Patents by Inventor Shuaitao SHI

Shuaitao SHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MAGNETRON SPUTTERING APPARATUS
    Publication number: 20240068087
    Abstract: The present disclosure provides a magnetron sputtering apparatus, including a process chamber, a bias power supply assembly, and an excitation power supply assembly. The process chamber is provided with a base assembly and a bias guide assembly. A target is arranged at a top of the process chamber. The base assembly is arranged at a bottom of the process chamber and is configured to support a wafer carrier, drive the wafer carrier to move, and heat the wafer carrier. The bias guide assembly is arranged at the base assembly and configured to support the wafer carrier. The bias guide assembly is electrically in contact with the wafer carrier. The bias power supply assembly is electrically connected to the bias guide assembly and configured to apply a bias voltage to the wafer carrier through the bias guide assembly.
    Type: Application
    Filed: December 21, 2021
    Publication date: February 29, 2024
    Inventors: Shubo WU, Yinggong MA, Shuaitao SHI, Wenxue XU, Bingliang GUO, Ziyang ZHEN, Lu ZHANG, Yaxin CUI, Hongtao ZHAI
  • Electrostatic chuck and semiconductor equipment
    Patent number: 11282735
    Abstract: An electrostatic chuck includes a support assembly including a base, a chuck placed at the base and configured to carry a workpiece, and a fastening assembly configured to removably fix the chuck at the base.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: March 22, 2022
    Assignee: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    Inventors: Quanyu Shi, Shuaitao Shi, Mengxin Zhao, Jinrong Zhao
  • ELECTROSTATIC CHUCK AND SEMICONDUCTOR EQUIPMENT
    Publication number: 20200312692
    Abstract: An electrostatic chuck includes a support assembly including a base, a chuck placed at the base and configured to carry a workpiece, and a fastening assembly configured to removably fix the chuck at the base.
    Type: Application
    Filed: November 15, 2018
    Publication date: October 1, 2020
    Inventors: Quanyu SHI, Shuaitao SHI, Mengxin ZHAO, Jinrong ZHAO