Abstract: A substrate processing apparatus for drying a substrate by substituting a liquid film of a drying liquid formed on the substrate with a supercritical fluid incudes: a pressure container configured to accommodate the substrate on which the liquid film is formed; a discharge line configured to discharge a fluid inside the pressure container; a depressurizing valve provided in a middle of the discharge line; and a concentration measurement part configured to measure a concentration of vapor of the drying liquid in the fluid flowing through the discharge line, wherein the concentration measurement part is provided on a downstream side of the depressurizing valve of the discharge line and measures the concentration of the drying liquid in the fluid depressurized by the depressurizing valve.

Abstract: A controller is configured to control a liquid supply to change a landing position of a liquid on a surface of a substrate continuously by discharging the liquid toward the surface of the substrate from a first liquid discharge nozzle while moving the first liquid discharge nozzle. The controller is also configured to derive discharge position deviation information of the liquid supply by comparing first temperature information based on a spot temperature measured by a temperature measurement device when the first liquid discharge nozzle is moved along a first nozzle path and second temperature information based on the spot temperature measured by the temperature measurement device when the first liquid discharge nozzle is moved along a second nozzle path which is different from the first nozzle path.

Abstract: A process-liquid supply part includes: a supply tank configured to contain a process liquid; a level gauge pipe connected to the supply tank, the level gauge pipe being provided with level sensors for detecting a remaining amount of the process liquid contained in the supply tank; and a measuring part configured to measure a remaining amount of the process liquid based on signals from the level sensors provided on the level gauge pipe. Connected to the supply tank are a process-liquid supply pipe configured to drain the process liquid contained in the supply tank, and a process-liquid return pipe configured to introduce the process liquid drained through the process-liquid supply pipe to the supply tank. A connection pipe, in which an openable and closable valve is provided, disposed between the process-liquid supply pipe or the process-liquid return pipe and the level gauge pipe.

Abstract: A mobile IPv6 dual-stack node engages in IPv6 communication while roaming within an IPv4-only network, for example using ISATAP. First, the node determines that it has moved Bnd obtains a new IPv4 address. After determining that the visited network contains no IPv6-enabled components, the node uses an IPv6 connect agent to engage in IPv6 communication. The node configures its care-of address using the IPv6 connect agent's routing information and the node's newly-obtained IPv4 address. In one embodiment, the node and the connect agent optimize the handoff when the nodes has moved but still uses the same connect agent. The node sends a binding updates to the connect agents comprising the node's old care-of address and the node's new care-of address. When the connect agent receives a packet destined for the node's previous care-of address, it forwards the packet to the node's currents care-of address, thereby reducing packet loss.

Abstract: A process-liquid supply part includes: a supply tank configured to contain a process liquid; a level gauge pipe connected to the supply tank, the level gauge pipe being provided with level sensors for detecting a remaining amount of the process liquid contained in the supply tank; and a measuring part configured to measure a remaining amount of the process liquid based on signals from the level sensors provided on the level gauge pipe. Connected to the supply tank are a process-liquid supply pipe configured to drain the process liquid contained in the supply tank, and a process-liquid return pipe configured to introduce the process liquid drained through the process-liquid supply pipe to the supply tank. A connection pipe, in which an openable and closable valve is provided, disposed between the process-liquid supply pipe or the process-liquid return pipe and the level gauge pipe.

Abstract: A process system produces a process liquid of a predetermined concentration in a blending tank by blending solutions respectively supplied from a plurality of solution supply sources, supplies the process liquid to a supply tank to store therein the process liquid, and supplies the process liquid from the supply tank to a process liquid discharge port. In this process system, whether a concentration of the process liquid in the supply tank has changed or not is judged. When it is judged that the concentration of the process liquid in the supply tank has changed, the process liquid is additionally supplied from the blending tank to the supply tank, or the solution is directly supplied from the solution supply source to the supply tank, so as to maintain the concentration of the process liquid.

Abstract: This invention discloses a method to easily extract a header from an optical packet. An optical data transmission method to transmit an optical packet composed of a header and data containing steps of generating a second clock which has a frequency equal to one integer of that of a first clock carrying the data and synchronizes with the first clock, and carrying the header information on the second clock.

