Abstract: Various embodiments of the present technology may provide a first vessel to contain a slurry of a solid precursor powder and an inert liquid, a second vessel to receive the slurry, evaporate the inert liquid, and sublimate the solid precursor powder a first time to form a vapor, a third vessel to recondense the vapor back into a solid state and sublimate the solid precursor a second time to form a vapor, and a reaction chamber to receive the vapor from the third vessel.

Abstract: Various embodiments of the present technology may provide a feature to isolate an upper chamber of a reaction chamber from a lower chamber of a reaction chamber. In one case, a susceptor has a groove along an outer edge that is configured to mate with a spacer plate. A seal is disposed in the groove. In another case, a flow control ring, which rests on the susceptor, has a groove along an outer edge that is configured to mate with the spacer plate.

Abstract: Various embodiments of the present technology may provide methods and apparatus for cleaning a source vessel. The source vessel may be filled or partially filled with a solvent to form a solution. The solution is removed from the source vessel and contained in a waste vessel that is connected to the source vessel. The waste vessel may have a bellow or other mechanism inside of it to create a negative pressure in the waste vessel to pull the solution out of the source vessel and into the waste vessel. Alternatively, a liquid pump may be used to pull the solution from the source vessel to the waste vessel.

Abstract: Various embodiments of the present technology may provide an apparatus for use within a reaction chamber. The apparatus includes a susceptor plate having through-holes for which lift pins may be disposed therein. In addition, the susceptor may include an electrostatic chucking function. The susceptor may also include a metal interconnect that is electrically connected to other metal interconnects with a brazing material.

Abstract: The present disclosure provides a description of exemplary systems and methods for enabling faster proof-of-work in a distributed ledger. The methods and systems may include a processor which may generate a first hash having a first difficulty level as a first proof of work associated with a first plurality of selected transactions. The first hash not being accepted by a distributed ledger network. The processor may receive a second plurality of selected transactions and determine a second difficulty level for a second proof of work associated with the second plurality of selected transactions. The processor may compare the first difficulty level to the second difficulty level. In response to determining that the first difficulty level is less than the second difficulty level, the processor may generate a second hash as a second proof-of-work for the second plurality of selected transactions having a residual difficulty level.

Abstract: Herein disclosed are systems and methods related to delivery systems using solid source chemical fill vessels. The delivery system can include a vapor deposition reactor, two or more fill vessels, of which one of more can be remote from the vapor deposition reactor. Each fill vessel is configured to hold solid source chemical reactant therein. An interconnect line or conduit can fluidly connect the vapor deposition reactor with one or more of the fill vessels. A line heater can heat at least a portion of the interconnect line to at least a minimum line temperature.

Abstract: Disclosed are a method and a Universal Flash Storage (UFS) system for performing save state switching using selective lanes between a first electronic device and a second electronic device. The method includes: determining, by the first electronic device, whether a data request is received from an application layer of the first electronic device; and performing, by the first electronic device, at least one of: setting a first lane from among a plurality of lanes between the first electronic device and the second electronic device to an active state and the other lanes from among the plurality of lanes to a power save state based on determining that the data request is not received from the application layer of the first electronic device; and setting the plurality of lanes between the first electronic device and the second electronic device to the active state based on determining that the data request is received from the application layer of the first electronic device.

Abstract: Systems, methods, and apparatuses for controlling a robot including a manipulator, including: determining three-dimensional (3D) geometry information about a target object based on an image of the target object; determining 3D geometry information about a scene in which the target object is to be placed based on at least one image of the scene; obtaining affordance information by providing the 3D geometry information about the target object and the 3D geometry information about the scene to at least one neural network model; commanding the robot to grasp the target object using the manipulator according to a grasp orientation corresponding to the affordance information; and commanding the robot to position the manipulator according to a placement direction corresponding to the affordance information in order to place the target object at a location in the scene.

