Abstract: An apparatus includes a vacuum chamber, a reflective optical element arranged in the vacuum chamber and configured to reflect an extreme ultra-violet (EUV) light, and a cleaning module positioned in the vacuum chamber. the cleaning module is operable to provide a mitigation gas flowing towards the reflective optical element and provide a hydrogen-containing gas flowing towards the reflective optical element. The mitigation gas mitigates, by chemical reaction, contamination of the reflective optical element.

Abstract: The disclosed embodiment is related to a manufacturing method of a die-formed 3-dimensional plastic impeller of a centrifugal pump and the impeller manufactured thereby, including a mold for twisted blade and a mold for impeller outlet, the mold for twisted blade is configured to form a twisted blade portion of each blade of the impeller, the mold for impeller outlet is configured to form a rear portion of each blade, a hub rim part of the impeller, and a shroud rim part of the impeller so that the hub rim part, the shroud rim part, and the blades are formed in a single piece at the same molding process.

Abstract: The disclosed embodiment is related to a manufacturing method of a die-formed 3-dimensional plastic impeller of a centrifugal pump and the impeller manufactured thereby, including a mold for twisted blade and a mold for impeller outlet, the mold for twisted blade is configured to form a twisted blade portion of each blade of the impeller, the mold for impeller outlet is configured to form a rear portion of each blade, a hub rim part of the impeller, and a shroud rim part of the impeller so that the hub rim part, the shroud rim part, and the blades are formed in a single piece at the same molding process.

Abstract: A structure improvement of a pump casing with a Polyfluoroalkoxy (PFA) liner which improves manufacturing efficiency, reduces manufacturing cost and improves yield strength, more particular to keep the stiffness of the shaft support and improve yield of the pump casing. The metal pump casing with the PFA liner used for handling corrosive liquids includes a suction casing with PFA liner, and a volute casing with PFA liner for accommodating an impeller. The volute casing also collects and then ejects the liquid through a discharge. The suction casing with the PFA liner and the volute casing with the PFA liner are separately formed as two workpieces by injection molding process and then assembled to form the pump casing so as to reduce the residual stress applied in the PFA liner.

Abstract: A structure improvement of a pump casing with a Polyfluoroalkoxy (PFA) liner which improves manufacturing efficiency, reduces manufacturing cost and improves yield strength, more particular to keep the stiffness of the shaft support and improve yield of the pump casing. The metal pump casing with the PFA liner used for handling corrosive liquids includes a suction casing with PFA liner, and a volute casing with PFA liner for accommodating an impeller. The volute casing also collects and then ejects the liquid through a discharge. The suction casing with the PFA liner and the volute casing with the PFA liner are separately formed as two workpieces by injection molding process and then assembled to form the pump casing so as to reduce the residual stress applied in the PFA liner.

Abstract: The present invention discloses structural improvement of the vertical submerged pump for chemical application. The present invention is focus on reducing the crystal lump generated from high speed etching process. Structural improvement includes a shaft seal device, a diffuser and an upper inner plate. The shaft seal device offer extra flow resistance to balance the differential pressure between the inner space and pump front casing, the function are prevents air bubbles be sucked into the pump, and reduces flow leakage from the front casing into inner space, also absorbs high-pressure back-flush to avoid liquid splash in dry surface of inner space of support column. The diffuser in the support column offer extra inducer function to guides the liquid from the inner space flowing out to the tank, so as to get a stable liquid level in the inner space, thereby largely reducing splashing of the liquid.