Abstract: A mobile dual-stack node engages in IPv6 communication while roaming within an IPv4-only network. The node determines that it has moved and obtains a new IPv4 address. After determining that the visited network contains no IPv6-enabled components, the node communicates with a tunnel broker to obtain a care-of address and a tunnel to an IPv6 connect agent (e.g., a tunnel server). If the obtained care-of address differs from the care-of address that the node had been using prior to the move, the node sends MIPv6 binding updates to its home agent and corresponding peers. The node can optimize the handoff when it has obtained a different care-of address by sending a binding update to the connect agent comprising the previous care-of address and the current care-of address. When the connect agent receives a packet destined for the previous care-of address, it forwards the packet to the current care-of address.

Abstract: The optical amplifier according to the present invention is constructed such that the amount of the electric current fed to the power feeding line 2a is first detected by the current detection means, and then a setting signal is generated to each of the bypass circuits 22 and 23 in accordance with the thus detected amount of the fed current, and thereafter the output level of each of the optical repeater circuits 11 and 12 is controlled respectively by the bypass circuits 22 and 23, so that the output level of these repeater circuits 11 and 12 can be controlled in accordance with the amount of the current fed to the power feeding line 2a.

Abstract: An IPv6 enabled node finds an IPv6 connect agent by using a Domain Name System (DNS) server. The IPv6 enabled node sends a query to the DNS server and, in response, receives one or more identifiers of one or more IPv6 connect agents. In one embodiment, an identifier comprises the name of an IPv6 connect agent. In this embodiment, the IPv6 enabled node then sends a name of a desired IPv6 connect agent to the DNS server and, in response, receives the address of that IPv6 connect agent. The IPv6 enabled node is then able to engage in IPv6 communication using that IPv6 connect agent. In another embodiment, an identifier comprises the address of an IPv6 connect agent. In this embodiment, the IPv6 enabled node is able to engage in IPv6 communication using that IPv6 connect agent without any further contact with the DNS server.

Abstract: A mobile IPv6 dual-stack node engages in IPv6 communication while roaming within an IPv4-only network, for example using ISATAP. First, the node determines that it has moved and obtains a new IPv4 address. After determining that the visited network contains no IPv6-enabled components, the node uses in IPv6 connect agent to engage in IPv6 communication. The node configures its care-of address using the IPv6 connect agent's routing information and the node's newly-obtained IPv4 address. In one embodiment, the node and the connect agent optimize the handoff when the node has moved but still uses the same connect agent. The node sends a binding update to the connect agent comprising the node's old care-of address and the node's new care-of address. When the connect agent receives a packet destined for the node's previous care-of address, it forwards the packet to the node's current care-of address, thereby reducing packet loss.

Abstract: The present invention has an object to obtain an optical signal quality supervisory device that supervises the quality of an optical signal simply, efficiently and with high accuracy without inviting an increase in cost, an increase in circuit scale and increase in power consumption. The bit rate of the optical supervisory channel is made lower than the bit rate of the optical main channel that is transmitted over an optical communication system, but the reception electric band width of a receiver that receives the optical supervisory channel is made equal to or wider than the reception electric band width of a receiver that receives the optical main channel. Also, the optical supervisory channel is made up of an SOH (section over head) frame to detect an error of the BIP (bit interleaved parity) byte of SOH, thereby supervising the quality of the optical communication system, in particular, the light wave network.

Abstract: An Internet Service Provider provides IPv6 connectivity to a customer without requiring that the customer upgrade its network containing IPv4 components. The Internet Service Provider makes at least one point of presence including at least one IPv6 Connect Agent available to customers. The Internet Service Provider allows a customer's IPv6 enabled node located within the customer's network containing IPv4 components to automatically discover an IPv6 Connect Agent. The Internet Service Provider facilitates IPv6 communication between the customer's IPv6 enabled node and the discovered IPv6 Connect Agent, across the customer's network containing IPv4 components.

