the hexahedral engaging portion.
    Type: Application
    Filed: August 28, 2006
    Publication date: February 28, 2008
    Inventor: Shu-Wen Lin
  • Publication number: 20030155933
    Abstract: A dielectric test structure formed over a dielectric layer. The test structure includes a first structure and a second structure. The first structure comprises a first liner pad, a second liner pad and a first conductive layer for connecting the first and the second liner pad. The second structure comprises a first section and a second section positioned symmetrically on each side of the first conductive layer but detached from the first conductive layer. The first section includes a second conductive layer parallel to the first conductive layer, a third liner pad and a third conductive layer for connecting the second conductive layer and the third liner pad. The second section includes a fourth conductive layer parallel to the first conductive layer, a fourth liner pad and a fifth conductive layer for connecting the fourth conductive layer and the fourth liner pad.
    Type: Application
    Filed: February 15, 2002
    Publication date: August 21, 2003
    Inventors: Mu-Chun Wang, Shu-Wen Lin
  • Patent number: D570659
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: June 10, 2008
    Assignee: Forging Adapter Co., Ltd.
    Inventor: Shu-Wen Lin