Abstract: A method for ensuring precedence for the processing of a blockchain transaction to prevent loss of cryptographic currency includes receiving a new blockchain transaction by a blockchain node in a blockchain network, confirming the new blockchain transaction including identifying a precedence transaction that was previously conducted and stored in the blockchain that involves both blockchain wallets included in the new blockchain transaction, including the new blockchain transaction in a new block that is generated, and distributing the new block to additional nodes in the blockchain network for confirmation and addition to the blockchain.

Abstract: An electrostatic chuck (ESC) pedestal heater that includes a pedestal body and a surface on the pedestal body for receiving a substrate such as a high bow wafer. An electrode is embedded in the pedestal body to selectively generate an electrostatic force. The ESC pedestal heater includes a substrate contact surface that is raised to a height above the surface on the pedestal body and includes an inner seal band, an intermediate seal band, and an outer seal band extending. In the substrate contact surface, main spokes are provided that extend outward from the inner seal band to the outer seal band, and ancillary spokes may be provided between the main spokes in the region between the intermediate and outer seal bands. Additionally, contact areas or dots are provided in the substrate contact surface in the spaces between the bands and spokes.

Abstract: A heater assembly having a laminate heater plate and a shaft. The laminate heater plate is formed from a plurality of layers, wherein one or more layers may comprise one or more of a heating element, an RF electrode, a cooling channel, and an RTD sensor.

Abstract: A semiconductor processing device comprises a susceptor assembly comprising a wafer support configured to support a wafer. The wafer support comprises a wafer support body configured to support the wafer, a purge channel extending laterally from an inner portion of the wafer support body to an outer portion of the wafer support body, a first plenum channel disposed at the outer portion of the wafer support and in fluid communication with the purge channel, and an outlet to deliver purge gas to an edge of the wafer, the outlet in fluid communication with the first plenum channel, a purge gas supply hole on a surface opposite to the wafer support body. The purge gas supply hole is in fluid communication with the purge channel, and a plurality of first purge holes fluidly communicated with the first plenum channel and the purge channel.

Abstract: A reactor can include a reaction chamber, a substrate support configured to support a substrate on a top side of the substrate support, and an elongate delivery apparatus disposed within the reaction chamber. The substrate support may be actuated to an upper position and to a lower position along a vertical axis within the reaction chamber. The substrate support may have a maximum horizontal dimension from the vertical axis along a horizontal axis substantially orthogonal to the vertical axis. The elongate delivery apparatus may have an inner horizontal dimension greater than the maximum horizontal dimension of the substrate support. The delivery apparatus can allow gas to pass through an interior of the delivery apparatus. The delivery apparatus can include a plurality of apertures. Each of the plurality of apertures can allow passage of the gas from the interior of the delivery apparatus into the reaction chamber.

Abstract: A payload suspension system is described herein. A payload suspension system may comprise a suspended payload container within an internal cavity defined by the payload suspension system. The suspended payload container may be suspended by one or more tensile members. The one or more tensile members may be coupled with respective tension adjustment mechanisms configured to adjust a tension of the tensile members. The tension may be adjusted based on a transition to and from a low- or micro-gravity state, in order to provide an increased or decreased movement/rotational ability for the payload container. The low- or micro-gravity state may be produced due to an aircraft performing a parabolic maneuver.

Abstract: Disclosed are a method and a Universal Flash Storage (UFS) system for performing save state switching using selective lanes between a first electronic device and a second electronic device. The method includes: determining, by the first electronic device, whether a data request is received from an application layer of the first electronic device; and performing, by the first electronic device, at least one of: setting a first lane from among a plurality of lanes between the first electronic device and the second electronic device to an active state and the other lanes from among the plurality of lanes to a power save state based on determining that the data request is not received from the application layer of the first electronic device; and setting the plurality of lanes between the first electronic device and the second electronic device to the active state based on determining that the data request is received from the application layer of the first electronic device.