Abstract: A four fiber ring network optical switching circuit capable of realizing the bridge function at times of the span switching and the ring switching economically by a very compact structure is disclosed. A four fiber ring network optical switching circuit is formed by a 10×8 optical matrix switch having ten input ports and eight output ports, and two branching elements adapted to branch each one of two optical signals among eight optical signals that are inputs of the four fiber ring network optical switching circuit, into two identical optical signals, and to enter the two identical optical signals into two input ports of the 10×8 optical matrix switch such that the eight optical signals are entered into the ten input ports of the 10×8 optical matrix switch as ten optical signals.

Abstract: Signal light (at a wavelength &lgr;s), entered an input terminal from an optical transmission line, inputs a combiner through an optical amplifier. The combiner combines the output light of the optical amplifier and the probe light (at a wavelength &lgr;p) from a probe light source and applies them to an EA modulator. The EA modulator superimposes a waveform of the signal light on the probe light. An optical BPF transmits only the component of the probe wavelength &lgr;p in the output light of the EA modulator. A photodetector converts the output light of the optical BPF into an electric signal, and an amplifier electrically amplifies the output of the photodetector. A BPF extracts the clock component of the input signal light from the output of the amplifier and applies it to a driver. The driver pulsatively drives the probe light source at the same frequency with that of the clock signal from the BPF and adjusts its pulse phase so as to synchronize with the current pulse from the EA modulator.

Abstract: In a signal demultiplexing device formed by a probe light source, a wavelength converter, and a wavelength demultiplexer, the probe light source is formed by a plurality of sub-probe light sources configured to respectively generate the sub-probe lights with the prescribed different wavelengths for respective time-slots, a multiplexer configured to multiplex the sub-probe lights generated by the plurality of sub-probe light sources, and a phase different giving unit configured to give phase differences corresponding to time-slot positions to the sub-probe lights multiplexed by the multiplexer, and to sequentially output the sub-probe lights with the phase differences in correspondence to respective time-slots.

Abstract: The optical amplifier according to the present invention is constructed such that the amount of the electric current fed to the power feeding line 2a is first detected by the current detection means, and then a setting signal is generated to each of the bypass circuits 22 and 23 in accordance with the thus detected amount of the fed current, and thereafter the output level of each of the optical repeater circuits 11 and 12 is controlled respectively by the bypass circuits 22 and 23, so that the output level of these repeater circuits 11 and 12 can be controlled in accordance with the amount of the current fed to the power feeding line 2a.

Abstract: The optical amplifier according to the present invention is constructed such that the amount of the electric current fed to the power feeding line 2a is first detected by the current detection means, and then a setting signal is generated to each of the bypass circuits 22 and 23 in accordance with the thus detected amount of the fed current, and thereafter the output level of each of the optical repeater circuits 11 and 12 is controlled respectively by the bypass circuits 22 and 23, so that the output level of these repeater circuits 11 and 12 can be controlled in accordance with the amount of the current fed to the power feeding line 2a.

Abstract: An optical repeater monitoring system, according to the invention, comprises an oscillating source, a reference signal transmitter for transmitting a reference signal of a predetermined frequency generated from an output of the oscillating source to a first optical fiber, and an optical repeater. The optical repeater has a first photodetector for converting light from the first optical fiber into an electrical signal, a reference signal extractor for extracting a component of the reference signal from an output of the first photodetector, a carrier generator for generating a carrier from an output of the reference signal extractor, a monitor signal modulator for modulating the carrier generated by the carrier generator with a monitor signal showing a operating state of the optical repeater, a transmitter for transmitting an output of the monitor signal modulator to a second optical fiber.

Abstract: An optical digital regenerator for digitally regenerating an input signal in an intact optical state. A first operating unit has a first probe light generator for generating a first probe light and a first optical operator for converting a waveform of the first probe light output from a first probe light generator according to an optical intensity waveform of the input signal light. A clock extractor extracts a clock component of the input signal light from a photocurrent generated by the first optical operator. A second optical operating unit has a second probe light generator for generating a second probe light pulsed in accordance with the clock output from the clock extractor and a second optical operator for sampling the second probe pulse light output from the second probe light generator.